JP7805784B2 - 圧縮成形用封止材及び電子部品装置 - Google Patents
圧縮成形用封止材及び電子部品装置Info
- Publication number
- JP7805784B2 JP7805784B2 JP2021545634A JP2021545634A JP7805784B2 JP 7805784 B2 JP7805784 B2 JP 7805784B2 JP 2021545634 A JP2021545634 A JP 2021545634A JP 2021545634 A JP2021545634 A JP 2021545634A JP 7805784 B2 JP7805784 B2 JP 7805784B2
- Authority
- JP
- Japan
- Prior art keywords
- inorganic filler
- compression molding
- coupling agent
- sealing material
- mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D163/00—Coating compositions based on epoxy resins; Coating compositions based on derivatives of epoxy resins
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
- C08G59/40—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
- C08G59/62—Alcohols or phenols
- C08G59/621—Phenols
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
- H10W74/47—Encapsulations, e.g. protective coatings characterised by their materials comprising organic materials, e.g. plastics or resins
- H10W74/473—Encapsulations, e.g. protective coatings characterised by their materials comprising organic materials, e.g. plastics or resins containing a filler
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/003—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor characterised by the choice of material
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
- C08G59/20—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
- C08G59/22—Di-epoxy compounds
- C08G59/24—Di-epoxy compounds carbocyclic
- C08G59/245—Di-epoxy compounds carbocyclic aromatic
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
- C08G59/20—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
- C08G59/32—Epoxy compounds containing three or more epoxy groups
- C08G59/3218—Carbocyclic compounds
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K9/00—Use of pretreated ingredients
- C08K9/04—Ingredients treated with organic substances
- C08K9/06—Ingredients treated with organic substances with silicon-containing compounds
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L63/00—Compositions of epoxy resins; Compositions of derivatives of epoxy resins
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
- C09D7/40—Additives
- C09D7/60—Additives non-macromolecular
- C09D7/61—Additives non-macromolecular inorganic
- C09D7/62—Additives non-macromolecular inorganic modified by treatment with other compounds
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
- C09D7/40—Additives
- C09D7/66—Additives characterised by particle size
- C09D7/68—Particle size between 100-1000 nm
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
- C09D7/40—Additives
- C09D7/66—Additives characterised by particle size
- C09D7/69—Particle size larger than 1000 nm
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/18—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2031/00—Other particular articles
- B29L2031/34—Electrical apparatus, e.g. sparking plugs or parts thereof
- B29L2031/3481—Housings or casings incorporating or embedding electric or electronic elements
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K2201/00—Specific properties of additives
- C08K2201/002—Physical properties
- C08K2201/005—Additives being defined by their particle size in general
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/34—Silicon-containing compounds
- C08K3/36—Silica
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2203/00—Applications
- C08L2203/20—Applications use in electrical or conductive gadgets
- C08L2203/206—Applications use in electrical or conductive gadgets use in coating or encapsulating of electronic parts
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2205/00—Polymer mixtures characterised by other features
- C08L2205/02—Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group
- C08L2205/025—Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group containing two or more polymers of the same hierarchy C08L, and differing only in parameters such as density, comonomer content, molecular weight, structure
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Materials Engineering (AREA)
- Wood Science & Technology (AREA)
- Nanotechnology (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Sealing Material Composition (AREA)
- Epoxy Resins (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2024194411A JP2025013531A (ja) | 2019-09-12 | 2024-11-06 | 圧縮成形用封止材及び電子部品装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2019/035934 WO2021048977A1 (ja) | 2019-09-12 | 2019-09-12 | 圧縮成形用封止材及び電子部品装置 |
| JPPCT/JP2019/035934 | 2019-09-12 | ||
