JPH0261966U - - Google Patents
Info
- Publication number
- JPH0261966U JPH0261966U JP1988139706U JP13970688U JPH0261966U JP H0261966 U JPH0261966 U JP H0261966U JP 1988139706 U JP1988139706 U JP 1988139706U JP 13970688 U JP13970688 U JP 13970688U JP H0261966 U JPH0261966 U JP H0261966U
- Authority
- JP
- Japan
- Prior art keywords
- epitaxial growth
- reaction tube
- hydride
- source metal
- divided
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988139706U JPH0261966U (enExample) | 1988-10-26 | 1988-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988139706U JPH0261966U (enExample) | 1988-10-26 | 1988-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0261966U true JPH0261966U (enExample) | 1990-05-09 |
Family
ID=31403215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988139706U Pending JPH0261966U (enExample) | 1988-10-26 | 1988-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0261966U (enExample) |
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1988
- 1988-10-26 JP JP1988139706U patent/JPH0261966U/ja active Pending