KR102947930B1 - 반송 시스템 및 제어 장치 - Google Patents

반송 시스템 및 제어 장치

Info

Publication number
KR102947930B1
KR102947930B1 KR1020257042936A KR20257042936A KR102947930B1 KR 102947930 B1 KR102947930 B1 KR 102947930B1 KR 1020257042936 A KR1020257042936 A KR 1020257042936A KR 20257042936 A KR20257042936 A KR 20257042936A KR 102947930 B1 KR102947930 B1 KR 102947930B1
Authority
KR
South Korea
Prior art keywords
thrust
current
actuator
coils
target value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020257042936A
Other languages
English (en)
Korean (ko)
Other versions
KR20260011187A (ko
Inventor
유지 이가라시
겐지 다카하시
다츠야 가와세
Original Assignee
미쓰비시덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 미쓰비시덴키 가부시키가이샤 filed Critical 미쓰비시덴키 가부시키가이샤
Publication of KR20260011187A publication Critical patent/KR20260011187A/ko
Application granted granted Critical
Publication of KR102947930B1 publication Critical patent/KR102947930B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
    • B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/02—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
    • H02P25/06—Linear motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/02—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
    • H02P25/06—Linear motors
    • H02P25/064—Linear motors of the synchronous type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P6/00—Arrangements for controlling synchronous motors or other dynamo-electric motors using electronic commutation dependent on the rotor position; Electronic commutators therefor
    • H02P6/006—Controlling linear motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P6/00—Arrangements for controlling synchronous motors or other dynamo-electric motors using electronic commutation dependent on the rotor position; Electronic commutators therefor
    • H02P6/28—Arrangements for controlling current
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Control Of Linear Motors (AREA)
  • Linear Motors (AREA)
KR1020257042936A 2023-08-03 2023-08-03 반송 시스템 및 제어 장치 Active KR102947930B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/028460 WO2025027856A1 (ja) 2023-08-03 2023-08-03 搬送システム及び制御装置

Publications (2)

Publication Number Publication Date
KR20260011187A KR20260011187A (ko) 2026-01-22
KR102947930B1 true KR102947930B1 (ko) 2026-04-03

Family

ID=91810484

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020257042936A Active KR102947930B1 (ko) 2023-08-03 2023-08-03 반송 시스템 및 제어 장치

Country Status (5)

Country Link
JP (1) JP7515752B1 (https=)
KR (1) KR102947930B1 (https=)
CN (1) CN121464577A (https=)
DE (1) DE112023006274T5 (https=)
WO (1) WO2025027856A1 (https=)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017079569A (ja) 2015-10-22 2017-04-27 キヤノン株式会社 可動磁石型リニアモータ制御システム
KR102373820B1 (ko) 2018-03-16 2022-03-14 캐논 가부시끼가이샤 스테이지 구동 장치, 리소그래피 장치, 및 물품 제조 방법

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3501559B2 (ja) * 1995-06-27 2004-03-02 キヤノン株式会社 リニア・モータ装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017079569A (ja) 2015-10-22 2017-04-27 キヤノン株式会社 可動磁石型リニアモータ制御システム
KR102373820B1 (ko) 2018-03-16 2022-03-14 캐논 가부시끼가이샤 스테이지 구동 장치, 리소그래피 장치, 및 물품 제조 방법

Also Published As

Publication number Publication date
DE112023006274T5 (de) 2026-04-16
WO2025027856A1 (ja) 2025-02-06
KR20260011187A (ko) 2026-01-22
CN121464577A (zh) 2026-02-03
JP7515752B1 (ja) 2024-07-12
JPWO2025027856A1 (https=) 2025-02-06

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