| PCT/JP2020/034575 WO2021049645A1 (ja) | 2019-09-12 | 2020-09-11 | 圧縮成形用封止材及び電子部品装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024194411A Division JP2025013531A (ja) | 2019-09-12 | 2024-11-06 | 圧縮成形用封止材及び電子部品装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2021049645A1 JPWO2021049645A1 (https=) | 2021-03-18 |
| JP7805784B2 true JP7805784B2 (ja) | 2026-01-26 |
Family
ID=74866310
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021545634A Active JP7805784B2 (ja) | 2019-09-12 | 2020-09-11 | 圧縮成形用封止材及び電子部品装置 |
| JP2024194411A Pending JP2025013531A (ja) | 2019-09-12 | 2024-11-06 | 圧縮成形用封止材及び電子部品装置 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024194411A Pending JP2025013531A (ja) | 2019-09-12 | 2024-11-06 | 圧縮成形用封止材及び電子部品装置 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US12404420B2 (https=) |
| EP (1) | EP4030474A4 (https=) |
| JP (2) | JP7805784B2 (https=) |
| KR (1) | KR20220062006A (https=) |
| CN (1) | CN114402029B (https=) |
| TW (1) | TWI868209B (https=) |
| WO (2) | WO2021048977A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021048977A1 (ja) | 2019-09-12 | 2021-03-18 | 昭和電工マテリアルズ株式会社 | 圧縮成形用封止材及び電子部品装置 |
| US20210257335A1 (en) * | 2020-02-19 | 2021-08-19 | Nanya Technology Corporation | Semiconductor package and method of manufacturing the same |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003213095A (ja) | 2002-01-29 | 2003-07-30 | Sumitomo Bakelite Co Ltd | エポキシ樹脂組成物及び半導体装置 |
| WO2011064964A1 (ja) | 2009-11-24 | 2011-06-03 | 住友ベークライト株式会社 | 流動特性測定用金型、流動特性測定方法、半導体封止用樹脂組成物及び半導体装置の製造方法 |
| JP2011246522A (ja) | 2010-05-24 | 2011-12-08 | Hitachi Chem Co Ltd | 圧縮成形用エポキシ樹脂組成物及び、電子部品装置 |
| JP2014141573A (ja) | 2013-01-23 | 2014-08-07 | Kyocera Chemical Corp | 半導体封止用樹脂組成物および半導体封止装置 |
| WO2018123745A1 (ja) | 2016-12-27 | 2018-07-05 | 日立化成株式会社 | 樹脂組成物及び電子部品装置 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002069157A (ja) * | 2000-08-24 | 2002-03-08 | Nitto Denko Corp | 半導体封止用樹脂組成物、およびそれを用いた半導体装置、半導体ウエハ、ならびに半導体装置の実装構造 |
| WO2002024808A1 (fr) * | 2000-09-25 | 2002-03-28 | Hitachi Chemical Co., Ltd. | Materiau de moulage de resine epoxy utilise a des fins d'etancheite |
| JP2004307649A (ja) | 2003-04-07 | 2004-11-04 | Hitachi Chem Co Ltd | 封止用エポキシ樹脂成形材料及び半導体装置 |
| JP4432381B2 (ja) * | 2003-07-09 | 2010-03-17 | 日立化成工業株式会社 | 封止用エポキシ樹脂成形材料及び電子部品装置 |
| JP3811154B2 (ja) * | 2003-11-17 | 2006-08-16 | 京セラケミカル株式会社 | 封止用樹脂組成物および樹脂封止型半導体装置 |
| KR101005994B1 (ko) * | 2005-04-15 | 2011-01-05 | 히다치 가세고교 가부시끼가이샤 | 경화 촉진성 화합물-실리카 복합체, 경화 촉진성화합물-실리카 복합체의 제조 방법, 경화 촉진제, 경화성수지 조성물 및 전자 부품 장치 |
| JP4855329B2 (ja) | 2007-05-08 | 2012-01-18 | Towa株式会社 | 電子部品の圧縮成形方法及び装置 |
| JP2008274080A (ja) | 2007-04-27 | 2008-11-13 | Shin Etsu Chem Co Ltd | 液状エポキシ樹脂組成物及び半導体装置 |
| WO2014192472A1 (ja) * | 2013-05-30 | 2014-12-04 | 住友ベークライト株式会社 | 疎水性無機粒子、放熱部材用樹脂組成物および電子部品装置 |
| JP6815293B2 (ja) * | 2017-08-16 | 2021-01-20 | 信越化学工業株式会社 | 半導体封止用熱硬化性エポキシ樹脂シート、半導体装置、及びその製造方法 |
| JP7410052B2 (ja) * | 2018-12-10 | 2024-01-09 | Eneos株式会社 | 硬化樹脂用組成物、該組成物の硬化物、該組成物および該硬化物の製造方法、ならびに半導体装置 |
| WO2021048977A1 (ja) | 2019-09-12 | 2021-03-18 | 昭和電工マテリアルズ株式会社 | 圧縮成形用封止材及び電子部品装置 |
-
2019
- 2019-09-12 WO PCT/JP2019/035934 patent/WO2021048977A1/ja not_active Ceased
-
2020
- 2020-09-11 EP EP20862814.9A patent/EP4030474A4/en active Pending
- 2020-09-11 WO PCT/JP2020/034575 patent/WO2021049645A1/ja not_active Ceased
- 2020-09-11 US US17/642,229 patent/US12404420B2/en active Active
- 2020-09-11 TW TW109131401A patent/TWI868209B/zh active
- 2020-09-11 KR KR1020227010799A patent/KR20220062006A/ko not_active Ceased
- 2020-09-11 CN CN202080063799.2A patent/CN114402029B/zh active Active
- 2020-09-11 JP JP2021545634A patent/JP7805784B2/ja active Active
-
2024
- 2024-11-06 JP JP2024194411A patent/JP2025013531A/ja active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003213095A (ja) | 2002-01-29 | 2003-07-30 | Sumitomo Bakelite Co Ltd | エポキシ樹脂組成物及び半導体装置 |
| WO2011064964A1 (ja) | 2009-11-24 | 2011-06-03 | 住友ベークライト株式会社 | 流動特性測定用金型、流動特性測定方法、半導体封止用樹脂組成物及び半導体装置の製造方法 |
| JP2011246522A (ja) | 2010-05-24 | 2011-12-08 | Hitachi Chem Co Ltd | 圧縮成形用エポキシ樹脂組成物及び、電子部品装置 |
| JP2014141573A (ja) | 2013-01-23 | 2014-08-07 | Kyocera Chemical Corp | 半導体封止用樹脂組成物および半導体封止装置 |
| WO2018123745A1 (ja) | 2016-12-27 | 2018-07-05 | 日立化成株式会社 | 樹脂組成物及び電子部品装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2025013531A (ja) | 2025-01-24 |
| JPWO2021049645A1 (https=) | 2021-03-18 |
| TW202116913A (zh) | 2021-05-01 |
| EP4030474A4 (en) | 2023-03-22 |
| TWI868209B (zh) | 2025-01-01 |
| WO2021048977A1 (ja) | 2021-03-18 |
| KR20220062006A (ko) | 2022-05-13 |
| US12404420B2 (en) | 2025-09-02 |
| CN114402029B (zh) | 2024-12-10 |
| US20220315793A1 (en) | 2022-10-06 |
| EP4030474A1 (en) | 2022-07-20 |
| WO2021049645A1 (ja) | 2021-03-18 |
| CN114402029A (zh) | 2022-04-26 |
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