JP7404400B2 - 平面コイルおよびこれを備える半導体製造装置 - Google Patents
平面コイルおよびこれを備える半導体製造装置 Download PDFInfo
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- JP7404400B2 JP7404400B2 JP2021574127A JP2021574127A JP7404400B2 JP 7404400 B2 JP7404400 B2 JP 7404400B2 JP 2021574127 A JP2021574127 A JP 2021574127A JP 2021574127 A JP2021574127 A JP 2021574127A JP 7404400 B2 JP7404400 B2 JP 7404400B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 239000004065 semiconductor Substances 0.000 title claims description 14
- 239000010410 layer Substances 0.000 claims description 113
- 239000002923 metal particle Substances 0.000 claims description 93
- 229910052751 metal Inorganic materials 0.000 claims description 73
- 239000002184 metal Substances 0.000 claims description 73
- 239000004020 conductor Substances 0.000 claims description 58
- 239000010409 thin film Substances 0.000 claims description 56
- 239000002245 particle Substances 0.000 claims description 39
- 239000011241 protective layer Substances 0.000 claims description 25
- 239000000919 ceramic Substances 0.000 claims description 21
- 229920005989 resin Polymers 0.000 claims description 18
- 239000011347 resin Substances 0.000 claims description 18
- 239000011810 insulating material Substances 0.000 claims description 15
- 239000011800 void material Substances 0.000 claims description 7
- 239000012790 adhesive layer Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 description 19
- 238000000034 method Methods 0.000 description 15
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical group [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 10
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 9
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- 230000017525 heat dissipation Effects 0.000 description 7
- 229920001721 polyimide Polymers 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 239000011230 binding agent Substances 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 239000011737 fluorine Substances 0.000 description 5
- 229910052731 fluorine Inorganic materials 0.000 description 5
- 230000005389 magnetism Effects 0.000 description 5
- 239000010935 stainless steel Substances 0.000 description 5
- 229910001220 stainless steel Inorganic materials 0.000 description 5
- 239000004642 Polyimide Substances 0.000 description 4
- 230000005611 electricity Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 239000011224 oxide ceramic Substances 0.000 description 4
- 229910052574 oxide ceramic Inorganic materials 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 4
- 229910010271 silicon carbide Inorganic materials 0.000 description 4
- 238000007088 Archimedes method Methods 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 229910052742 iron Chemical group 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 3
- 229920001296 polysiloxane Polymers 0.000 description 3
- 229920002050 silicone resin Polymers 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 229910000531 Co alloy Inorganic materials 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- QVYYOKWPCQYKEY-UHFFFAOYSA-N [Fe].[Co] Chemical compound [Fe].[Co] QVYYOKWPCQYKEY-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 150000001408 amides Chemical class 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 229910052878 cordierite Inorganic materials 0.000 description 2
- JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 description 2
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052863 mullite Inorganic materials 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229920002647 polyamide Polymers 0.000 description 2
