JPWO2025027856A1 - - Google Patents

Info

Publication number
JPWO2025027856A1
JPWO2025027856A1 JP2023574285A JP2023574285A JPWO2025027856A1 JP WO2025027856 A1 JPWO2025027856 A1 JP WO2025027856A1 JP 2023574285 A JP2023574285 A JP 2023574285A JP 2023574285 A JP2023574285 A JP 2023574285A JP WO2025027856 A1 JPWO2025027856 A1 JP WO2025027856A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2023574285A
Other languages
Japanese (ja)
Other versions
JPWO2025027856A5 (https=
JP7515752B1 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of JP7515752B1 publication Critical patent/JP7515752B1/ja
Publication of JPWO2025027856A1 publication Critical patent/JPWO2025027856A1/ja
Publication of JPWO2025027856A5 publication Critical patent/JPWO2025027856A5/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
    • B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/02—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
    • H02P25/06—Linear motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/02—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
    • H02P25/06—Linear motors
    • H02P25/064—Linear motors of the synchronous type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P6/00—Arrangements for controlling synchronous motors or other dynamo-electric motors using electronic commutation dependent on the rotor position; Electronic commutators therefor
    • H02P6/006—Controlling linear motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P6/00—Arrangements for controlling synchronous motors or other dynamo-electric motors using electronic commutation dependent on the rotor position; Electronic commutators therefor
    • H02P6/28—Arrangements for controlling current
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Control Of Linear Motors (AREA)
  • Linear Motors (AREA)
JP2023574285A 2023-08-03 2023-08-03 搬送システム及び制御装置 Active JP7515752B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/028460 WO2025027856A1 (ja) 2023-08-03 2023-08-03 搬送システム及び制御装置

Publications (3)

Publication Number Publication Date
JP7515752B1 JP7515752B1 (ja) 2024-07-12
JPWO2025027856A1 true JPWO2025027856A1 (https=) 2025-02-06
JPWO2025027856A5 JPWO2025027856A5 (https=) 2025-07-08

Family

ID=91810484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023574285A Active JP7515752B1 (ja) 2023-08-03 2023-08-03 搬送システム及び制御装置

Country Status (5)

Country Link
JP (1) JP7515752B1 (https=)
KR (1) KR102947930B1 (https=)
CN (1) CN121464577A (https=)
DE (1) DE112023006274T5 (https=)
WO (1) WO2025027856A1 (https=)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3501559B2 (ja) * 1995-06-27 2004-03-02 キヤノン株式会社 リニア・モータ装置
JP6704705B2 (ja) 2015-10-22 2020-06-03 キヤノン株式会社 可動磁石型リニアモータ制御システム及びその制御方法
JP7025256B2 (ja) 2018-03-16 2022-02-24 キヤノン株式会社 ステージ装置、リソグラフィ装置、および物品の製造方法

Also Published As

Publication number Publication date
DE112023006274T5 (de) 2026-04-16
WO2025027856A1 (ja) 2025-02-06
KR20260011187A (ko) 2026-01-22
CN121464577A (zh) 2026-02-03
JP7515752B1 (ja) 2024-07-12
KR102947930B1 (ko) 2026-04-03

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