JP7773705B1 - 圧電振動素子 - Google Patents

圧電振動素子

Info

Publication number
JP7773705B1
JP7773705B1 JP2025502442A JP2025502442A JP7773705B1 JP 7773705 B1 JP7773705 B1 JP 7773705B1 JP 2025502442 A JP2025502442 A JP 2025502442A JP 2025502442 A JP2025502442 A JP 2025502442A JP 7773705 B1 JP7773705 B1 JP 7773705B1
Authority
JP
Japan
Prior art keywords
excitation electrode
electrode
opening
openings
length
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2025502442A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2025141919A1 (https=
JPWO2025141919A5 (https=
Inventor
俊雄 西村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of JPWO2025141919A1 publication Critical patent/JPWO2025141919A1/ja
Priority to JP2025188268A priority Critical patent/JP2026016790A/ja
Application granted granted Critical
Publication of JP7773705B1 publication Critical patent/JP7773705B1/ja
Publication of JPWO2025141919A5 publication Critical patent/JPWO2025141919A5/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02283—Vibrating means
    • H03H2009/02291—Beams
    • H03H2009/02322—Material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2025502442A 2023-12-26 2024-07-12 圧電振動素子 Active JP7773705B1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025188268A JP2026016790A (ja) 2023-12-26 2025-11-07 圧電振動素子

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2023219822 2023-12-26
JP2023219822 2023-12-26
PCT/JP2024/025226 WO2025141919A1 (ja) 2023-12-26 2024-07-12 圧電振動素子

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025188268A Division JP2026016790A (ja) 2023-12-26 2025-11-07 圧電振動素子

Publications (3)

Publication Number Publication Date
JPWO2025141919A1 JPWO2025141919A1 (https=) 2025-07-03
JP7773705B1 true JP7773705B1 (ja) 2025-11-20
JPWO2025141919A5 JPWO2025141919A5 (https=) 2025-11-26

Family

ID=96217236

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2025502442A Active JP7773705B1 (ja) 2023-12-26 2024-07-12 圧電振動素子
JP2025188268A Pending JP2026016790A (ja) 2023-12-26 2025-11-07 圧電振動素子

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2025188268A Pending JP2026016790A (ja) 2023-12-26 2025-11-07 圧電振動素子

Country Status (4)

Country Link
US (1) US20250247072A1 (https=)
JP (2) JP7773705B1 (https=)
CN (1) CN120548673A (https=)
WO (1) WO2025141919A1 (https=)

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0210907A (ja) * 1988-06-28 1990-01-16 Matsushima Kogyo Co Ltd Ａｔ振動子の周波数調整方法
JPH1098351A (ja) * 1996-07-31 1998-04-14 Daishinku Co 圧電振動デバイス
JP2001257560A (ja) * 2000-03-10 2001-09-21 Toyo Commun Equip Co Ltd 超薄板圧電振動素子の電極構造
JP2003273682A (ja) * 2002-03-15 2003-09-26 Seiko Epson Corp 圧電振動片の周波数調整方法、圧電振動片および圧電デバイス
JP2010081317A (ja) * 2008-09-26 2010-04-08 Nippon Dempa Kogyo Co Ltd 水晶振動子
JP2010141570A (ja) * 2008-12-11 2010-06-24 Ube Ind Ltd 圧電薄膜音響共振器およびその製造方法
JP2012074807A (ja) * 2010-09-28 2012-04-12 Seiko Epson Corp 圧電振動素子、表面実装型圧電振動子及び表面実装型圧電発振器
JP2018074344A (ja) * 2016-10-28 2018-05-10 京セラ株式会社 水晶素子および水晶デバイス
WO2022080426A1 (ja) * 2020-10-13 2022-04-21 株式会社村田製作所 水晶振動素子および水晶振動子
WO2023033147A1 (ja) * 2021-09-06 2023-03-09 株式会社村田製作所 弾性波装置

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0210907A (ja) * 1988-06-28 1990-01-16 Matsushima Kogyo Co Ltd Ａｔ振動子の周波数調整方法
JPH1098351A (ja) * 1996-07-31 1998-04-14 Daishinku Co 圧電振動デバイス
JP2001257560A (ja) * 2000-03-10 2001-09-21 Toyo Commun Equip Co Ltd 超薄板圧電振動素子の電極構造
JP2003273682A (ja) * 2002-03-15 2003-09-26 Seiko Epson Corp 圧電振動片の周波数調整方法、圧電振動片および圧電デバイス
JP2010081317A (ja) * 2008-09-26 2010-04-08 Nippon Dempa Kogyo Co Ltd 水晶振動子
JP2010141570A (ja) * 2008-12-11 2010-06-24 Ube Ind Ltd 圧電薄膜音響共振器およびその製造方法
JP2012074807A (ja) * 2010-09-28 2012-04-12 Seiko Epson Corp 圧電振動素子、表面実装型圧電振動子及び表面実装型圧電発振器
JP2018074344A (ja) * 2016-10-28 2018-05-10 京セラ株式会社 水晶素子および水晶デバイス
WO2022080426A1 (ja) * 2020-10-13 2022-04-21 株式会社村田製作所 水晶振動素子および水晶振動子
WO2023033147A1 (ja) * 2021-09-06 2023-03-09 株式会社村田製作所 弾性波装置

Also Published As

Publication number Publication date
WO2025141919A1 (ja) 2025-07-03
JPWO2025141919A1 (https=) 2025-07-03
JP2026016790A (ja) 2026-02-03
CN120548673A (zh) 2025-08-26
US20250247072A1 (en) 2025-07-31

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