JP7699797B2 - ガス供給システムおよびガス供給方法 - Google Patents

ガス供給システムおよびガス供給方法 Download PDF

Info

Publication number
JP7699797B2
JP7699797B2 JP2021075914A JP2021075914A JP7699797B2 JP 7699797 B2 JP7699797 B2 JP 7699797B2 JP 2021075914 A JP2021075914 A JP 2021075914A JP 2021075914 A JP2021075914 A JP 2021075914A JP 7699797 B2 JP7699797 B2 JP 7699797B2
Authority
JP
Japan
Prior art keywords
flow rate
vaporization
gas
supply device
flow path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021075914A
Other languages
English (en)
Japanese (ja)
Other versions
JP2022170043A5 (https=
JP2022170043A (ja
Inventor
貴紀 中谷
敦志 日高
正明 永瀬
薫 平田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Priority to JP2021075914A priority Critical patent/JP7699797B2/ja
Publication of JP2022170043A publication Critical patent/JP2022170043A/ja
Publication of JP2022170043A5 publication Critical patent/JP2022170043A5/ja
Application granted granted Critical
Publication of JP7699797B2 publication Critical patent/JP7699797B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Flow Control (AREA)
JP2021075914A 2021-04-28 2021-04-28 ガス供給システムおよびガス供給方法 Active JP7699797B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2021075914A JP7699797B2 (ja) 2021-04-28 2021-04-28 ガス供給システムおよびガス供給方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021075914A JP7699797B2 (ja) 2021-04-28 2021-04-28 ガス供給システムおよびガス供給方法

Publications (3)

Publication Number Publication Date
JP2022170043A JP2022170043A (ja) 2022-11-10
JP2022170043A5 JP2022170043A5 (https=) 2024-04-01
JP7699797B2 true JP7699797B2 (ja) 2025-06-30

Family

ID=83944333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021075914A Active JP7699797B2 (ja) 2021-04-28 2021-04-28 ガス供給システムおよびガス供給方法

Country Status (1)

Country Link
JP (1) JP7699797B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN121511673A (zh) * 2023-12-27 2026-02-10 株式会社国际电气 气体供给方法、半导体装置的制造方法、基板处理装置及程序以及流量控制器

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009231434A (ja) 2008-03-21 2009-10-08 Panasonic Corp 基板処理装置及び半導体装置の製造方法
WO2021054135A1 (ja) 2019-09-19 2021-03-25 株式会社フジキン 気化供給装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11193463A (ja) * 1997-12-26 1999-07-21 Nissan Motor Co Ltd 化学的気相成長装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009231434A (ja) 2008-03-21 2009-10-08 Panasonic Corp 基板処理装置及び半導体装置の製造方法
WO2021054135A1 (ja) 2019-09-19 2021-03-25 株式会社フジキン 気化供給装置

Also Published As

Publication number Publication date
JP2022170043A (ja) 2022-11-10

Similar Documents

Publication Publication Date Title
TWI430065B (zh) 包括流量比控制器之使用反對稱最佳控制的氣體傳送方法及系統
CN109237102B (zh) 流体控制装置、控制系统、控制方法和程序存储介质
JP5350824B2 (ja) 液体材料の気化供給システム
CN103493181B (zh) 原料的汽化供给装置
JP7369456B2 (ja) 流量制御方法および流量制御装置
WO2018207553A1 (ja) 液体材料気化供給装置及び制御プログラム
JP2009252760A (ja) 気化器を備えたガス供給装置
JP7270988B2 (ja) 流量制御装置および流量制御方法
KR20120075378A (ko) 재료가스 제어장치, 재료가스 제어 방법, 재료가스 제어 프로그램 및 재료가스 제어 시스템
JP7240770B2 (ja) 気化供給方法及び気化供給装置
JP7699797B2 (ja) ガス供給システムおよびガス供給方法
KR102812621B1 (ko) 가스 공급 시스템 및 가스 공급 방법
JP7811165B2 (ja) 気化装置、気化装置の制御方法、気化装置用プログラム、及び、流体制御装置
JP7376959B2 (ja) ガス供給量測定方法およびガス供給量制御方法
CN112864049B (zh) 液体材料气化装置及其控制方法和程序存储介质
KR20250163884A (ko) 기화기, 및 반도체 제조 장치에 재료 가스를 공급하는 방법
TW202601320A (zh) 流量控制裝置
JP2021144583A (ja) 流体制御装置、流体制御システム、流体制御方法、及び、流体制御装置用プログラム

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240322

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20240322

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20241223

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20250106

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20250227

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20250602

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20250611

R150 Certificate of patent or registration of utility model

Ref document number: 7699797

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150