CN120548673A - 压电振动元件 - Google Patents

压电振动元件

Info

Publication number
CN120548673A
CN120548673A CN202480004546.6A CN202480004546A CN120548673A CN 120548673 A CN120548673 A CN 120548673A CN 202480004546 A CN202480004546 A CN 202480004546A CN 120548673 A CN120548673 A CN 120548673A
Authority
CN
China
Prior art keywords
excitation electrode
opening
electrode
region
vibration element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202480004546.6A
Other languages
English (en)
Chinese (zh)
Inventor
西村俊雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN120548673A publication Critical patent/CN120548673A/zh
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02283—Vibrating means
    • H03H2009/02291—Beams
    • H03H2009/02322—Material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN202480004546.6A 2023-12-26 2024-07-12 压电振动元件 Pending CN120548673A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2023-219822 2023-12-26
JP2023219822 2023-12-26
PCT/JP2024/025226 WO2025141919A1 (ja) 2023-12-26 2024-07-12 圧電振動素子

Publications (1)

Publication Number Publication Date
CN120548673A true CN120548673A (zh) 2025-08-26

Family

ID=96217236

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202480004546.6A Pending CN120548673A (zh) 2023-12-26 2024-07-12 压电振动元件

Country Status (4)

Country Link
US (1) US20250247072A1 (https=)
JP (2) JP7773705B1 (https=)
CN (1) CN120548673A (https=)
WO (1) WO2025141919A1 (https=)

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0210907A (ja) * 1988-06-28 1990-01-16 Matsushima Kogyo Co Ltd Ａｔ振動子の周波数調整方法
JP3235515B2 (ja) * 1996-07-31 2001-12-04 株式会社大真空 圧電振動デバイス
JP2001257560A (ja) * 2000-03-10 2001-09-21 Toyo Commun Equip Co Ltd 超薄板圧電振動素子の電極構造
JP2003273682A (ja) * 2002-03-15 2003-09-26 Seiko Epson Corp 圧電振動片の周波数調整方法、圧電振動片および圧電デバイス
JP2010081317A (ja) * 2008-09-26 2010-04-08 Nippon Dempa Kogyo Co Ltd 水晶振動子
JP5299676B2 (ja) * 2008-12-11 2013-09-25 宇部興産株式会社 圧電薄膜音響共振器およびその製造方法
JP5668392B2 (ja) * 2010-09-28 2015-02-12 セイコーエプソン株式会社 圧電振動素子、圧電振動子及び圧電発振器
JP2018074344A (ja) * 2016-10-28 2018-05-10 京セラ株式会社 水晶素子および水晶デバイス
CN116368733A (zh) * 2020-10-13 2023-06-30 株式会社村田制作所 晶体振动元件以及晶体振动器
WO2023033147A1 (ja) * 2021-09-06 2023-03-09 株式会社村田製作所 弾性波装置

Also Published As

Publication number Publication date
WO2025141919A1 (ja) 2025-07-03
JPWO2025141919A1 (https=) 2025-07-03
JP2026016790A (ja) 2026-02-03
US20250247072A1 (en) 2025-07-31
JP7773705B1 (ja) 2025-11-20

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