JP7594529B2 - 電気部品 - Google Patents

電気部品 Download PDF

Info

Publication number
JP7594529B2
JP7594529B2 JP2021526385A JP2021526385A JP7594529B2 JP 7594529 B2 JP7594529 B2 JP 7594529B2 JP 2021526385 A JP2021526385 A JP 2021526385A JP 2021526385 A JP2021526385 A JP 2021526385A JP 7594529 B2 JP7594529 B2 JP 7594529B2
Authority
JP
Japan
Prior art keywords
stack
electrical
layer
layers
passivation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021526385A
Other languages
English (en)
Japanese (ja)
Other versions
JP2022507448A5 (https=
JP2022507448A (ja
Inventor
ヴェラ アンドリュー
マーディロビッチ ピーター
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xaar Technology Ltd
Original Assignee
Xaar Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xaar Technology Ltd filed Critical Xaar Technology Ltd
Publication of JP2022507448A publication Critical patent/JP2022507448A/ja
Publication of JP2022507448A5 publication Critical patent/JP2022507448A5/ja
Application granted granted Critical
Publication of JP7594529B2 publication Critical patent/JP7594529B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14274—Structure of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H10N30/706—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings characterised by the underlying bases, e.g. substrates
    • H10N30/708—Intermediate layers, e.g. barrier, adhesion or growth control buffer layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Coating Apparatus (AREA)
JP2021526385A 2018-11-15 2019-11-15 電気部品 Active JP7594529B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1818641.1 2018-11-15
GB1818641.1A GB2579039A (en) 2018-11-15 2018-11-15 Electrical component
PCT/GB2019/053250 WO2020099892A1 (en) 2018-11-15 2019-11-15 Electrical component

Publications (3)

Publication Number Publication Date
JP2022507448A JP2022507448A (ja) 2022-01-18
JP2022507448A5 JP2022507448A5 (https=) 2024-02-27
JP7594529B2 true JP7594529B2 (ja) 2024-12-04

Family

ID=64740055

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021526385A Active JP7594529B2 (ja) 2018-11-15 2019-11-15 電気部品

Country Status (6)

Country Link
US (1) US11770976B2 (https=)
EP (1) EP3880480A1 (https=)
JP (1) JP7594529B2 (https=)
CN (1) CN113165383A (https=)
GB (1) GB2579039A (https=)
WO (1) WO2020099892A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2579041A (en) * 2018-11-15 2020-06-10 Xaar Technology Ltd Electrical component
JP7654512B2 (ja) * 2021-09-08 2025-04-01 キヤノン株式会社 液体吐出装置及び制御方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010240830A (ja) 2009-02-27 2010-10-28 Fujifilm Corp 保護層を備えたデバイス
JP2013243926A (ja) 2013-07-03 2013-12-05 Mitsumi Electric Co Ltd 圧電アクチュエータ及びその製造方法
WO2016156792A1 (en) 2015-04-01 2016-10-06 Xaar Technology Limited Inkjet printhead
JP2018154121A (ja) 2017-03-17 2018-10-04 株式会社リコー 液体吐出ヘッド、液体吐出ユニット、および液体を吐出する装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10121270A1 (de) 2001-04-30 2003-02-06 Epcos Ag Passivierungsmaterial für ein elektrisches Bauteil sowie piezoelektrisches Bauteil in Vielschichtbauweise
US20040051763A1 (en) * 2002-09-13 2004-03-18 Shogo Matsubara Piezoelectric thin film element, actuator, ink-jet head and ink-jet recording apparatus therefor
JP5023488B2 (ja) 2005-03-09 2012-09-12 セイコーエプソン株式会社 デバイス実装構造とデバイス実装方法、液滴吐出ヘッド及び駆動ユニット並びに半導体装置
JP5196106B2 (ja) 2007-03-28 2013-05-15 セイコーエプソン株式会社 圧電素子の製造方法
JP2010247495A (ja) 2009-04-20 2010-11-04 Seiko Epson Corp 圧電素子及び液体噴射ヘッド
US8040020B2 (en) * 2010-02-17 2011-10-18 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Encapsulated active transducer and method of fabricating the same
JP5824895B2 (ja) 2011-06-17 2015-12-02 株式会社リコー インクジェットヘッド及びインクジェット記録装置
WO2014003768A1 (en) 2012-06-28 2014-01-03 Hewlett-Packard Development Company, L.P. Printhead architectures
JP6186784B2 (ja) * 2013-03-22 2017-08-30 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置、圧電素子及び超音波センサー
US10032977B2 (en) * 2014-08-05 2018-07-24 Rohm Co., Ltd. Device using a piezoelectric element and method for manufacturing the same
JP6459028B2 (ja) * 2014-09-03 2019-01-30 ローム株式会社 圧電素子およびそれを備えたインクジェットヘッド
JP6686444B2 (ja) * 2016-01-07 2020-04-22 株式会社リコー Ｐｚｔ膜積層構造体、液体吐出ヘッド、液体吐出ユニット、液体を吐出する装置及びｐｚｔ膜積層構造体の製造方法
JP6776554B2 (ja) * 2016-03-02 2020-10-28 セイコーエプソン株式会社 圧電デバイス、ｍｅｍｓデバイス、液体噴射ヘッド及び液体噴射装置
JP6555409B2 (ja) * 2016-03-03 2019-08-07 株式会社リコー 液体吐出ヘッド、液体吐出ユニット、液体を吐出する装置
JP6322731B1 (ja) * 2017-01-06 2018-05-09 株式会社東芝 インクジェット式記録ヘッド
US10239312B2 (en) * 2017-03-17 2019-03-26 Ricoh Company, Ltd. Liquid discharge head, liquid discharge device, and liquid discharge apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010240830A (ja) 2009-02-27 2010-10-28 Fujifilm Corp 保護層を備えたデバイス
JP2013243926A (ja) 2013-07-03 2013-12-05 Mitsumi Electric Co Ltd 圧電アクチュエータ及びその製造方法
WO2016156792A1 (en) 2015-04-01 2016-10-06 Xaar Technology Limited Inkjet printhead
JP2018154121A (ja) 2017-03-17 2018-10-04 株式会社リコー 液体吐出ヘッド、液体吐出ユニット、および液体を吐出する装置

