JP7446911B2 - 波面計測装置、波面計測方法、並びに、光学系および光学素子の製造方法 - Google Patents

波面計測装置、波面計測方法、並びに、光学系および光学素子の製造方法 Download PDF

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JP7446911B2
JP7446911B2 JP2020086669A JP2020086669A JP7446911B2 JP 7446911 B2 JP7446911 B2 JP 7446911B2 JP 2020086669 A JP2020086669 A JP 2020086669A JP 2020086669 A JP2020086669 A JP 2020086669A JP 7446911 B2 JP7446911 B2 JP 7446911B2
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JP2021181900A5 (https=
JP2021181900A (ja
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智洋 杉本
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Canon Inc
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Canon Inc
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JP2020086669A 2020-05-18 2020-05-18 波面計測装置、波面計測方法、並びに、光学系および光学素子の製造方法 Active JP7446911B2 (ja)

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JP2020086669A JP7446911B2 (ja) 2020-05-18 2020-05-18 波面計測装置、波面計測方法、並びに、光学系および光学素子の製造方法
JP2024027096A JP7721711B2 (ja) 2020-05-18 2024-02-27 波面計測装置、波面計測方法、並びに、光学系および光学素子の製造方法

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JP2024027096A Active JP7721711B2 (ja) 2020-05-18 2024-02-27 波面計測装置、波面計測方法、並びに、光学系および光学素子の製造方法

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WO2023120604A1 (ja) * 2021-12-23 2023-06-29 京セラ株式会社 計測装置、調整装置及び計測方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002195913A (ja) 2000-12-27 2002-07-10 Nikon Corp 収差測定装置及び方法、露光装置、並びにマイクロデバイスの製造方法
JP2005279022A (ja) 2004-03-30 2005-10-13 Topcon Corp 眼科装置
WO2018037448A1 (ja) 2016-08-22 2018-03-01 三菱電機株式会社 波面計測装置及び光学系組み立て装置
JP2019191121A (ja) 2018-04-27 2019-10-31 キヤノン株式会社 計測方法、調整方法及び光学系の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5672517B2 (ja) * 2009-10-20 2015-02-18 株式会社ニコン 波面収差測定方法及び波面収差測定機
CN102607719B (zh) 2011-06-24 2013-07-17 北京理工大学 基于横向剪切干涉的扩束准直系统波面像差检测装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002195913A (ja) 2000-12-27 2002-07-10 Nikon Corp 収差測定装置及び方法、露光装置、並びにマイクロデバイスの製造方法
JP2005279022A (ja) 2004-03-30 2005-10-13 Topcon Corp 眼科装置
WO2018037448A1 (ja) 2016-08-22 2018-03-01 三菱電機株式会社 波面計測装置及び光学系組み立て装置
JP2019191121A (ja) 2018-04-27 2019-10-31 キヤノン株式会社 計測方法、調整方法及び光学系の製造方法

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JP2024063078A (ja) 2024-05-10
JP2021181900A (ja) 2021-11-25

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