JP7541763B2 - ＦＴｒＰＳＡによるＨＦ／ＨＣｌ含有エッチング排ガスの分離と回収循環再利用方法 - Google Patents

ＦＴｒＰＳＡによるＨＦ／ＨＣｌ含有エッチング排ガスの分離と回収循環再利用方法 Download PDF

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JP7541763B2
JP7541763B2 JP2022512788A JP2022512788A JP7541763B2 JP 7541763 B2 JP7541763 B2 JP 7541763B2 JP 2022512788 A JP2022512788 A JP 2022512788A JP 2022512788 A JP2022512788 A JP 2022512788A JP 7541763 B2 JP7541763 B2 JP 7541763B2
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hcl
tower
adsorption
rectification
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JP2023535850A5 (enExample
JP2023535850A (ja
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▲ア▼玲 鐘
蘭海 汪
雨明 鐘
運 陳
金財 唐
躍明 蔡
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浙江天采云集科技股▲分▼有限公司
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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/01—Chlorine; Hydrogen chloride
    • C01B7/07—Purification ; Separation
    • C01B7/0706—Purification ; Separation of hydrogen chloride
    • C01B7/0712—Purification ; Separation of hydrogen chloride by distillation
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen; Reversible storage of hydrogen
    • C01B3/50—Separation of hydrogen or hydrogen-containing gases from gaseous mixtures, e.g. purification
    • C01B3/56—Separation of hydrogen or hydrogen-containing gases from gaseous mixtures, e.g. purification by contacting with solids; Regeneration of used solids
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/01—Chlorine; Hydrogen chloride
    • C01B7/07—Purification ; Separation
    • C01B7/0706—Purification ; Separation of hydrogen chloride
    • C01B7/0718—Purification ; Separation of hydrogen chloride by adsorption
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/19—Fluorine; Hydrogen fluoride
    • C01B7/191—Hydrogen fluoride
    • C01B7/195—Separation; Purification
    • C01B7/196—Separation; Purification by distillation
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/19—Fluorine; Hydrogen fluoride
    • C01B7/191—Hydrogen fluoride
    • C01B7/195—Separation; Purification
    • C01B7/197—Separation; Purification by adsorption

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Treating Waste Gases (AREA)
  • Gas Separation By Absorption (AREA)
  • Drying Of Semiconductors (AREA)
JP2022512788A 2020-12-16 2021-05-18 ＦＴｒＰＳＡによるＨＦ／ＨＣｌ含有エッチング排ガスの分離と回収循環再利用方法 Active JP7541763B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN202011485842.2A CN112707373B (zh) 2020-12-16 2020-12-16 一种含HF/HCl蚀刻尾气FTrPSA分离与回收循环再利用方法
CN202011485842.2 2020-12-16
PCT/CN2021/094254 WO2022127019A1 (zh) 2020-12-16 2021-05-18 一种含HF/HCl蚀刻尾气FTrPSA分离与回收循环再利用方法

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JP2023535850A JP2023535850A (ja) 2023-08-22
JP2023535850A5 JP2023535850A5 (enExample) 2024-03-01
JP7541763B2 true JP7541763B2 (ja) 2024-08-29

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CN112707373B (zh) * 2020-12-16 2022-06-10 浙江天采云集科技股份有限公司 一种含HF/HCl蚀刻尾气FTrPSA分离与回收循环再利用方法
US11603313B2 (en) * 2021-05-11 2023-03-14 Praxair Technology, Inc. Method for pretreating and recovering a rare gas from a gas contaminant stream exiting an etch chamber
CN113860257B (zh) * 2021-11-04 2022-04-22 浙江容跃环保科技有限公司 玻璃薄化废酸液再生回收的方法及系统
CN115231524B (zh) * 2022-07-12 2024-03-12 浙江省天正设计工程有限公司 一种氟化工生产中含氟化氢尾气的分离纯化方法和装置
CN115650240A (zh) * 2022-09-08 2023-01-31 洛阳中硅高科技有限公司 一氯硅烷的制备方法
CN115722027B (zh) * 2022-11-14 2026-01-27 上海森崚半导体科技有限公司 干刻尾气回收三氟化氮的方法及装置
CN116920578A (zh) * 2023-07-31 2023-10-24 重庆山巨化工机械股份有限公司 撬装式有机废气处理系统
CN117538478A (zh) * 2023-10-30 2024-02-09 华能烟台八角热电有限公司 一种含油污泥燃烧试验装置及方法
CN117427453B (zh) * 2023-11-15 2026-06-09 武汉科技大学 一种锂电池电解液有机氟添加剂ahf法合成尾气处理方法
CN117699740A (zh) * 2023-12-01 2024-03-15 安徽金禾实业股份有限公司 一种从氧化镁生产尾气中回收盐酸的方法
CN119548942B (zh) * 2024-11-28 2026-08-07 中船(邯郸)派瑞特种气体股份有限公司 一种硅烷合成乙硅烷产物中杂质气体的纯化装置和工艺
CN119909499B (zh) * 2025-04-07 2025-06-03 湘潭大学 一种利用白油循环吸收废气中乙醇的工艺

