JP7779799B2 - ひずみゲージ - Google Patents

ひずみゲージ

Info

Publication number
JP7779799B2
JP7779799B2 JP2022076117A JP2022076117A JP7779799B2 JP 7779799 B2 JP7779799 B2 JP 7779799B2 JP 2022076117 A JP2022076117 A JP 2022076117A JP 2022076117 A JP2022076117 A JP 2022076117A JP 7779799 B2 JP7779799 B2 JP 7779799B2
Authority
JP
Japan
Prior art keywords
metal layer
resistor
strain gauge
wiring
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022076117A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023165275A5 (enExample
JP2023165275A (ja
Inventor
彩 小野
洋介 小笠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MinebeaMitsumi Inc
Original Assignee
MinebeaMitsumi Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2022076117A priority Critical patent/JP7779799B2/ja
Application filed by MinebeaMitsumi Inc filed Critical MinebeaMitsumi Inc
Priority to EP23799467.8A priority patent/EP4521057A4/en
Priority to CN202510602609.4A priority patent/CN120403416A/zh
Priority to CN202380037897.2A priority patent/CN119137441B/zh
Priority to PCT/JP2023/016698 priority patent/WO2023214537A1/ja
Priority to US18/861,732 priority patent/US12359990B2/en
Publication of JP2023165275A publication Critical patent/JP2023165275A/ja
Publication of JP2023165275A5 publication Critical patent/JP2023165275A5/ja
Priority to US19/242,342 priority patent/US20250314539A1/en
Priority to JP2025200497A priority patent/JP2026026108A/ja
Application granted granted Critical
Publication of JP7779799B2 publication Critical patent/JP7779799B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
    • G01B7/20—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance formed by printed-circuit technique
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP2022076117A 2022-05-02 2022-05-02 ひずみゲージ Active JP7779799B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2022076117A JP7779799B2 (ja) 2022-05-02 2022-05-02 ひずみゲージ
CN202510602609.4A CN120403416A (zh) 2022-05-02 2023-04-27 应变计
CN202380037897.2A CN119137441B (zh) 2022-05-02 2023-04-27 应变计
PCT/JP2023/016698 WO2023214537A1 (ja) 2022-05-02 2023-04-27 ひずみゲージ
EP23799467.8A EP4521057A4 (en) 2022-05-02 2023-04-27 STRESS GAUGE
US18/861,732 US12359990B2 (en) 2022-05-02 2023-04-27 Strain gauge
US19/242,342 US20250314539A1 (en) 2022-05-02 2025-06-18 Strain gauge
JP2025200497A JP2026026108A (ja) 2022-05-02 2025-11-20 ひずみゲージ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022076117A JP7779799B2 (ja) 2022-05-02 2022-05-02 ひずみゲージ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025200497A Division JP2026026108A (ja) 2022-05-02 2025-11-20 ひずみゲージ

Publications (3)

Publication Number Publication Date
JP2023165275A JP2023165275A (ja) 2023-11-15
JP2023165275A5 JP2023165275A5 (enExample) 2025-04-01
JP7779799B2 true JP7779799B2 (ja) 2025-12-03

Family

ID=88646471

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2022076117A Active JP7779799B2 (ja) 2022-05-02 2022-05-02 ひずみゲージ
JP2025200497A Pending JP2026026108A (ja) 2022-05-02 2025-11-20 ひずみゲージ

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2025200497A Pending JP2026026108A (ja) 2022-05-02 2025-11-20 ひずみゲージ

Country Status (5)

Country Link
US (2) US12359990B2 (enExample)
EP (1) EP4521057A4 (enExample)
JP (2) JP7779799B2 (enExample)
CN (2) CN120403416A (enExample)
WO (1) WO2023214537A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7737790B2 (ja) * 2020-10-16 2025-09-11 ミネベアミツミ株式会社 ひずみゲージ

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019151345A1 (ja) 2018-02-02 2019-08-08 ミネベアミツミ株式会社 ひずみゲージ
JP2021156815A (ja) 2020-03-30 2021-10-07 ミネベアミツミ株式会社 ひずみゲージ
WO2022080421A1 (ja) 2020-10-16 2022-04-21 ミネベアミツミ株式会社 ひずみゲージ

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04274703A (ja) * 1991-02-28 1992-09-30 Kyowa Electron Instr Co Ltd 金属箔ひずみゲージの電極形成方法
CN103604363B (zh) * 2013-11-30 2017-08-29 中航电测仪器股份有限公司 一种塑性变形测试用应变计及其制造和标定方法
JP6162670B2 (ja) 2014-10-03 2017-07-12 株式会社東京測器研究所 ひずみゲージ用合金及びひずみゲージ
CN110736421A (zh) * 2019-11-21 2020-01-31 中国船舶重工集团公司第七0四研究所 用于弹性体应变测量的薄膜应变计及制备方法
JP2022076117A (ja) 2020-11-09 2022-05-19 国立大学法人大阪大学 前立腺がんを検査する方法
JP7189240B2 (ja) * 2021-01-18 2022-12-13 ミネベアミツミ株式会社 ひずみゲージ
CN214843003U (zh) * 2021-07-13 2021-11-23 张继华 温度补偿型半导体应变计
CN114045467B (zh) * 2021-11-09 2023-12-01 北京石墨烯技术研究院有限公司 柔性应变传感器的制备方法以及柔性应变传感器

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019151345A1 (ja) 2018-02-02 2019-08-08 ミネベアミツミ株式会社 ひずみゲージ
JP2021156815A (ja) 2020-03-30 2021-10-07 ミネベアミツミ株式会社 ひずみゲージ
WO2022080421A1 (ja) 2020-10-16 2022-04-21 ミネベアミツミ株式会社 ひずみゲージ

Also Published As

Publication number Publication date
US20250314539A1 (en) 2025-10-09
WO2023214537A1 (ja) 2023-11-09
EP4521057A4 (en) 2026-04-29
JP2023165275A (ja) 2023-11-15
CN120403416A (zh) 2025-08-01
US12359990B2 (en) 2025-07-15
JP2026026108A (ja) 2026-02-16
CN119137441B (zh) 2025-05-30
EP4521057A1 (en) 2025-03-12
CN119137441A (zh) 2024-12-13
US20250172444A1 (en) 2025-05-29

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