JP7406774B2 - 窒化物半導体トランジスタ装置 - Google Patents
窒化物半導体トランジスタ装置 Download PDFInfo
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- JP7406774B2 JP7406774B2 JP2022061989A JP2022061989A JP7406774B2 JP 7406774 B2 JP7406774 B2 JP 7406774B2 JP 2022061989 A JP2022061989 A JP 2022061989A JP 2022061989 A JP2022061989 A JP 2022061989A JP 7406774 B2 JP7406774 B2 JP 7406774B2
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- 239000004065 semiconductor Substances 0.000 title claims description 101
- 150000004767 nitrides Chemical class 0.000 title claims description 86
- 238000003860 storage Methods 0.000 claims description 133
- 239000003990 capacitor Substances 0.000 claims description 46
- 239000000758 substrate Substances 0.000 claims description 20
- 230000008878 coupling Effects 0.000 claims description 19
- 238000010168 coupling process Methods 0.000 claims description 19
- 238000005859 coupling reaction Methods 0.000 claims description 19
- 238000002955 isolation Methods 0.000 claims description 18
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 5
- 230000000903 blocking effect Effects 0.000 claims description 2
- 238000002347 injection Methods 0.000 claims 2
- 239000007924 injection Substances 0.000 claims 2
- 230000005641 tunneling Effects 0.000 claims 1
- 229910002704 AlGaN Inorganic materials 0.000 description 74
- 108091006146 Channels Proteins 0.000 description 49
- 239000002772 conduction electron Substances 0.000 description 18
- 238000010586 diagram Methods 0.000 description 17
- 239000000463 material Substances 0.000 description 15
- 238000005530 etching Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 11
- 229910052751 metal Inorganic materials 0.000 description 10
- 239000002184 metal Substances 0.000 description 10
- 238000009825 accumulation Methods 0.000 description 8
- 230000010287 polarization Effects 0.000 description 8
- 230000005684 electric field Effects 0.000 description 6
- 238000007667 floating Methods 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 238000005468 ion implantation Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 230000000415 inactivating effect Effects 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 238000005381 potential energy Methods 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
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Description
図4に示した本願の第2の発明では、第1のゲート電極107は素子活性領域に設けられている。このため、図1(a)に示した本願第1の発明に比べ、ソース電極108とドレイン電極109の間の距離が長くなり、オン抵抗などのスイッチとしての性能は及ばない。一方、第1のゲート電極が電荷蓄積用ゲート電極106のドレイン電極109側に設けられているため、スイッチの待機状態においてドレイン電極109に大電圧が印加されても、該電圧の殆どが第1のゲート電圧にかかり、第1のゲート電極107と電荷蓄積用ゲート電極106との間の電圧降下は小さく抑えられる。このため電荷蓄積用ゲート電極106のドレイン側エッジにおける電界の集中を緩和することができ、電荷蓄積用ゲート電極106とAlGaN層104との間に局所的に過大な電位差が生じるのを抑えられ、電荷蓄積用ゲート電極106内の蓄積電荷118がより放出され難くなり、閾値の経時変化を抑えられる。
