JP7455572B2 - 電源装置及びレーザ装置 - Google Patents

電源装置及びレーザ装置 Download PDF

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Publication number
JP7455572B2
JP7455572B2 JP2019231735A JP2019231735A JP7455572B2 JP 7455572 B2 JP7455572 B2 JP 7455572B2 JP 2019231735 A JP2019231735 A JP 2019231735A JP 2019231735 A JP2019231735 A JP 2019231735A JP 7455572 B2 JP7455572 B2 JP 7455572B2
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Japan
Prior art keywords
voltage
time
capacitor
charging
power supply
Prior art date
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Active
Application number
JP2019231735A
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English (en)
Japanese (ja)
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JP2021100348A (ja
Inventor
泰久 田坂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
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Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Priority to JP2019231735A priority Critical patent/JP7455572B2/ja
Priority to KR1020200167950A priority patent/KR20210081247A/ko
Priority to TW109143377A priority patent/TWI777322B/zh
Priority to CN202011472744.5A priority patent/CN113098268A/zh
Publication of JP2021100348A publication Critical patent/JP2021100348A/ja
Application granted granted Critical
Publication of JP7455572B2 publication Critical patent/JP7455572B2/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/09705—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser with particular means for stabilising the discharge
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of dc power input into dc power output
    • H02M3/02—Conversion of dc power input into dc power output without intermediate conversion into ac
    • H02M3/04—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters
    • H02M3/10—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M3/145—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M3/155—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
    • H02M3/156—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of output voltage or current, e.g. switching regulators
    • H02M3/158—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of output voltage or current, e.g. switching regulators including plural semiconductor devices as final control devices for a single load
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Power Engineering (AREA)
  • Dc-Dc Converters (AREA)
  • Lasers (AREA)
  • Laser Surgery Devices (AREA)
JP2019231735A 2019-12-23 2019-12-23 電源装置及びレーザ装置 Active JP7455572B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2019231735A JP7455572B2 (ja) 2019-12-23 2019-12-23 電源装置及びレーザ装置
KR1020200167950A KR20210081247A (ko) 2019-12-23 2020-12-04 전원장치 및 레이저장치
TW109143377A TWI777322B (zh) 2019-12-23 2020-12-09 電源裝置及雷射裝置
CN202011472744.5A CN113098268A (zh) 2019-12-23 2020-12-15 电源装置及激光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019231735A JP7455572B2 (ja) 2019-12-23 2019-12-23 電源装置及びレーザ装置

Publications (2)

Publication Number Publication Date
JP2021100348A JP2021100348A (ja) 2021-07-01
JP7455572B2 true JP7455572B2 (ja) 2024-03-26

Family

ID=76541544

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019231735A Active JP7455572B2 (ja) 2019-12-23 2019-12-23 電源装置及びレーザ装置

Country Status (4)

Country Link
JP (1) JP7455572B2 (zh)
KR (1) KR20210081247A (zh)
CN (1) CN113098268A (zh)
TW (1) TWI777322B (zh)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017085835A (ja) 2015-10-30 2017-05-18 株式会社オートネットワーク技術研究所 Ｄｃｄｃコンバータ
WO2017149712A1 (ja) 2016-03-02 2017-09-08 ギガフォトン株式会社 レーザ装置及び極端紫外光生成システム
JP2019126197A (ja) 2018-01-17 2019-07-25 住友重機械工業株式会社 電源装置、レーザ装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3645216B2 (ja) 1994-04-27 2005-05-11 三菱電機株式会社 レーザ加工装置およびその制御方法
JP3413510B2 (ja) * 1995-09-27 2003-06-03 株式会社小松製作所 レーザ装置
JP2006074965A (ja) * 2004-09-06 2006-03-16 Honda Motor Co Ltd 電源装置
JP5470150B2 (ja) * 2010-04-23 2014-04-16 ローム株式会社 スイッチング電源の制御回路、制御方法およびそれらを用いた発光装置および電子機器
JP5891454B2 (ja) * 2011-04-18 2016-03-23 パナソニックＩｐマネジメント株式会社 半導体発光素子の点灯装置およびそれを用いた照明器具
JP5884050B2 (ja) * 2011-12-05 2016-03-15 パナソニックＩｐマネジメント株式会社 点灯装置およびそれを備えた照明器具
US9431906B2 (en) * 2013-03-29 2016-08-30 Chengdu Monolithic Power Systems Co., Ltd. Voltage converter circuit and associated control method to improve transient performance
JP6661439B2 (ja) * 2016-03-29 2020-03-11 住友重機械工業株式会社 レーザ駆動装置
JP6954733B2 (ja) * 2016-10-18 2021-10-27 住友重機械工業株式会社 レーザ用電源

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017085835A (ja) 2015-10-30 2017-05-18 株式会社オートネットワーク技術研究所 Ｄｃｄｃコンバータ
WO2017149712A1 (ja) 2016-03-02 2017-09-08 ギガフォトン株式会社 レーザ装置及び極端紫外光生成システム
JP2019126197A (ja) 2018-01-17 2019-07-25 住友重機械工業株式会社 電源装置、レーザ装置

Also Published As

Publication number Publication date
CN113098268A (zh) 2021-07-09
JP2021100348A (ja) 2021-07-01
KR20210081247A (ko) 2021-07-01
TWI777322B (zh) 2022-09-11
TW202125959A (zh) 2021-07-01

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