Also Published As

Publication number Publication date
CN113165383A (zh) 2021-07-23
EP3880480A1 (en) 2021-09-22
US20220006001A1 (en) 2022-01-06
GB2579039A (en) 2020-06-10
US11770976B2 (en) 2023-09-26
WO2020099892A1 (en) 2020-05-22
JP2022507448A (ja) 2022-01-18
GB201818641D0 (en) 2019-01-02

Similar Documents

Publication Publication Date Title
JP7492956B2 (ja) 電気部品
US8613498B2 (en) Method of manufacturing a liquid jet head and a liquid jet apparatus
US7226151B2 (en) Piezoelectric element, liquid ejection head and process for manufacturing them
JP7594529B2 (ja) 電気部品
JP4367654B2 (ja) 圧電素子及び液体噴射ヘッド
JP2011044582A (ja) 圧電素子、圧電アクチュエーター、液体噴射ヘッドおよび液体噴射装置、並びに圧電素子の製造方法
JP2011044528A (ja) 圧電素子、圧電アクチュエーター、液体噴射ヘッドおよび液体噴射装置
US8672458B2 (en) Liquid ejecting head and liquid ejecting apparatus
US20090244212A1 (en) Liquid ejecting head, liquid ejecting apparatus, and actuator
US9634235B2 (en) Method for manufacturing liquid ejecting head
JP2019522902A (ja) 優先電界駆動方向における圧電薄膜素子の分極
JP2006044083A (ja) 液体噴射ヘッドの製造方法及び液体噴射ヘッド
US20090244210A1 (en) Liquid Ejecting Head, Liquid Ejecting Apparatus, and Actuator
US20090205182A1 (en) Method of manufacturing liquid ejection head and method of manufacturing piezoelectric element
US20100123761A1 (en) Liquid ejecting head, liquid ejecting apparatus, actuator device, and method for manufacturing the liquid ejecting head
JP2011088311A (ja) アクチュエーターの製造方法および液体噴射ヘッドの製造方法
WO2022243666A1 (en) Electrical component for a microelectromechanical systems device
US7648229B2 (en) Liquid jet head and its manufacturing method
JP2010214800A (ja) 液体噴射ヘッドの製造方法、圧電素子の製造方法
JP2017052111A (ja) 電気機械変換部材、液滴吐出部材、画像形成装置、及び、電気機械変換部材の製造方法
JP2009208411A (ja) 液体噴射ヘッドの製造方法
US20090152236A1 (en) Method for manufacturing liquid ejecting head and liquid ejecting apparatus
US20250072291A1 (en) Piezoelectric element, method for manufacturing piezoelectric element, and liquid ejection head
US9156265B2 (en) Manufacturing method of liquid ejecting head
JP4291985B2 (ja) 圧電アクチュエータ及びその製造方法並びにインクジェットヘッド及びインクジェット式記録装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20221109

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20221109

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20231114

A524 Written submission of copy of amendment under article 19 pct

Free format text: JAPANESE INTERMEDIATE CODE: A524

Effective date: 20240209

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20240514

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240809

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20241022

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20241121

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20241122

R150 Certificate of patent or registration of utility model

Ref document number: 7594529

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150