JP7786821B2 - 計測装置、リソグラフィ装置、および物品製造方法 - Google Patents

計測装置、リソグラフィ装置、および物品製造方法

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Publication number
JP7786821B2
JP7786821B2 JP2021201173A JP2021201173A JP7786821B2 JP 7786821 B2 JP7786821 B2 JP 7786821B2 JP 2021201173 A JP2021201173 A JP 2021201173A JP 2021201173 A JP2021201173 A JP 2021201173A JP 7786821 B2 JP7786821 B2 JP 7786821B2
Authority
JP
Japan
Prior art keywords
measurement
image
substrate
alignment
mark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021201173A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023086568A (ja
JP2023086568A5 (enExample
Inventor
悟 神保
和彦 三島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2021201173A priority Critical patent/JP7786821B2/ja
Priority to KR1020220166272A priority patent/KR102990828B1/ko
Priority to US18/062,080 priority patent/US12339595B2/en
Publication of JP2023086568A publication Critical patent/JP2023086568A/ja
Publication of JP2023086568A5 publication Critical patent/JP2023086568A5/ja
Application granted granted Critical
Publication of JP7786821B2 publication Critical patent/JP7786821B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7042—Alignment for lithographic apparatus using patterning methods other than those involving the exposure to radiation, e.g. by stamping or imprinting
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7073—Alignment marks and their environment
    • G03F9/7076—Mark details, e.g. phase grating mark, temporary mark
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7092—Signal processing
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/001—Industrial image inspection using an image reference approach
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/70—Determining position or orientation of objects or cameras
    • G06T7/73—Determining position or orientation of objects or cameras using feature-based methods
    • G06T7/74—Determining position or orientation of objects or cameras using feature-based methods involving reference images or patches
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20081—Training; Learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30204—Marker

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Multimedia (AREA)
  • Software Systems (AREA)
  • Data Mining & Analysis (AREA)
  • Artificial Intelligence (AREA)
  • Evolutionary Computation (AREA)
  • Medical Informatics (AREA)
  • Quality & Reliability (AREA)
  • Computing Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Signal Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2021201173A 2021-12-10 2021-12-10 計測装置、リソグラフィ装置、および物品製造方法 Active JP7786821B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2021201173A JP7786821B2 (ja) 2021-12-10 2021-12-10 計測装置、リソグラフィ装置、および物品製造方法
KR1020220166272A KR102990828B1 (ko) 2021-12-10 2022-12-02 계측 장치, 리소그래피 장치, 및 물품 제조 방법
US18/062,080 US12339595B2 (en) 2021-12-10 2022-12-06 Measurement apparatus, lithography apparatus, and article manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021201173A JP7786821B2 (ja) 2021-12-10 2021-12-10 計測装置、リソグラフィ装置、および物品製造方法

Publications (3)

Publication Number Publication Date
JP2023086568A JP2023086568A (ja) 2023-06-22
JP2023086568A5 JP2023086568A5 (enExample) 2024-12-13
JP7786821B2 true JP7786821B2 (ja) 2025-12-16

Family

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Country Status (3)

Country Link
US (1) US12339595B2 (enExample)
JP (1) JP7786821B2 (enExample)
KR (1) KR102990828B1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201908127D0 (en) * 2019-06-07 2019-07-24 Renishaw Plc Manufacturing method and apparatus
WO2025013286A1 (ja) * 2023-07-13 2025-01-16 株式会社ニコン 照明ユニット、露光装置、及び露光方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009176958A (ja) 2008-01-24 2009-08-06 Canon Inc 位置決め装置、露光装置及びデバイス製造方法
US20150235108A1 (en) 2014-02-20 2015-08-20 Kla-Tencor Corporation Signal Response Metrology For Image Based Overlay Measurements
JP2018522283A (ja) 2015-07-13 2018-08-09 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置およびデバイス製造方法
JP2019074724A (ja) 2017-10-19 2019-05-16 キヤノン株式会社 評価方法、決定方法、リソグラフィ装置、およびプログラム
JP2020004918A (ja) 2018-06-29 2020-01-09 キヤノン株式会社 情報処理装置、プログラム、加工装置、加工システム、および物品の製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI267012B (en) 2004-06-03 2006-11-21 Univ Nat Cheng Kung Quality prognostics system and method for manufacturing processes
JP2015015318A (ja) * 2013-07-03 2015-01-22 キヤノン株式会社 処理方法、処理装置、リソグラフィ装置、及び物品の製造方法
JP6608130B2 (ja) * 2014-11-06 2019-11-20 キヤノン株式会社 計測装置、リソグラフィ装置、及び物品の製造方法
JP6808684B2 (ja) * 2018-06-14 2021-01-06 キヤノン株式会社 情報処理装置、判定方法、プログラム、リソグラフィシステム、および物品の製造方法
KR102873319B1 (ko) * 2019-11-01 2025-10-17 에이에스엠엘 네델란즈 비.브이. 계측 방법 및 리소그래피 장치
JP7364540B2 (ja) * 2020-08-05 2023-10-18 株式会社日立ハイテク 画像処理システム
US12148181B2 (en) * 2020-08-28 2024-11-19 Canon Kabushiki Kaisha Measurement apparatus that measures position information of measurement target in predetermined direction
TWI862875B (zh) * 2020-10-22 2024-11-21 日商佳能股份有限公司 處理裝置和方法、測量裝置和方法、微影裝置、製造物品的方法、模型、產生方法和裝置
WO2022106182A1 (en) * 2020-11-17 2022-05-27 Asml Netherlands B.V. Metrology system and lithographic system
JP7649188B2 (ja) * 2021-04-21 2025-03-19 キヤノン株式会社 処理システム、計測装置、基板処理装置及び物品の製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009176958A (ja) 2008-01-24 2009-08-06 Canon Inc 位置決め装置、露光装置及びデバイス製造方法
US20150235108A1 (en) 2014-02-20 2015-08-20 Kla-Tencor Corporation Signal Response Metrology For Image Based Overlay Measurements
JP2018522283A (ja) 2015-07-13 2018-08-09 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置およびデバイス製造方法
JP2019074724A (ja) 2017-10-19 2019-05-16 キヤノン株式会社 評価方法、決定方法、リソグラフィ装置、およびプログラム
JP2020004918A (ja) 2018-06-29 2020-01-09 キヤノン株式会社 情報処理装置、プログラム、加工装置、加工システム、および物品の製造方法

Also Published As

Publication number Publication date
KR20230088255A (ko) 2023-06-19
KR102990828B1 (ko) 2026-07-14
US20230185208A1 (en) 2023-06-15
JP2023086568A (ja) 2023-06-22
US12339595B2 (en) 2025-06-24

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