JP7657830B2 - 部品組立体用シールリテーナおよび流量制御装置への部品の取り付け方法 - Google Patents

部品組立体用シールリテーナおよび流量制御装置への部品の取り付け方法 Download PDF

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Publication number
JP7657830B2
JP7657830B2 JP2022569062A JP2022569062A JP7657830B2 JP 7657830 B2 JP7657830 B2 JP 7657830B2 JP 2022569062 A JP2022569062 A JP 2022569062A JP 2022569062 A JP2022569062 A JP 2022569062A JP 7657830 B2 JP7657830 B2 JP 7657830B2
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JP
Japan
Prior art keywords
seal
fluid flow
component
retainer
flow component
Prior art date
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JP2022569062A
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English (en)
Japanese (ja)
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JPWO2021231537A5 (https=
JP2023525574A5 (https=
JP2023525574A (ja
Inventor
カーソン、スティーブン
トレール、ランドルフ
Original Assignee
アイコール・システムズ・インク
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Publication of JPWO2021231537A5 publication Critical patent/JPWO2021231537A5/ja
Publication of JP2023525574A5 publication Critical patent/JP2023525574A5/ja
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/061—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with positioning means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B27/00—Hand tools, specially adapted for fitting together or separating parts or objects whether or not involving some deformation, not otherwise provided for
    • B25B27/0028—Tools for removing or installing seals
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
    • F16J15/104—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure
    • F16J15/106—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure homogeneous
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S277/00—Seal for a joint or juncture
    • Y10S277/917—Seal including frangible feature

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Infusion, Injection, And Reservoir Apparatuses (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Pipeline Systems (AREA)
  • Gasket Seals (AREA)
JP2022569062A 2020-05-12 2021-05-12 部品組立体用シールリテーナおよび流量制御装置への部品の取り付け方法 Active JP7657830B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063023742P 2020-05-12 2020-05-12
US63/023,742 2020-05-12
PCT/US2021/031937 WO2021231537A1 (en) 2020-05-12 2021-05-12 Seal retainer for a component assembly and method of installing a component into an apparatus for controlling flow

Publications (4)

Publication Number Publication Date
JP2023525574A JP2023525574A (ja) 2023-06-16
JPWO2021231537A5 JPWO2021231537A5 (https=) 2024-01-22
JP2023525574A5 JP2023525574A5 (https=) 2024-01-22
JP7657830B2 true JP7657830B2 (ja) 2025-04-07

Family

ID=78513098

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022569062A Active JP7657830B2 (ja) 2020-05-12 2021-05-12 部品組立体用シールリテーナおよび流量制御装置への部品の取り付け方法

Country Status (5)

Country Link
US (2) US11698134B2 (https=)
EP (1) EP4150664B1 (https=)
JP (1) JP7657830B2 (https=)
KR (1) KR20230010698A (https=)
WO (1) WO2021231537A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230010698A (ko) * 2020-05-12 2023-01-19 아이커 시스템즈, 인크. 부품 조립용 씰 리테이너 및 흐름 제어 장치에 부품을 설치하는 방법
US12589474B2 (en) * 2020-05-12 2026-03-31 Ichor Systems, Inc. Seal insertion tool for a fluid delivery module and method of installing a seal into a fluid delivery module
JP2023108927A (ja) * 2022-01-26 2023-08-07 株式会社堀場エステック ボルト締結構造体、ボルト締結方法および流量制御装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002506181A (ja) 1998-03-05 2002-02-26 スウエイジロク・カンパニー モジュール式表面取付型マニホルド
US20020063396A1 (en) 2000-11-27 2002-05-30 Michael Doyle Keeper for positioning ring seals
JP2003526759A (ja) 1998-05-18 2003-09-09 スウエイジロク・カンパニー モジュール式面取付型マニホルド組立体
JP2012077867A (ja) 2010-10-04 2012-04-19 Ihara Science Corp ガスケットホルダおよびこれを用いた流体制御装置

