CN113165383A - 电气部件 - Google Patents

电气部件 Download PDF

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Publication number
CN113165383A
CN113165383A CN201980075454.6A CN201980075454A CN113165383A CN 113165383 A CN113165383 A CN 113165383A CN 201980075454 A CN201980075454 A CN 201980075454A CN 113165383 A CN113165383 A CN 113165383A
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CN
China
Prior art keywords
electrical
layers
stack
layer
passivation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201980075454.6A
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English (en)
Chinese (zh)
Inventor
A·维拉
彼得·马迪洛维奇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xaar Technology Ltd
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Xaar Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xaar Technology Ltd filed Critical Xaar Technology Ltd
Publication of CN113165383A publication Critical patent/CN113165383A/zh
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14274—Structure of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H10N30/706—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings characterised by the underlying bases, e.g. substrates
    • H10N30/708—Intermediate layers, e.g. barrier, adhesion or growth control buffer layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Coating Apparatus (AREA)
CN201980075454.6A 2018-11-15 2019-11-15 电气部件 Pending CN113165383A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1818641.1 2018-11-15
GB1818641.1A GB2579039A (en) 2018-11-15 2018-11-15 Electrical component
PCT/GB2019/053250 WO2020099892A1 (en) 2018-11-15 2019-11-15 Electrical component

Publications (1)

Publication Number Publication Date
CN113165383A true CN113165383A (zh) 2021-07-23

Family

ID=64740055

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201980075454.6A Pending CN113165383A (zh) 2018-11-15 2019-11-15 电气部件

Country Status (6)

Country Link
US (1) US11770976B2 (https=)
EP (1) EP3880480A1 (https=)
JP (1) JP7594529B2 (https=)
CN (1) CN113165383A (https=)
GB (1) GB2579039A (https=)
WO (1) WO2020099892A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113016084A (zh) * 2018-11-15 2021-06-22 赛尔科技有限公司 电气部件
CN115771336A (zh) * 2021-09-08 2023-03-10 佳能株式会社 液体喷射设备和控制方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1528023A (zh) * 2001-04-30 2004-09-08 ���տ�˹�ɷ����޹�˾ 用于电气部件的钝化材料及多层结构的压电部件
CN1830668A (zh) * 2005-03-09 2006-09-13 精工爱普生株式会社 器件安装结构及安装法、液滴喷头、连接器、半导体装置
CN102825911A (zh) * 2011-06-17 2012-12-19 株式会社理光 喷墨头和喷墨记录装置
WO2014003768A1 (en) * 2012-06-28 2014-01-03 Hewlett-Packard Development Company, L.P. Printhead architectures
US20140307034A1 (en) * 2013-03-22 2014-10-16 Seiko Epson Corporation Liquid ejecting head, liquid ejecting apparatus, piezoelectric element and ultrasonic sensor
US20180194134A1 (en) * 2017-01-06 2018-07-12 Kabushiki Kaisha Toshiba Inkjet recording head
US20180264809A1 (en) * 2017-03-17 2018-09-20 Satoshi Mizukami Liquid discharge head, liquid discharge device, and liquid discharge apparatus
CN108698407A (zh) * 2016-03-03 2018-10-23 株式会社理光 液体排放头、液体排放单元以及排放液体的设备

Family Cites Families (12)

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US20040051763A1 (en) * 2002-09-13 2004-03-18 Shogo Matsubara Piezoelectric thin film element, actuator, ink-jet head and ink-jet recording apparatus therefor
JP5196106B2 (ja) 2007-03-28 2013-05-15 セイコーエプソン株式会社 圧電素子の製造方法
US8389084B2 (en) 2009-02-27 2013-03-05 Fujifilm Corporation Device with protective layer
JP2010247495A (ja) 2009-04-20 2010-11-04 Seiko Epson Corp 圧電素子及び液体噴射ヘッド
US8040020B2 (en) * 2010-02-17 2011-10-18 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Encapsulated active transducer and method of fabricating the same
JP5598578B2 (ja) 2013-07-03 2014-10-01 ミツミ電機株式会社 圧電アクチュエータ及びその製造方法
US10032977B2 (en) * 2014-08-05 2018-07-24 Rohm Co., Ltd. Device using a piezoelectric element and method for manufacturing the same
JP6459028B2 (ja) * 2014-09-03 2019-01-30 ローム株式会社 圧電素子およびそれを備えたインクジェットヘッド
GB2536942B (en) * 2015-04-01 2018-01-10 Xaar Technology Ltd Inkjet printhead
JP6686444B2 (ja) * 2016-01-07 2020-04-22 株式会社リコー Ｐｚｔ膜積層構造体、液体吐出ヘッド、液体吐出ユニット、液体を吐出する装置及びｐｚｔ膜積層構造体の製造方法
JP6776554B2 (ja) * 2016-03-02 2020-10-28 セイコーエプソン株式会社 圧電デバイス、ｍｅｍｓデバイス、液体噴射ヘッド及び液体噴射装置
JP7062994B2 (ja) 2017-03-17 2022-05-09 株式会社リコー 液体吐出ヘッド、液体吐出ユニット、および液体を吐出する装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1528023A (zh) * 2001-04-30 2004-09-08 ���տ�˹�ɷ����޹�˾ 用于电气部件的钝化材料及多层结构的压电部件
CN1830668A (zh) * 2005-03-09 2006-09-13 精工爱普生株式会社 器件安装结构及安装法、液滴喷头、连接器、半导体装置
CN102825911A (zh) * 2011-06-17 2012-12-19 株式会社理光 喷墨头和喷墨记录装置
WO2014003768A1 (en) * 2012-06-28 2014-01-03 Hewlett-Packard Development Company, L.P. Printhead architectures
US20140307034A1 (en) * 2013-03-22 2014-10-16 Seiko Epson Corporation Liquid ejecting head, liquid ejecting apparatus, piezoelectric element and ultrasonic sensor
CN108698407A (zh) * 2016-03-03 2018-10-23 株式会社理光 液体排放头、液体排放单元以及排放液体的设备
US20180194134A1 (en) * 2017-01-06 2018-07-12 Kabushiki Kaisha Toshiba Inkjet recording head
US20180264809A1 (en) * 2017-03-17 2018-09-20 Satoshi Mizukami Liquid discharge head, liquid discharge device, and liquid discharge apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113016084A (zh) * 2018-11-15 2021-06-22 赛尔科技有限公司 电气部件
CN115771336A (zh) * 2021-09-08 2023-03-10 佳能株式会社 液体喷射设备和控制方法

Also Published As

Publication number Publication date
JP7594529B2 (ja) 2024-12-04
EP3880480A1 (en) 2021-09-22
US20220006001A1 (en) 2022-01-06
GB2579039A (en) 2020-06-10
US11770976B2 (en) 2023-09-26
WO2020099892A1 (en) 2020-05-22
JP2022507448A (ja) 2022-01-18
GB201818641D0 (en) 2019-01-02

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Address after: Cambridge County, England

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Effective date of abandoning: 20240112

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