Claims (10)
- 基板と、前記基板上に設けられた第1の窒化物半導体層と、前記第1の窒化物半導体層上に設けられ、前記第1の窒化物半導体層の少なくとも一部の窒化物半導体よりバンドギャップの大きい窒化物半導体を少なくとも含む第2の窒化物半導体層と、前記第2の窒化物半導体層上に設けられた第1の絶縁膜と、前記第1の絶縁膜上に設けられた電荷蓄積用ゲート電極と、前記電荷蓄積用ゲート電極上に設けられた第2の絶縁膜と、前記第2の絶縁膜上に設けられた第2のゲート電極と、面方向に前記電荷蓄積用ゲート電極を挟んで設けられたソース電極およびドレイン電極と、前記基板上に設けられた電気的に不活性な素子分離領域と、前記電荷蓄積用ゲート電極と絶縁膜を介して容量結合することにより第1の容量を形成する第1のゲート電極とを有し、前記第1の窒化物半導体層と前記第2の窒化物半導体層との界面に導電チャネルが形成され、前記ソース電極と前記電荷蓄積用ゲート電極との間は前記導電チャネルで電気的に接続され、前記ドレイン電極と前記電荷蓄積用ゲート電極との間は前記導電チャネルで電気的に接続され、前記第2のゲート電極に印加する電圧或は前記第2のゲート電極と前記第1のゲート電極に同時に印加する電圧で前記導電チャネルを介し前記ソース電極と前記ドレイン電極との間に流れる電流を遮断する閾値電圧を調節するために、前記電荷蓄積用ゲート電極に電荷が蓄積され、前記電荷は前記第1のゲート電極から前記第1の容量を介して電子注入することにより前記電荷蓄積用ゲート電極に蓄積され、前記電子注入は前記第1のゲート電極の電位を前記第2のゲート電極の電位より低くすることにより行われることを特徴とする窒化物半導体トランジスタ装置。
- 前記第1のゲート電極が前記素子分離領域上に設けられたことを特徴とする請求項1に記載の窒化物半導体トランジスタ装置。
- 少なくともその一部が前記素子分離領域上に形成された第3の絶縁膜を有し、前記電荷蓄積用ゲート電極は前記素子分離領域に存在する前記第1のゲート電極に延在し前記第3の絶縁膜を容量結合膜として前記第1のゲート電極との間に前記第1の容量を形成することを特徴とする請求項2に記載の窒化物半導体トランジスタ装置。
- 前記第1の容量は前記第3の絶縁膜を容量結合膜として前記第1のゲート電極と前記電荷蓄積用ゲート電極が形成する凸形状のエッジ部を少なくとも含み、前記電荷蓄積用ゲート電極への電子注入が前記凸形状のエッジ部におけるトンネルにより行われること特徴とする請求項3に記載の窒化物半導体トランジスタ装置。
- 前記第3の絶縁膜の少なくとも一部は前記第1のゲート電極の上面と側面を覆うように形成されており、前記電荷蓄積用ゲート電極は前記第3の絶縁膜の前記第1のゲート電極の上面と側面を覆うように形成された部分を少なくとも容量結合膜として含むように前記第1のゲート電極の上面から側面に渡って重なるように設けられたことにより前記凸形状のエッジ部が前記第1の容量に含まれることを特徴とする請求項4に記載の窒化物半導体トランジスタ装置。
- 前記第2のゲート電極に印加する電圧或は前記第2のゲート電極および前記第1のゲート電極に同時に印加する電圧の前記閾値電圧が正の値となるように前記電荷蓄積用ゲート電極に蓄積する前記電荷が調節されることを特徴とする請求項1に記載の窒化物半導体トランジスタ装置。
- 前記電荷蓄積用ゲート電極と電荷蓄積用ゲート電極直下の前記導電チャネルの間に前記第1の絶縁膜を介して第3の容量が形成され、前記電荷蓄積用ゲート電極と前記第2のゲート電極の間に前記第2の絶縁膜を介して第2の容量が形成され、前記第2の容量の容量値もしくは前記第1の容量の容量値と前記第2の容量の容量値の和を前記第3の容量の容量値より大きくしたことを特徴とする請求項1に記載の窒化物半導体トランジスタ装置。
- 前記第1の窒化物半導体層がGaNで構成されており、前記第2の窒化物半導体層がAlxGa1-xN(0<x≦1)で構成されていることを特徴とする請求項1乃至7のいずれか一項に記載の窒化物半導体トランジスタ装置。
- 前記第1の絶縁膜の少なくとも最下層が酸化アルミニウムで構成されていることを特徴とする請求項1乃至7のいずれか一項に記載の窒化物半導体トランジスタ装置。
- 前記第1のゲート電極は前記第2の窒化物半導体層上に設けられ、前記第1のゲート電極の上面と側面を覆うように第3の絶縁膜が形成され、前記第1の容量は前記電荷蓄積用ゲート電極が前記第1のゲート電極に延在し前記第3の絶縁膜を容量結合膜として前記第1のゲート電極の上面から側面に渡って覆うように設けられることにより形成されたことを特徴とする請求項1に記載の窒化物半導体トランジスタ装置。
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JP2011192944A (ja) | 2010-03-17 | 2011-09-29 | Renesas Electronics Corp | 半導体装置及び半導体装置の動作方法 |
JP2015211103A (ja) | 2014-04-25 | 2015-11-24 | 株式会社デンソー | 半導体装置およびその製造方法 |
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US20170194474A1 (en) | 2016-01-06 | 2017-07-06 | Riichiro Shirota | Nitride Semiconductor Transistor Device |
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