JP7409284B2 - 搬送システム - Google Patents
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- JP7409284B2 JP7409284B2 JP2020177321A JP2020177321A JP7409284B2 JP 7409284 B2 JP7409284 B2 JP 7409284B2 JP 2020177321 A JP2020177321 A JP 2020177321A JP 2020177321 A JP2020177321 A JP 2020177321A JP 7409284 B2 JP7409284 B2 JP 7409284B2
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0492—Storage devices mechanical with cars adapted to travel in storage aisles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/137—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed
- B65G1/1373—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed for fulfilling orders in warehouses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
- B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/4189—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by the transport system
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/137—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed
- B65G1/1373—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed for fulfilling orders in warehouses
- B65G1/1375—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed for fulfilling orders in warehouses the orders being assembled on a commissioning stacker-crane or truck
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
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- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Automation & Control Theory (AREA)
- Mechanical Engineering (AREA)
- Quality & Reliability (AREA)
- General Engineering & Computer Science (AREA)
- Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
- Traffic Control Systems (AREA)
- Management, Administration, Business Operations System, And Electronic Commerce (AREA)
Description
次に、搬送システムのその他の実施形態について説明する。
以下、上記において説明した搬送システムの概要について説明する。
2:第2エリア内搬送設備
3:接続搬送設備
3a:対象接続搬送設備
31:第1受渡位置
32:第2受渡位置
50:管理制御部
51:第1エリア制御部
52:第2エリア制御部
53:接続制御部
60:建物
70:フロア
90:搬送状況情報
91:予想搬送状況情報
92:重み情報
93:到着予定情報
94:搬入出状況情報
100:搬送システム
A1:第1エリア
A2:第2エリア
P:搬送経路
R1:全体経路
R2:部分経路
W:搬送物品
X1:出発地点
X2:目的地点
Claims (10)
- 複数の搬送物品を搬送する搬送システムであって、
複数の搬送経路を形成する第1エリア内搬送設備が設けられた第1エリアと、
前記第1エリア内搬送設備を制御し、前記搬送物品を、前記第1エリア内の複数の前記搬送経路の中から選択した経路に従って搬送する第1エリア制御部と、
複数の搬送経路を形成する第2エリア内搬送設備が設けられた第2エリアと、
前記第2エリア内搬送設備を制御し、前記搬送物品を、前記第2エリア内の複数の前記搬送経路の中から選択した経路に従って搬送する第2エリア制御部と、
前記第1エリア内に設けられた第1受渡位置と前記第2エリア内に設けられた第2受渡位置とを接続する搬送経路をそれぞれ形成する複数の接続搬送設備と、
複数の前記接続搬送設備のそれぞれを制御し、前記搬送物品を、前記第1受渡位置と前記第2受渡位置との間で搬送する接続制御部と、
前記第1エリア制御部、前記第2エリア制御部、及び前記接続制御部を管理する管理制御部と、を備え、
複数の前記搬送物品のうちの1つを対象物品とし、残りを他物品として、
前記第1エリア内の出発地点から前記第2エリア内の目的地点まで前記対象物品を搬送するエリア間搬送を行う場合、前記管理制御部が経路設定制御を実行し、前記第1エリア制御部が第1エリア内搬送制御を実行し、前記接続制御部が接続搬送制御を実行し、前記第2エリア制御部が第2エリア内搬送制御を実行し、
前記経路設定制御は、前記第1エリア内搬送設備、前記第2エリア内搬送設備、及び、複数の前記接続搬送設備のそれぞれにおける前記他物品の搬送状況を示す搬送状況情報を取得し、当該搬送状況情報に基づいて前記出発地点から前記目的地点までの全体経路を設定する制御であり、
複数の前記接続搬送設備のうちの前記全体経路に含まれるものを対象接続搬送設備として、
前記第1エリア内搬送制御は、前記出発地点から前記対象接続搬送設備の前記第1受渡位置まで前記対象物品を搬送するように、前記第1エリア内搬送設備を動作させる制御であり、
前記接続搬送制御は、前記対象接続搬送設備の前記第1受渡位置から前記第2受渡位置まで前記対象物品を搬送するように、前記対象接続搬送設備を動作させる制御であり、
前記第2エリア内搬送制御は、前記全体経路が設定された後に前記第2エリア内搬送設備の前記搬送状況情報を取得し、当該搬送状況情報に基づいて前記対象接続搬送設備の前記第2受渡位置から前記目的地点までの部分経路を設定し、当該部分経路に従って、前記対象接続搬送設備の前記第2受渡位置から前記目的地点まで前記対象物品を搬送するように、前記第2エリア内搬送設備を動作させる制御であり、
