CN116547231A - 换能器 - Google Patents

换能器 Download PDF

Info

Publication number
CN116547231A
CN116547231A CN202180081004.5A CN202180081004A CN116547231A CN 116547231 A CN116547231 A CN 116547231A CN 202180081004 A CN202180081004 A CN 202180081004A CN 116547231 A CN116547231 A CN 116547231A
Authority
CN
China
Prior art keywords
film
piezoelectric element
transducer according
substrate
protective film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180081004.5A
Other languages
English (en)
Chinese (zh)
Inventor
铃木达也
藤森敬和
下地规之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Publication of CN116547231A publication Critical patent/CN116547231A/zh
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/02—Microphones
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
    • H04R7/04—Plane diaphragms
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/16—Mounting or tensioning of diaphragms or cones
    • H04R7/18—Mounting or tensioning of diaphragms or cones at the periphery

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Micromachines (AREA)
CN202180081004.5A 2020-12-01 2021-10-27 换能器 Pending CN116547231A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020199459 2020-12-01
JP2020-199459 2020-12-01
PCT/JP2021/039628 WO2022118575A1 (ja) 2020-12-01 2021-10-27 トランスデューサ

Publications (1)

Publication Number Publication Date
CN116547231A true CN116547231A (zh) 2023-08-04

Family

ID=81853637

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180081004.5A Pending CN116547231A (zh) 2020-12-01 2021-10-27 换能器

Country Status (4)

Country Link
US (1) US12501221B2 (https=)
JP (1) JP7812803B2 (https=)
CN (1) CN116547231A (https=)
WO (1) WO2022118575A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116828375B (zh) * 2023-08-08 2025-09-23 安徽奥飞声学科技有限公司 Mems结构及其制备方法，mems压电麦克风

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5961698U (ja) * 1982-10-18 1984-04-23 オムロン株式会社 電気音響変換器
JP2012105170A (ja) * 2010-11-12 2012-05-31 Yamaha Corp 圧電型トランスデューサーおよびその製造方法
CN107887501A (zh) * 2016-09-29 2018-04-06 精工爱普生株式会社 压电元件及电子设备
JP2019161030A (ja) * 2018-03-14 2019-09-19 新日本無線株式会社 圧電素子

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001069596A (ja) * 1999-08-25 2001-03-16 Hosiden Corp 半導体エレクトレットコンデンサマイクロホンの製造方法及び半導体エレクトレットコンデンサマイクロホン
JP4511407B2 (ja) 2004-09-22 2010-07-28 日本碍子株式会社 圧電音響発生装置
JP4188304B2 (ja) 2004-11-26 2008-11-26 ホシデン株式会社 圧電アクチュエータ、フラットパネルスピーカ
JP4715236B2 (ja) * 2005-03-01 2011-07-06 株式会社デンソー 超音波センサ装置
EP2109217A3 (en) 2008-04-07 2013-05-15 Stichting IMEC Nederland System and method for resonance frequency tuning of resonant devices
US8854772B1 (en) 2013-05-03 2014-10-07 Seagate Technology Llc Adhesion enhancement of thin film PZT structure
JP6232957B2 (ja) * 2013-11-18 2017-11-22 株式会社村田製作所 圧電型加速度センサ
WO2018061805A1 (ja) 2016-09-29 2018-04-05 富士フイルム株式会社 圧電式マイクロフォン
CN111050256A (zh) 2019-12-17 2020-04-21 武汉大学 一种小型化的高灵敏度压电式麦克风

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5961698U (ja) * 1982-10-18 1984-04-23 オムロン株式会社 電気音響変換器
JP2012105170A (ja) * 2010-11-12 2012-05-31 Yamaha Corp 圧電型トランスデューサーおよびその製造方法
CN107887501A (zh) * 2016-09-29 2018-04-06 精工爱普生株式会社 压电元件及电子设备
JP2019161030A (ja) * 2018-03-14 2019-09-19 新日本無線株式会社 圧電素子

Also Published As

Publication number Publication date
WO2022118575A1 (ja) 2022-06-09
JP7812803B2 (ja) 2026-02-10
US20230292055A1 (en) 2023-09-14
US12501221B2 (en) 2025-12-16
JPWO2022118575A1 (https=) 2022-06-09

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