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4002344A (en) * 1975-11-12 1977-01-11 Smith Franklyn D Snap-in flange seal and locator
US4607402A (en) 1985-04-15 1986-08-26 Pollard Dianne J Retainer sheet
US5564714A (en) * 1993-02-23 1996-10-15 Three Bond Co., Ltd. Rubber-like molded product with support frame
JP3122386B2 (ja) * 1996-07-16 2001-01-09 シーケーディ株式会社 ガスケット保持具
US6293310B1 (en) * 1996-10-30 2001-09-25 Unit Instruments, Inc. Gas panel
US5730448A (en) * 1997-01-03 1998-03-24 Eg&G Pressure Science, Inc. Seal retainer plate
US5735532A (en) * 1997-01-03 1998-04-07 Eg&G Pressure Science, Inc. Seal compression limiting retainer
US5713582A (en) * 1997-01-03 1998-02-03 Eg&G Pressure Science, Inc. Seal retainer
US6629546B2 (en) * 1998-03-05 2003-10-07 Swagelok Company Modular surface mount manifold assemblies
KR20040089642A (ko) 2002-02-20 2004-10-21 갈록 실링 테크놀로지스 엘엘씨 금속 밀봉체 및 리테이너
US7364166B2 (en) * 2003-01-24 2008-04-29 Applied Engineered Surfaces, Inc. Seal and retainer for a fluid connection
US7458397B2 (en) * 2004-07-09 2008-12-02 Michael Doyle Modular fluid distribution system
WO2007083203A2 (en) 2005-12-14 2007-07-26 Smit, Carel, Christiaan Pipe joints
US20080128303A1 (en) * 2006-12-05 2008-06-05 Nikon Corporation Device container assembly with adjustable retainers for a reticle
JP5183935B2 (ja) * 2007-02-26 2013-04-17 Ｃｋｄ株式会社 流路ブロックの製造方法
KR100816263B1 (ko) 2007-04-17 2008-03-25 김영종 자동차용 이씨유 하우징의 실링재 삽입장치
US20080302426A1 (en) * 2007-06-06 2008-12-11 Greg Patrick Mulligan System and method of securing removable components for distribution of fluids
JP4567798B1 (ja) * 2009-06-04 2010-10-20 三菱電線工業株式会社 密封構造
CN102804335B (zh) * 2009-06-10 2015-10-21 威斯塔德尔特有限责任公司 极限流速和/或高温流体递送基体
ES2423967B1 (es) * 2012-03-13 2014-11-14 Manufactura Moderna De Metales S.A. Junta portadora de tornillos
US9869409B2 (en) * 2013-01-15 2018-01-16 Vistadeltek, Llc Gasket retainer for surface mount fluid component
US10502321B2 (en) * 2014-01-14 2019-12-10 Compart Systems Pte, Ltd. Gasket retainer for surface mount fluid component
US10118263B2 (en) 2015-09-02 2018-11-06 Lam Researech Corporation Monolithic manifold mask and substrate concepts
US11585444B2 (en) * 2019-08-05 2023-02-21 Ichor Systems, Inc. Seal for a flow restrictor
GB2561233B (en) * 2017-04-07 2020-01-15 Ford Motor Co A Gasket Assembly
KR20230010698A (ko) * 2020-05-12 2023-01-19 아이커 시스템즈, 인크. 부품 조립용 씰 리테이너 및 흐름 제어 장치에 부품을 설치하는 방법
US12589474B2 (en) * 2020-05-12 2026-03-31 Ichor Systems, Inc. Seal insertion tool for a fluid delivery module and method of installing a seal into a fluid delivery module
JP7707204B2 (ja) * 2020-05-19 2025-07-14 アイコール・システムズ・インク 流体配送モジュール用のシール挿入ツール及び流体配送モジュールへのシールの取り付け方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002506181A (ja) 1998-03-05 2002-02-26 スウエイジロク・カンパニー モジュール式表面取付型マニホルド
JP2003526759A (ja) 1998-05-18 2003-09-09 スウエイジロク・カンパニー モジュール式面取付型マニホルド組立体
US20020063396A1 (en) 2000-11-27 2002-05-30 Michael Doyle Keeper for positioning ring seals
JP2012077867A (ja) 2010-10-04 2012-04-19 Ihara Science Corp ガスケットホルダおよびこれを用いた流体制御装置

Also Published As

Publication number Publication date
WO2021231537A1 (en) 2021-11-18
US12529423B2 (en) 2026-01-20
TW202219405A (zh) 2022-05-16
EP4150664A4 (en) 2024-05-29
EP4150664A1 (en) 2023-03-22
US20210356041A1 (en) 2021-11-18
JP2023525574A (ja) 2023-06-16
US11698134B2 (en) 2023-07-11
KR20230010698A (ko) 2023-01-19
EP4150664B1 (en) 2026-04-01
US20230296175A1 (en) 2023-09-21

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