JPH03125060U - - Google Patents
Info
- Publication number
- JPH03125060U JPH03125060U JP3047790U JP3047790U JPH03125060U JP H03125060 U JPH03125060 U JP H03125060U JP 3047790 U JP3047790 U JP 3047790U JP 3047790 U JP3047790 U JP 3047790U JP H03125060 U JPH03125060 U JP H03125060U
- Authority
- JP
- Japan
- Prior art keywords
- target part
- vapor deposition
- deposition apparatus
- cover
- arc vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 238000007664 blowing Methods 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 1
Description
第１図は本考案の実施例を示すアーク式蒸着装
置の概略説明図、第２図ａ及びｂは本考案の実施
例を示すアーク式蒸着装置のターゲツト部の斜視
図、第３図は従来例を示すアーク式蒸着装置の概
略説明図である。
１，１１，２１，３１……ターゲツト、２，１
２……ワーク、３，１３……ホルダー、４，１４
……真空容器、１４ａ，２４ａ，３４ａ……カバ
ー、５，１５……カソード電源、６，１６……基
板バイアス電源、７，１７……排気口、８，１８
，２８，３８……ガス導入口、９，１９，２９，
３９……イグナイター、１０，２０……駆動源。
FIG. 1 is a schematic explanatory diagram of an arc vapor deposition apparatus showing an embodiment of the present invention, FIGS. 2 a and b are perspective views of a target section of an arc vapor deposition apparatus showing an embodiment of the invention, and FIG. 3 is a conventional one. FIG. 1 is a schematic explanatory diagram of an example arc vapor deposition apparatus. 1, 11, 21, 31...Target, 2, 1
2... Work, 3, 13... Holder, 4, 14
... Vacuum container, 14a, 24a, 34a ... Cover, 5, 15 ... Cathode power supply, 6, 16 ... Substrate bias power supply, 7, 17 ... Exhaust port, 8, 18
, 28, 38...Gas inlet, 9, 19, 29,
39...Igniter, 10,20...Drive source.
Claims (1)
ーゲツト部の構造において、ターゲツト及び該タ
ーゲツトに近接して配設されているイグナイター
の近傍に、少なくとも１面に開口部を有するカバ
ーでおおうと共に、該カバーの内面に反応ガスを
吹出す吹出し口を少なくとも１つ設けたことを特
徴とするアーク式蒸着装置のターゲツト部構造。 In the structure of a target part disposed in a vacuum container of an arc vapor deposition apparatus, the target part and the igniter disposed close to the target are covered with a cover having an opening on at least one surface, and A structure of a target part of an arc vapor deposition apparatus, characterized in that the inner surface of the cover is provided with at least one outlet for blowing out a reaction gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3047790U JPH03125060U (en) | 1990-03-27 | 1990-03-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3047790U JPH03125060U (en) | 1990-03-27 | 1990-03-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03125060U true JPH03125060U (en) | 1991-12-18 |
Family
ID=31533188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3047790U Pending JPH03125060U (en) | 1990-03-27 | 1990-03-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03125060U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08283933A (en) * | 1995-04-07 | 1996-10-29 | Nissin Electric Co Ltd | Electric-arc vaporization source |
-
1990
- 1990-03-27 JP JP3047790U patent/JPH03125060U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08283933A (en) * | 1995-04-07 | 1996-10-29 | Nissin Electric Co Ltd | Electric-arc vaporization source |