JP7515752B1 - 搬送システム及び制御装置 - Google Patents

搬送システム及び制御装置 Download PDF

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Publication number
JP7515752B1
JP7515752B1 JP2023574285A JP2023574285A JP7515752B1 JP 7515752 B1 JP7515752 B1 JP 7515752B1 JP 2023574285 A JP2023574285 A JP 2023574285A JP 2023574285 A JP2023574285 A JP 2023574285A JP 7515752 B1 JP7515752 B1 JP 7515752B1
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JP
Japan
Prior art keywords
coils
thrust
mover
current
target value
Prior art date
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Active
Application number
JP2023574285A
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English (en)
Japanese (ja)
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JPWO2025027856A5 (https=
JPWO2025027856A1 (https=
Inventor
裕司 五十嵐
健治 ▲高▼橋
達也 川瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
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Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
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Publication of JP7515752B1 publication Critical patent/JP7515752B1/ja
Publication of JPWO2025027856A1 publication Critical patent/JPWO2025027856A1/ja
Publication of JPWO2025027856A5 publication Critical patent/JPWO2025027856A5/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
    • B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/02—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
    • H02P25/06—Linear motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/02—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
    • H02P25/06—Linear motors
    • H02P25/064—Linear motors of the synchronous type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P6/00—Arrangements for controlling synchronous motors or other dynamo-electric motors using electronic commutation dependent on the rotor position; Electronic commutators therefor
    • H02P6/006—Controlling linear motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P6/00—Arrangements for controlling synchronous motors or other dynamo-electric motors using electronic commutation dependent on the rotor position; Electronic commutators therefor
    • H02P6/28—Arrangements for controlling current
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Control Of Linear Motors (AREA)
  • Linear Motors (AREA)
JP2023574285A 2023-08-03 2023-08-03 搬送システム及び制御装置 Active JP7515752B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/028460 WO2025027856A1 (ja) 2023-08-03 2023-08-03 搬送システム及び制御装置

Publications (3)

Publication Number Publication Date
JP7515752B1 true JP7515752B1 (ja) 2024-07-12
JPWO2025027856A1 JPWO2025027856A1 (https=) 2025-02-06
JPWO2025027856A5 JPWO2025027856A5 (https=) 2025-07-08

Family

ID=91810484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023574285A Active JP7515752B1 (ja) 2023-08-03 2023-08-03 搬送システム及び制御装置

Country Status (5)

Country Link
JP (1) JP7515752B1 (https=)
KR (1) KR102947930B1 (https=)
CN (1) CN121464577A (https=)
DE (1) DE112023006274T5 (https=)
WO (1) WO2025027856A1 (https=)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0919178A (ja) * 1995-06-27 1997-01-17 Canon Inc リニア・モータ装置
JP2017079569A (ja) * 2015-10-22 2017-04-27 キヤノン株式会社 可動磁石型リニアモータ制御システム

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7025256B2 (ja) 2018-03-16 2022-02-24 キヤノン株式会社 ステージ装置、リソグラフィ装置、および物品の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0919178A (ja) * 1995-06-27 1997-01-17 Canon Inc リニア・モータ装置
JP2017079569A (ja) * 2015-10-22 2017-04-27 キヤノン株式会社 可動磁石型リニアモータ制御システム

Also Published As

Publication number Publication date
DE112023006274T5 (de) 2026-04-16
WO2025027856A1 (ja) 2025-02-06
KR20260011187A (ko) 2026-01-22
CN121464577A (zh) 2026-02-03
KR102947930B1 (ko) 2026-04-03
JPWO2025027856A1 (https=) 2025-02-06

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