Citations (8)

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CN105854516A (zh) 2016-03-31 2016-08-17 四川天采科技有限责任公司 一种炼厂干气同时回收h2和c2及以上组分的全温程变压吸附方法
JP2017043523A (ja) 2015-08-28 2017-03-02 信越化学工業株式会社 水素ガス回収システムおよび水素ガスの分離回収方法
CN108658042A (zh) 2018-05-29 2018-10-16 四川天采科技有限责任公司 一种led-mocvd制程尾气全温程变压吸附全组分回收再利用方法
CN108744882A (zh) 2018-05-29 2018-11-06 浙江天采云集科技股份有限公司 一种led-mocvd制程废气全温程变压吸附提氨再利用的方法
US20180318750A1 (en) 2016-03-31 2018-11-08 Sichuan Techairs Co., Ltd. Method for Gas Separation, Purification and Clarification by FTrPSA
CN109092010A (zh) 2018-05-29 2018-12-28 浙江天采云集科技股份有限公司 一种led-mocvd制程废气全温程变压吸附提氢再利用的方法
US20200070090A1 (en) 2018-09-03 2020-03-05 South China Institute Of Environmental Science. Mee Waste gas purification system and method
CN211799895U (zh) 2020-03-17 2020-10-30 大连海奥膜技术有限公司 一种分离含有氯化氢和氢气混合气体的工艺系统

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JP3025653B2 (ja) * 1996-01-29 2000-03-27 東洋エンジニアリング株式会社 改良された圧力スイング吸着法
US7790130B2 (en) * 2007-08-31 2010-09-07 Uop Llc Wide mesoporous alumina composites having trimodal pore structure
CN108715436B (zh) * 2018-05-29 2019-11-08 四川天采科技有限责任公司 半导体制程常压废氢气全温程变压吸附提纯再利用的方法
CN112707373B (zh) * 2020-12-16 2022-06-10 浙江天采云集科技股份有限公司 一种含HF/HCl蚀刻尾气FTrPSA分离与回收循环再利用方法
CN112591711B (zh) * 2020-12-16 2022-05-20 浙江天采云集科技股份有限公司 一种HF/HCl混合气体高纯度高收率的FTrPSA分离与净化提取方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017043523A (ja) 2015-08-28 2017-03-02 信越化学工業株式会社 水素ガス回収システムおよび水素ガスの分離回収方法
CN105854516A (zh) 2016-03-31 2016-08-17 四川天采科技有限责任公司 一种炼厂干气同时回收h2和c2及以上组分的全温程变压吸附方法
US20180318750A1 (en) 2016-03-31 2018-11-08 Sichuan Techairs Co., Ltd. Method for Gas Separation, Purification and Clarification by FTrPSA
CN108658042A (zh) 2018-05-29 2018-10-16 四川天采科技有限责任公司 一种led-mocvd制程尾气全温程变压吸附全组分回收再利用方法
CN108744882A (zh) 2018-05-29 2018-11-06 浙江天采云集科技股份有限公司 一种led-mocvd制程废气全温程变压吸附提氨再利用的方法
CN109092010A (zh) 2018-05-29 2018-12-28 浙江天采云集科技股份有限公司 一种led-mocvd制程废气全温程变压吸附提氢再利用的方法
US20200070090A1 (en) 2018-09-03 2020-03-05 South China Institute Of Environmental Science. Mee Waste gas purification system and method
CN211799895U (zh) 2020-03-17 2020-10-30 大连海奥膜技术有限公司 一种分离含有氯化氢和氢气混合气体的工艺系统

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CN112707373A (zh) 2021-04-27
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JP2023535850A (ja) 2023-08-22

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