JP7699797B2 - ガス供給システムおよびガス供給方法 - Google Patents

ガス供給システムおよびガス供給方法 Download PDF

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JP7699797B2
JP7699797B2 JP2021075914A JP2021075914A JP7699797B2 JP 7699797 B2 JP7699797 B2 JP 7699797B2 JP 2021075914 A JP2021075914 A JP 2021075914A JP 2021075914 A JP2021075914 A JP 2021075914A JP 7699797 B2 JP7699797 B2 JP 7699797B2
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flow rate
vaporization
gas
supply device
flow path
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JP2022170043A5 (enrdf_load_stackoverflow
JP2022170043A (ja
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貴紀 中谷
敦志 日高
正明 永瀬
薫 平田
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Fujikin Inc
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Fujikin Inc
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JP2021075914A 2021-04-28 2021-04-28 ガス供給システムおよびガス供給方法 Active JP7699797B2 (ja)

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JP2022170043A JP2022170043A (ja) 2022-11-10
JP2022170043A5 JP2022170043A5 (enrdf_load_stackoverflow) 2024-04-01
JP7699797B2 true JP7699797B2 (ja) 2025-06-30

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Publication number Priority date Publication date Assignee Title
WO2025141825A1 (ja) * 2023-12-27 2025-07-03 株式会社Kokusai Electric ガス供給方法、半導体装置の製造方法、基板処理装置およびプログラム並びに流量制御器

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009231434A (ja) 2008-03-21 2009-10-08 Panasonic Corp 基板処理装置及び半導体装置の製造方法
WO2021054135A1 (ja) 2019-09-19 2021-03-25 株式会社フジキン 気化供給装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11193463A (ja) * 1997-12-26 1999-07-21 Nissan Motor Co Ltd 化学的気相成長装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009231434A (ja) 2008-03-21 2009-10-08 Panasonic Corp 基板処理装置及び半導体装置の製造方法
WO2021054135A1 (ja) 2019-09-19 2021-03-25 株式会社フジキン 気化供給装置

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