JP7451376B2 - フォトニック回路製造における損失モニタリング - Google Patents

フォトニック回路製造における損失モニタリング Download PDF

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Publication number
JP7451376B2
JP7451376B2 JP2020177748A JP2020177748A JP7451376B2 JP 7451376 B2 JP7451376 B2 JP 7451376B2 JP 2020177748 A JP2020177748 A JP 2020177748A JP 2020177748 A JP2020177748 A JP 2020177748A JP 7451376 B2 JP7451376 B2 JP 7451376B2
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integrated circuit
photonic integrated
manufacturing
waveguide
damage
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Japanese (ja)
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JP2022039883A5 (enExample
JP2022039883A (ja
Inventor
エリック・ヨハン・ノルバーグ
ルイ・リャン
ベンジャミン・エム．・カーティン
ジャレッド・ボーターズ
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OpenLight Photonics Inc
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OpenLight Photonics Inc
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G01N21/9505—Wafer internal defects, e.g. microcracks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
    • G01M11/33—Testing of optical devices, constituted by fibre optics or optical waveguides with a light emitter being disposed at one fibre or waveguide end-face, and a light receiver at the other end-face
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
    • G01M11/33—Testing of optical devices, constituted by fibre optics or optical waveguides with a light emitter being disposed at one fibre or waveguide end-face, and a light receiver at the other end-face
    • G01M11/331—Testing of optical devices, constituted by fibre optics or optical waveguides with a light emitter being disposed at one fibre or waveguide end-face, and a light receiver at the other end-face by using interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12002—Three-dimensional structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/08—Optical fibres; light guides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12142—Modulator
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12159—Interferometer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/212—Mach-Zehnder type

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optical Integrated Circuits (AREA)
JP2020177748A 2020-08-28 2020-10-23 フォトニック回路製造における損失モニタリング Active JP7451376B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US17/006,366 2020-08-28
US17/006,366 US11428646B2 (en) 2020-08-28 2020-08-28 Loss monitoring in photonic circuit fabrication

Publications (3)

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JP2022039883A JP2022039883A (ja) 2022-03-10
JP2022039883A5 JP2022039883A5 (enExample) 2023-10-24
JP7451376B2 true JP7451376B2 (ja) 2024-03-18

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US (1) US11428646B2 (enExample)
EP (1) EP3961276B1 (enExample)
JP (1) JP7451376B2 (enExample)
KR (1) KR102637475B1 (enExample)
CN (1) CN114114539B (enExample)
TW (1) TWI861281B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11428646B2 (en) 2020-08-28 2022-08-30 Openlight Photonics, Inc. Loss monitoring in photonic circuit fabrication
US12181709B2 (en) 2022-03-10 2024-12-31 Ii-Vi Delaware, Inc. Trimming of optical response for tunable photonic devices
US12699300B2 (en) * 2023-02-24 2026-08-04 Advanced Semiconductor Engineering, Inc. Semiconductor devices
CN118330817B (zh) * 2024-06-13 2024-10-15 杭州质禾科技有限公司 一种光芯片及其制备方法

Citations (5)

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JP2004126398A (ja) 2002-10-04 2004-04-22 Nippon Telegr & Teleph Corp <Ntt> 光回路及びその評価装置
JP2005535899A (ja) 2002-08-16 2005-11-24 サーノフ・コーポレーション 犠牲試験構造を含むフォトニックデバイスおよびｐｉｃならびにこれらの製造方法
WO2014034238A1 (ja) 2012-08-29 2014-03-06 日本電気株式会社 光集積回路、および光集積回路における光デバイスの検査方法
WO2017085934A1 (ja) 2015-11-19 2017-05-26 日本電信電話株式会社 シリコン光回路
US20190162628A1 (en) 2017-11-30 2019-05-30 Rain Tree Photonics Pte. Ltd. Method for in-line optical testing

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AU1799501A (en) * 1999-11-23 2001-06-04 Nanovation Technologies, Inc. Optical mach-zehnder switch having a movable phase shifter
US6647350B1 (en) * 2000-06-02 2003-11-11 Exactus, Inc. Radiometric temperature measurement system
ATE346410T1 (de) * 2000-08-04 2006-12-15 Amberwave Systems Corp Siliziumwafer mit monolithischen optoelektronischen komponenten
US6767751B2 (en) * 2002-05-28 2004-07-27 Silicon Light Machines, Inc. Integrated driver process flow
US7110629B2 (en) * 2002-07-22 2006-09-19 Applied Materials, Inc. Optical ready substrates
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JP2017524965A (ja) * 2014-06-05 2017-08-31 テクニオン・リサーチ・アンド・ディベロップメント・ファウンデーション・リミテッド 大規模フォトニック集積回路の多自由度安定化
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JP2005535899A (ja) 2002-08-16 2005-11-24 サーノフ・コーポレーション 犠牲試験構造を含むフォトニックデバイスおよびｐｉｃならびにこれらの製造方法
JP2004126398A (ja) 2002-10-04 2004-04-22 Nippon Telegr & Teleph Corp <Ntt> 光回路及びその評価装置
WO2014034238A1 (ja) 2012-08-29 2014-03-06 日本電気株式会社 光集積回路、および光集積回路における光デバイスの検査方法
WO2017085934A1 (ja) 2015-11-19 2017-05-26 日本電信電話株式会社 シリコン光回路
US20190162628A1 (en) 2017-11-30 2019-05-30 Rain Tree Photonics Pte. Ltd. Method for in-line optical testing

Also Published As

Publication number Publication date
CN114114539A (zh) 2022-03-01
KR20220029276A (ko) 2022-03-08
EP3961276A1 (en) 2022-03-02
TW202214997A (zh) 2022-04-16
JP2022039883A (ja) 2022-03-10
KR102637475B1 (ko) 2024-02-19
TWI861281B (zh) 2024-11-11
CN114114539B (zh) 2023-04-18
US20220065798A1 (en) 2022-03-03
EP3961276C0 (en) 2025-04-16
EP3961276B1 (en) 2025-04-16
US11428646B2 (en) 2022-08-30

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