JP7668252B2 - 高周波電源装置 - Google Patents

高周波電源装置 Download PDF

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Publication number
JP7668252B2
JP7668252B2 JP2022142965A JP2022142965A JP7668252B2 JP 7668252 B2 JP7668252 B2 JP 7668252B2 JP 2022142965 A JP2022142965 A JP 2022142965A JP 2022142965 A JP2022142965 A JP 2022142965A JP 7668252 B2 JP7668252 B2 JP 7668252B2
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JP
Japan
Prior art keywords
gate
high frequency
switching element
switching
amplifier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022142965A
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English (en)
Japanese (ja)
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JP2024038728A5 (https=
JP2024038728A (ja
Inventor
博史 國玉
卓矢 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyosan Electric Manufacturing Co Ltd
Original Assignee
Kyosan Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2022142965A priority Critical patent/JP7668252B2/ja
Application filed by Kyosan Electric Manufacturing Co Ltd filed Critical Kyosan Electric Manufacturing Co Ltd
Priority to KR1020257008706A priority patent/KR20250061815A/ko
Priority to EP23862685.7A priority patent/EP4586487A1/en
Priority to PCT/JP2023/008248 priority patent/WO2024053135A1/ja
Priority to CN202380063640.4A priority patent/CN119836740A/zh
Priority to US19/109,776 priority patent/US20260081573A1/en
Priority to TW112131609A priority patent/TW202429820A/zh
Publication of JP2024038728A publication Critical patent/JP2024038728A/ja
Publication of JP2024038728A5 publication Critical patent/JP2024038728A5/ja
Application granted granted Critical
Publication of JP7668252B2 publication Critical patent/JP7668252B2/ja
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Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
    • H03F3/26—Push-pull amplifiers; Phase-splitters therefor
    • H03F3/265—Push-pull amplifiers; Phase-splitters therefor with field-effect transistors only
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/08—Circuits specially adapted for the generation of control voltages for semiconductor devices incorporated in static converters
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/32—Means for protecting converters other than automatic disconnection
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
    • H02M7/003—Constructional details, e.g. physical layout, assembly, wiring or busbar connections
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
    • H02M7/42—Conversion of DC power input into AC power output without possibility of reversal
    • H02M7/44—Conversion of DC power input into AC power output without possibility of reversal by static converters
    • H02M7/48—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F1/00—Details of amplifiers with only discharge tubes, only semiconductor devices or only unspecified devices as amplifying elements
    • H03F1/42—Modifications of amplifiers to extend the bandwidth
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
    • H03F3/20—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
    • H03F3/20—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers
    • H03F3/21—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers with semiconductor devices only
    • H03F3/217—Class D power amplifiers; Switching amplifiers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/51—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used
    • H03K17/56—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used by the use, as active elements, of semiconductor devices
    • H03K17/687—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used by the use, as active elements, of semiconductor devices the devices being field-effect transistors
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/64—Double-diffused metal-oxide semiconductor [DMOS] FETs
    • H10D30/65—Lateral DMOS [LDMOS] FETs
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/0048—Circuits or arrangements for reducing losses
    • H02M1/0054—Transistor switching losses
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F2200/00—Indexing scheme relating to amplifiers
    • H03F2200/451—Indexing scheme relating to amplifiers the amplifier being a radio frequency amplifier

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Amplifiers (AREA)
JP2022142965A 2022-09-08 2022-09-08 高周波電源装置 Active JP7668252B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2022142965A JP7668252B2 (ja) 2022-09-08 2022-09-08 高周波電源装置
EP23862685.7A EP4586487A1 (en) 2022-09-08 2023-03-06 Radio-frequency power supply device
PCT/JP2023/008248 WO2024053135A1 (ja) 2022-09-08 2023-03-06 高周波電源装置
CN202380063640.4A CN119836740A (zh) 2022-09-08 2023-03-06 高频电源装置
KR1020257008706A KR20250061815A (ko) 2022-09-08 2023-03-06 고주파 전원 장치
US19/109,776 US20260081573A1 (en) 2022-09-08 2023-03-06 Radio-frequency power supply device
TW112131609A TW202429820A (zh) 2022-09-08 2023-08-23 高頻電源裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022142965A JP7668252B2 (ja) 2022-09-08 2022-09-08 高周波電源装置

Publications (3)

Publication Number Publication Date
JP2024038728A JP2024038728A (ja) 2024-03-21
JP2024038728A5 JP2024038728A5 (https=) 2024-05-01
JP7668252B2 true JP7668252B2 (ja) 2025-04-24

Family

ID=90192172

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022142965A Active JP7668252B2 (ja) 2022-09-08 2022-09-08 高周波電源装置

Country Status (7)

Country Link
US (1) US20260081573A1 (https=)
EP (1) EP4586487A1 (https=)
JP (1) JP7668252B2 (https=)
KR (1) KR20250061815A (https=)
CN (1) CN119836740A (https=)
TW (1) TW202429820A (https=)
WO (1) WO2024053135A1 (https=)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021535702A (ja) 2018-08-28 2021-12-16 エフィシェント・パワー・コンバージョン・コーポレイション 帰還を有する能動型プリドライバを使用するＧａＮドライバ
JP7068540B1 (ja) 2021-12-16 2022-05-16 株式会社京三製作所 高周波電源装置及び高周波電力の出力制御方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08140341A (ja) 1994-09-16 1996-05-31 Toshiba Corp スイッチング素子を用いたマイクロ電源装置
JP4852404B2 (ja) 2006-12-05 2012-01-11 株式会社リコー データ出力装置およびデータ出力方法
JP6581477B2 (ja) 2015-11-17 2019-09-25 株式会社東芝 増幅器
JP7779650B2 (ja) * 2020-11-19 2025-12-03 株式会社京三製作所 スイッチングモジュール

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021535702A (ja) 2018-08-28 2021-12-16 エフィシェント・パワー・コンバージョン・コーポレイション 帰還を有する能動型プリドライバを使用するＧａＮドライバ
JP7068540B1 (ja) 2021-12-16 2022-05-16 株式会社京三製作所 高周波電源装置及び高周波電力の出力制御方法

Also Published As

Publication number Publication date
US20260081573A1 (en) 2026-03-19
EP4586487A1 (en) 2025-07-16
KR20250061815A (ko) 2025-05-08
JP2024038728A (ja) 2024-03-21
WO2024053135A1 (ja) 2024-03-14
CN119836740A (zh) 2025-04-15
TW202429820A (zh) 2024-07-16

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