前記接続制御部は、前記接続搬送制御の実行による前記対象物品の前記第2受渡位置への到着前に、前記対象物品の前記第2受渡位置への到着予定を示す到着予定情報を前記第2エリア制御部に伝達し、
前記第2エリア制御部は、前記到着予定情報に基づいて、前記第2エリア内搬送制御の準備を開始し、
前記第2エリア内搬送設備は、搬送車によって前記搬送物品を搬送する設備であり、
前記第2エリア内搬送制御の前記準備は、前記搬送物品を保持していない状態の前記搬送車を前記第2受渡位置に配置することであり、
前記第2エリア制御部は、前記対象物品の前記第2受渡位置への到着に合わせて或いはそれ以前に前記搬送車が前記第2受渡位置に配置されるように、前記搬送車の走行動作を制御する、搬送システム。 - 複数の前記接続搬送設備のそれぞれが、複数の前記第2受渡位置を備え、
前記接続制御部は、前記対象接続搬送設備が備える複数の前記第2受渡位置のそれぞれにおける前記他物品の搬入出状況を示す搬入出状況情報を取得し、当該搬入出状況情報に基づいて、前記接続搬送制御による前記対象物品の搬送先を複数の前記第2受渡位置の中から選択する、請求項1に記載の搬送システム。 - 前記経路設定制御では、前記第1エリア内搬送設備及び前記第2エリア内搬送設備のそれぞれにおける、各搬送経路の重みを示す重み情報を更に取得し、当該重み情報にも基づいて前記全体経路を設定する、請求項1又は2に記載の搬送システム。
- 前記経路設定制御では、複数の前記接続搬送設備のそれぞれにおける前記重み情報を更に取得し、当該重み情報にも基づいて前記全体経路を設定する、請求項3に記載の搬送システム。
- 前記経路設定制御では、前記第1エリア内搬送設備及び前記第2エリア内搬送設備のそれぞれにおける、過去の前記搬送状況情報に基づいて予想される将来の前記他物品の搬送状況を示す予想搬送状況情報を更に取得し、当該予想搬送状況情報にも基づいて前記全体経路を設定する、請求項1から4のいずれか一項に記載の搬送システム。
- 前記経路設定制御では、複数の前記接続搬送設備のそれぞれにおける前記予想搬送状況情報を更に取得し、当該予想搬送状況情報にも基づいて前記全体経路を設定する、請求項5に記載の搬送システム。
- 前記経路設定制御では、前記対象物品を前記出発地点から前記目的地点まで搬送するのに要する所要時間の予測値が最短となる経路を前記全体経路に設定する、請求項1から6のいずれか一項に記載の搬送システム。
- 前記第1エリアと前記第2エリアとは、同じ建物における異なるフロアに分かれて設定され、
前記接続搬送設備は、前記搬送物品を同じ建物における異なるフロア間で搬送する階間搬送設備である、請求項1から7のいずれか一項に記載の搬送システム。 - 前記第1エリアと前記第2エリアとは、異なる建物に分かれて設定され、
前記接続搬送設備は、前記搬送物品を異なる建物間で搬送する建物間搬送設備である、請求項1から7のいずれか一項に記載の搬送システム。 - 前記第1受渡位置では、前記第1エリア内搬送設備と前記接続搬送設備との間で前記搬送物品が移載され、前記第2受渡位置では、前記第2エリア内搬送設備と前記接続搬送設備との間で前記搬送物品が移載される、請求項1から9のいずれか一項に記載の搬送システム。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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JP2020177321A JP7409284B2 (ja) | 2020-10-22 | 2020-10-22 | 搬送システム |
TW110138401A TW202223570A (zh) | 2020-10-22 | 2021-10-15 | 搬送系統 |
US17/505,975 US12111636B2 (en) | 2020-10-22 | 2021-10-20 | Transport system |
KR1020210140036A KR20220053489A (ko) | 2020-10-22 | 2021-10-20 | 반송 시스템 |
CN202111234127.6A CN114379972A (zh) | 2020-10-22 | 2021-10-22 | 输送系统 |
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JP2020177321A JP7409284B2 (ja) | 2020-10-22 | 2020-10-22 | 搬送システム |
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JP2022068568A JP2022068568A (ja) | 2022-05-10 |
JP7409284B2 true JP7409284B2 (ja) | 2024-01-09 |
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US (1) | US12111636B2 (ja) |
JP (1) | JP7409284B2 (ja) |
KR (1) | KR20220053489A (ja) |
CN (1) | CN114379972A (ja) |
TW (1) | TW202223570A (ja) |
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EP4257406A3 (en) * | 2019-02-01 | 2023-12-20 | Crown Equipment Corporation | On-board charging station for a remote control device |
US11641121B2 (en) | 2019-02-01 | 2023-05-02 | Crown Equipment Corporation | On-board charging station for a remote control device |
TWI828512B (zh) * | 2023-01-10 | 2024-01-01 | 力晶積成電子製造股份有限公司 | 搬運排程方法及裝置 |
Citations (5)
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JP2007257154A (ja) | 2006-03-22 | 2007-10-04 | Asyst Shinko Inc | 搬送車管理装置、搬送車管理システム、搬送車管理方法及び搬送車管理プログラム |
JP2009288976A (ja) | 2008-05-28 | 2009-12-10 | Ihi Corp | 無人搬送装置とその搬送経路決定方法 |
JP2018039592A (ja) | 2016-09-05 | 2018-03-15 | 株式会社リコー | 情報処理装置、情報処理システム、移動経路決定方法及びプログラム |
WO2018225435A1 (ja) | 2017-06-06 | 2018-12-13 | 村田機械株式会社 | 階間搬送システム及び階間搬送方法 |
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