JPWO2025141919A1 - - Google Patents

Info

Publication number
JPWO2025141919A1
JPWO2025141919A1 JP2025502442A JP2025502442A JPWO2025141919A1 JP WO2025141919 A1 JPWO2025141919 A1 JP WO2025141919A1 JP 2025502442 A JP2025502442 A JP 2025502442A JP 2025502442 A JP2025502442 A JP 2025502442A JP WO2025141919 A1 JPWO2025141919 A1 JP WO2025141919A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2025502442A
Other languages
Japanese (ja)
Other versions
JPWO2025141919A5 (https=
JP7773705B1 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2025141919A1 publication Critical patent/JPWO2025141919A1/ja
Priority to JP2025188268A priority Critical patent/JP2026016790A/ja
Application granted granted Critical
Publication of JP7773705B1 publication Critical patent/JP7773705B1/ja
Publication of JPWO2025141919A5 publication Critical patent/JPWO2025141919A5/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02283—Vibrating means
    • H03H2009/02291—Beams
    • H03H2009/02322—Material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2025502442A 2023-12-26 2024-07-12 圧電振動素子 Active JP7773705B1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025188268A JP2026016790A (ja) 2023-12-26 2025-11-07 圧電振動素子

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2023219822 2023-12-26
JP2023219822 2023-12-26
PCT/JP2024/025226 WO2025141919A1 (ja) 2023-12-26 2024-07-12 圧電振動素子

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025188268A Division JP2026016790A (ja) 2023-12-26 2025-11-07 圧電振動素子

Publications (3)

Publication Number Publication Date
JPWO2025141919A1 true JPWO2025141919A1 (https=) 2025-07-03
JP7773705B1 JP7773705B1 (ja) 2025-11-20
JPWO2025141919A5 JPWO2025141919A5 (https=) 2025-11-26

Family

ID=96217236

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2025502442A Active JP7773705B1 (ja) 2023-12-26 2024-07-12 圧電振動素子
JP2025188268A Pending JP2026016790A (ja) 2023-12-26 2025-11-07 圧電振動素子

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2025188268A Pending JP2026016790A (ja) 2023-12-26 2025-11-07 圧電振動素子

Country Status (4)

Country Link
US (1) US20250247072A1 (https=)
JP (2) JP7773705B1 (https=)
CN (1) CN120548673A (https=)
WO (1) WO2025141919A1 (https=)

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0210907A (ja) * 1988-06-28 1990-01-16 Matsushima Kogyo Co Ltd Ａｔ振動子の周波数調整方法
JP3235515B2 (ja) * 1996-07-31 2001-12-04 株式会社大真空 圧電振動デバイス
JP2001257560A (ja) * 2000-03-10 2001-09-21 Toyo Commun Equip Co Ltd 超薄板圧電振動素子の電極構造
JP2003273682A (ja) * 2002-03-15 2003-09-26 Seiko Epson Corp 圧電振動片の周波数調整方法、圧電振動片および圧電デバイス
JP2010081317A (ja) * 2008-09-26 2010-04-08 Nippon Dempa Kogyo Co Ltd 水晶振動子
JP5299676B2 (ja) * 2008-12-11 2013-09-25 宇部興産株式会社 圧電薄膜音響共振器およびその製造方法
JP5668392B2 (ja) * 2010-09-28 2015-02-12 セイコーエプソン株式会社 圧電振動素子、圧電振動子及び圧電発振器
JP2018074344A (ja) * 2016-10-28 2018-05-10 京セラ株式会社 水晶素子および水晶デバイス
CN116368733A (zh) * 2020-10-13 2023-06-30 株式会社村田制作所 晶体振动元件以及晶体振动器
WO2023033147A1 (ja) * 2021-09-06 2023-03-09 株式会社村田製作所 弾性波装置

Also Published As

Publication number Publication date
WO2025141919A1 (ja) 2025-07-03
JP2026016790A (ja) 2026-02-03
CN120548673A (zh) 2025-08-26
US20250247072A1 (en) 2025-07-31
JP7773705B1 (ja) 2025-11-20

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