JPH01100431U - - Google Patents

Info

Publication number
JPH01100431U
JPH01100431U JP19507587U JP19507587U JPH01100431U JP H01100431 U JPH01100431 U JP H01100431U JP 19507587 U JP19507587 U JP 19507587U JP 19507587 U JP19507587 U JP 19507587U JP H01100431 U JPH01100431 U JP H01100431U
Authority
JP
Japan
Prior art keywords
reactor
vapor phase
phase growth
growth apparatus
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19507587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19507587U priority Critical patent/JPH01100431U/ja
Publication of JPH01100431U publication Critical patent/JPH01100431U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP19507587U 1987-12-23 1987-12-23 Pending JPH01100431U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19507587U JPH01100431U (enExample) 1987-12-23 1987-12-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19507587U JPH01100431U (enExample) 1987-12-23 1987-12-23

Publications (1)

Publication Number Publication Date
JPH01100431U true JPH01100431U (enExample) 1989-07-05

Family

ID=31485770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19507587U Pending JPH01100431U (enExample) 1987-12-23 1987-12-23

Country Status (1)

Country Link
JP (1) JPH01100431U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0357931U (enExample) * 1989-10-11 1991-06-05

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0357931U (enExample) * 1989-10-11 1991-06-05

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