JP7566153B2 - 被覆工具 - Google Patents

被覆工具 Download PDF

Info

Publication number
JP7566153B2
JP7566153B2 JP2023531352A JP2023531352A JP7566153B2 JP 7566153 B2 JP7566153 B2 JP 7566153B2 JP 2023531352 A JP2023531352 A JP 2023531352A JP 2023531352 A JP2023531352 A JP 2023531352A JP 7566153 B2 JP7566153 B2 JP 7566153B2
Authority
JP
Japan
Prior art keywords
layer
substrate
region
carbon amount
coating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023531352A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2023276209A1 (https=
Inventor
洋之 金城
隼人 久保
忠 勝間
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Publication of JPWO2023276209A1 publication Critical patent/JPWO2023276209A1/ja
Application granted granted Critical
Publication of JP7566153B2 publication Critical patent/JP7566153B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • B23B27/148—Composition of the cutting inserts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36—Carbonitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/403—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2224/00—Materials of tools or workpieces composed of a compound including a metal
    • B23B2224/32—Titanium carbide nitride (TiCN)
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23B2228/10—Coatings
    • B23B2228/105—Coatings with specified thickness

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
JP2023531352A 2021-07-02 2022-01-25 被覆工具 Active JP7566153B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021110444 2021-07-02
JP2021110444 2021-07-02
PCT/JP2022/002520 WO2023276209A1 (ja) 2021-07-02 2022-01-25 被覆工具

Publications (2)

Publication Number Publication Date
JPWO2023276209A1 JPWO2023276209A1 (https=) 2023-01-05
JP7566153B2 true JP7566153B2 (ja) 2024-10-11

Family

ID=84691086

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023531352A Active JP7566153B2 (ja) 2021-07-02 2022-01-25 被覆工具

Country Status (6)

Country Link
US (1) US20240286200A1 (https=)
JP (1) JP7566153B2 (https=)
KR (1) KR20240011765A (https=)
CN (1) CN117545572A (https=)
DE (1) DE112022003412T5 (https=)
WO (1) WO2023276209A1 (https=)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011152602A (ja) 2010-01-27 2011-08-11 Mitsubishi Materials Corp 硬質被覆層がすぐれた耐欠損性を発揮する表面被覆切削工具
WO2012133461A1 (ja) 2011-03-31 2012-10-04 日立ツール株式会社 硬質皮膜被覆部材及びその製造方法、並びにそれを具備する刃先交換式回転工具
WO2014054591A1 (ja) 2012-10-01 2014-04-10 日立ツール株式会社 硬質皮膜被覆工具及びその製造方法
JP2014184521A (ja) 2013-03-25 2014-10-02 Mitsubishi Materials Corp 表面被覆超硬合金製切削工具
WO2017038762A1 (ja) 2015-08-29 2017-03-09 京セラ株式会社 被覆工具
JP2019195872A (ja) 2018-05-09 2019-11-14 株式会社タンガロイ 被覆切削工具

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013220520A (ja) * 2012-04-19 2013-10-28 Sumitomo Electric Hardmetal Corp 切削工具用の基材
JP7029106B2 (ja) * 2017-12-18 2022-03-03 株式会社タンガロイ 被覆切削工具
EP3567133A1 (en) * 2018-05-09 2019-11-13 Tungaloy Corporation Coated cutting tool
DE112019004438T5 (de) * 2018-09-05 2021-05-20 Kyocera Corporation Beschichtetes werkzeug und schneidwerkzeug
JP7213449B2 (ja) 2020-01-16 2023-01-27 株式会社豊田自動織機 産業車両のハブユニットシール構造

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011152602A (ja) 2010-01-27 2011-08-11 Mitsubishi Materials Corp 硬質被覆層がすぐれた耐欠損性を発揮する表面被覆切削工具
WO2012133461A1 (ja) 2011-03-31 2012-10-04 日立ツール株式会社 硬質皮膜被覆部材及びその製造方法、並びにそれを具備する刃先交換式回転工具
WO2014054591A1 (ja) 2012-10-01 2014-04-10 日立ツール株式会社 硬質皮膜被覆工具及びその製造方法
JP2014184521A (ja) 2013-03-25 2014-10-02 Mitsubishi Materials Corp 表面被覆超硬合金製切削工具
WO2017038762A1 (ja) 2015-08-29 2017-03-09 京セラ株式会社 被覆工具
JP2019195872A (ja) 2018-05-09 2019-11-14 株式会社タンガロイ 被覆切削工具

Also Published As

Publication number Publication date
US20240286200A1 (en) 2024-08-29
CN117545572A (zh) 2024-02-09
DE112022003412T5 (de) 2024-04-18
JPWO2023276209A1 (https=) 2023-01-05
KR20240011765A (ko) 2024-01-26
WO2023276209A1 (ja) 2023-01-05

Similar Documents

Publication Publication Date Title
JP6608937B2 (ja) 被覆工具
KR102216094B1 (ko) 표면 피복 절삭 공구 및 그 제조 방법
CN107438490B (zh) 表面被覆切削工具及其制造方法
KR102198745B1 (ko) 표면 피복 절삭 공구 및 그 제조 방법
JP6045010B1 (ja) 表面被覆切削工具およびその製造方法
EP3415255B1 (en) Surface-coated cutting tool and method for producing same
EP3590636B1 (en) Surface-coated cutting tool and production method therefor
EP3590638B1 (en) Surface-coated cutting tool and method for manufacturing the same
US12350742B2 (en) Surface-coated cutting tool
JP7486045B2 (ja) 表面被覆切削工具
JP7566153B2 (ja) 被覆工具
EP3868502B1 (en) Cutting tool
EP3868501B1 (en) Cutting tool
JP7851394B2 (ja) 超硬合金およびこれを用いた被覆工具、切削工具
WO2024247600A1 (ja) 被覆工具及び切削工具
WO2024181014A1 (ja) 被覆工具及び切削工具
JP2022150770A (ja) 表面被覆切削工具

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20231201

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20240709

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240809

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20240917

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20241001

R150 Certificate of patent or registration of utility model

Ref document number: 7566153

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150