JP7812803B2 - トランスデューサ - Google Patents

トランスデューサ

Info

Publication number
JP7812803B2
JP7812803B2 JP2022566785A JP2022566785A JP7812803B2 JP 7812803 B2 JP7812803 B2 JP 7812803B2 JP 2022566785 A JP2022566785 A JP 2022566785A JP 2022566785 A JP2022566785 A JP 2022566785A JP 7812803 B2 JP7812803 B2 JP 7812803B2
Authority
JP
Japan
Prior art keywords
membrane
protective film
piezoelectric element
protrusion
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022566785A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2022118575A1 (https=
Inventor
達也 鈴木
敬和 藤森
規之 下地
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Publication of JPWO2022118575A1 publication Critical patent/JPWO2022118575A1/ja
Application granted granted Critical
Publication of JP7812803B2 publication Critical patent/JP7812803B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
    • H04R7/04—Plane diaphragms
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/02—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/16—Mounting or tensioning of diaphragms or cones
    • H04R7/18—Mounting or tensioning of diaphragms or cones at the periphery

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Micromachines (AREA)
JP2022566785A 2020-12-01 2021-10-27 トランスデューサ Active JP7812803B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020199459 2020-12-01
JP2020199459 2020-12-01
PCT/JP2021/039628 WO2022118575A1 (ja) 2020-12-01 2021-10-27 トランスデューサ

Publications (2)

Publication Number Publication Date
JPWO2022118575A1 JPWO2022118575A1 (https=) 2022-06-09
JP7812803B2 true JP7812803B2 (ja) 2026-02-10

Family

ID=81853637

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022566785A Active JP7812803B2 (ja) 2020-12-01 2021-10-27 トランスデューサ

Country Status (4)

Country Link
US (1) US12501221B2 (https=)
JP (1) JP7812803B2 (https=)
CN (1) CN116547231A (https=)
WO (1) WO2022118575A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116828375B (zh) * 2023-08-08 2025-09-23 安徽奥飞声学科技有限公司 Mems结构及其制备方法，mems压电麦克风

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006121648A (ja) 2004-09-22 2006-05-11 Ngk Insulators Ltd 圧電音響素子及び圧電音響発生装置
JP2006157226A (ja) 2004-11-26 2006-06-15 Hosiden Corp フラットパネルスピーカ
US20090284102A1 (en) 2008-04-07 2009-11-19 Stichting Imec Nederland System and Method for Resonance Frequency Tuning of Resonant Devices
JP2014225317A (ja) 2013-05-03 2014-12-04 シーゲイト テクノロジー エルエルシー マイクロアクチュエータおよびディスクドライブ
JP2019161030A (ja) 2018-03-14 2019-09-19 新日本無線株式会社 圧電素子
CN111050256A (zh) 2019-12-17 2020-04-21 武汉大学 一种小型化的高灵敏度压电式麦克风

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5961698U (ja) * 1982-10-18 1984-04-23 オムロン株式会社 電気音響変換器
JP2001069596A (ja) * 1999-08-25 2001-03-16 Hosiden Corp 半導体エレクトレットコンデンサマイクロホンの製造方法及び半導体エレクトレットコンデンサマイクロホン
JP4715236B2 (ja) * 2005-03-01 2011-07-06 株式会社デンソー 超音波センサ装置
JP2012105170A (ja) * 2010-11-12 2012-05-31 Yamaha Corp 圧電型トランスデューサーおよびその製造方法
JP6232957B2 (ja) * 2013-11-18 2017-11-22 株式会社村田製作所 圧電型加速度センサ
WO2018061805A1 (ja) 2016-09-29 2018-04-05 富士フイルム株式会社 圧電式マイクロフォン
JP6809094B2 (ja) * 2016-09-29 2021-01-06 セイコーエプソン株式会社 圧電素子、圧電アクチュエーター、超音波探触子、超音波装置、電子機器、液体噴射ヘッド、及び液体噴射装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006121648A (ja) 2004-09-22 2006-05-11 Ngk Insulators Ltd 圧電音響素子及び圧電音響発生装置
JP2006157226A (ja) 2004-11-26 2006-06-15 Hosiden Corp フラットパネルスピーカ
US20090284102A1 (en) 2008-04-07 2009-11-19 Stichting Imec Nederland System and Method for Resonance Frequency Tuning of Resonant Devices
JP2014225317A (ja) 2013-05-03 2014-12-04 シーゲイト テクノロジー エルエルシー マイクロアクチュエータおよびディスクドライブ
JP2019161030A (ja) 2018-03-14 2019-09-19 新日本無線株式会社 圧電素子
CN111050256A (zh) 2019-12-17 2020-04-21 武汉大学 一种小型化的高灵敏度压电式麦克风

Also Published As

Publication number Publication date
WO2022118575A1 (ja) 2022-06-09
CN116547231A (zh) 2023-08-04
US20230292055A1 (en) 2023-09-14
US12501221B2 (en) 2025-12-16
JPWO2022118575A1 (https=) 2022-06-09

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