JPWO2025027856A5 - - Google Patents

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Publication number
JPWO2025027856A5
JPWO2025027856A5 JP2023574285A JP2023574285A JPWO2025027856A5 JP WO2025027856 A5 JPWO2025027856 A5 JP WO2025027856A5 JP 2023574285 A JP2023574285 A JP 2023574285A JP 2023574285 A JP2023574285 A JP 2023574285A JP WO2025027856 A5 JPWO2025027856 A5 JP WO2025027856A5
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JP
Japan
Prior art keywords
coils
thrust
mover
target value
current
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JP2023574285A
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English (en)
Japanese (ja)
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JP7515752B1 (ja
JPWO2025027856A1 (https=
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Priority claimed from PCT/JP2023/028460 external-priority patent/WO2025027856A1/ja
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Publication of JP7515752B1 publication Critical patent/JP7515752B1/ja
Publication of JPWO2025027856A1 publication Critical patent/JPWO2025027856A1/ja
Publication of JPWO2025027856A5 publication Critical patent/JPWO2025027856A5/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2023574285A 2023-08-03 2023-08-03 搬送システム及び制御装置 Active JP7515752B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/028460 WO2025027856A1 (ja) 2023-08-03 2023-08-03 搬送システム及び制御装置

Publications (3)

Publication Number Publication Date
JP7515752B1 JP7515752B1 (ja) 2024-07-12
JPWO2025027856A1 JPWO2025027856A1 (https=) 2025-02-06
JPWO2025027856A5 true JPWO2025027856A5 (https=) 2025-07-08

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ID=91810484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023574285A Active JP7515752B1 (ja) 2023-08-03 2023-08-03 搬送システム及び制御装置

Country Status (5)

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JP (1) JP7515752B1 (https=)
KR (1) KR102947930B1 (https=)
CN (1) CN121464577A (https=)
DE (1) DE112023006274T5 (https=)
WO (1) WO2025027856A1 (https=)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3501559B2 (ja) * 1995-06-27 2004-03-02 キヤノン株式会社 リニア・モータ装置
JP6704705B2 (ja) 2015-10-22 2020-06-03 キヤノン株式会社 可動磁石型リニアモータ制御システム及びその制御方法
JP7025256B2 (ja) 2018-03-16 2022-02-24 キヤノン株式会社 ステージ装置、リソグラフィ装置、および物品の製造方法

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