- 239000009719 polyimide resin Substances 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- XWHPIFXRKKHEKR-UHFFFAOYSA-N iron silicon Chemical compound [Si].[Fe] XWHPIFXRKKHEKR-UHFFFAOYSA-N 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000004876 x-ray fluorescence Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/288—Shielding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F5/00—Coils
- H01F5/003—Printed circuit coils
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/2804—Printed windings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/2876—Cooling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/30—Fastening or clamping coils, windings, or parts thereof together; Fastening or mounting coils or windings on core, casing, or other support
- H01F27/306—Fastening or mounting coils or windings on core, casing or other support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F38/00—Adaptations of transformers or inductances for specific applications or functions
- H01F38/14—Inductive couplings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/041—Printed circuit coils
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F5/00—Coils
- H01F5/06—Insulation of windings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
- H01J37/3211—Antennas, e.g. particular shapes of coils
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Coils Or Transformers For Communication (AREA)
Description
2:金属層
2a:貫通穴
2b:薄膜コイル導体
2c:遮蔽層
3、3a:空隙
4、4a:第1金属粒子
4b:第1遮蔽粒子
5、5a:第2金属粒子
5b:第2遮蔽粒子
7a、7b:溶着部
8:第1の固定具
8a、8b:端部
8c:鍔
9:接着層
10、20、30、40、50、60:平面コイル
11:保護層
11a:鍔
12:第2の固定具
12a:外周
400:半導体製造装置
Claims (19)
- 第1面を有する基体と、
前記第1面の上に位置し、貫通穴を有する金属層と、
前記貫通穴に挿通され、前記金属層を前記基体の第1面側に固定する第1の固定具と、
を有し、
前記金属層は、渦巻状または螺旋状のコイルであり、第1金属粒子および第2金属粒子を有し、前記第1金属粒子と前記第2金属粒子との間に位置する複数の空隙を有する、
平面コイル。 - 前記金属層は、前記貫通穴を複数有し、
複数の前記貫通穴のそれぞれに挿通される複数の前記第1の固定具を備える、請求項1に記載の平面コイル。 - 前記基体に凹部があって、該凹部内に前記第1の固定具の一方の端部がある、請求項1または請求項2に記載の平面コイル。
- 前記凹部内に、接着層を有する、請求項3に記載の平面コイル。
- 前記第1の固定具と前記貫通穴の間に、保護層を有する、請求項1~4のいずれか1つに記載の平面コイル。
- 前記保護層が絶縁材である、請求項5に記載の平面コイル。
- 前記保護層が樹脂である、請求項5または請求項6に記載の平面コイル。
- 前記金属層から露出する前記保護層の端部に鍔がある、請求項7に記載の平面コイル。
- 前記第1の固定具の他方の端部に鍔がある、請求項1~8のいずれか1つに記載の平面コイル。
- 前記第1の固定具と前記貫通穴の間に、保護層を有し、
前記第1の固定具の鍔と、前記金属層または前記保護層の間に、第2の固定具を有し、該第2の固定具の外周は、第1の固定具の鍔よりも外側である、請求項9に記載の平面コイル。 - 前記第2の固定具が絶縁材である、請求項10に記載の平面コイル。
- 前記金属層は、前記第1面の上に複数の薄膜コイル導体をその厚み方向に遮蔽層を介し重ねて多層化して構成され、
前記薄膜コイル導体は空隙を有する、
請求項1~11のいずれか1つに記載の平面コイル。 - 前記薄膜コイル導体は、第1金属粒子と、第2金属粒子と、を有しており、
前記空隙は、前記第1金属粒子と前記第2金属粒子との間に位置する、請求項12に記載の平面コイル。 - 前記薄膜コイル導体は、さらに第3金属粒子を有しており、
前記薄膜コイル導体は、前記第1金属粒子と、前記第3金属粒子との間に溶着部を有している、請求項13に記載の平面コイル。 - 前記薄膜コイル導体は、前記遮蔽層よりも厚みが厚い、請求項12~14のいずれか1つに記載の平面コイル。
- 前記遮蔽層は空隙を有している、請求項12~15のいずれか1つに記載の平面コイル。
- 前記遮蔽層は、第1遮蔽粒子と、第2遮蔽粒子と、を有しており、
前記空隙は、前記第1遮蔽粒子と前記第2遮蔽粒子との間に位置する、請求項16に記載の平面コイル。 - 前記第1の固定具が絶縁材であってセラミックスである、請求項1~17のいずれか1つに記載の平面コイル。
- 請求項1~18のいずれか1つに記載の平面コイルを、高周波電力用アンテナとして用いる、半導体製造装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020011717 | 2020-01-28 | ||
JP2020011717 | 2020-01-28 | ||
PCT/JP2021/003116 WO2021153697A1 (ja) | 2020-01-28 | 2021-01-28 | 平面コイルおよびこれを備える半導体製造装置 |
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JPWO2021153697A1 JPWO2021153697A1 (ja) | 2021-08-05 |
JP7404400B2 true JP7404400B2 (ja) | 2023-12-25 |
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Country Status (3)
Country | Link |
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US (1) | US20230055987A1 (ja) |
JP (1) | JP7404400B2 (ja) |
WO (1) | WO2021153697A1 (ja) |
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WO2024053620A1 (ja) * | 2022-09-05 | 2024-03-14 | 大日本印刷株式会社 | コイル部品及びその製造方法、送電装置、受電装置、電力伝送システム、並びに移動体 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004108980A1 (ja) | 2003-06-02 | 2004-12-16 | Shincron Co., Ltd. | 薄膜形成装置及び薄膜形成方法 |
JP2005159301A (ja) | 2003-10-31 | 2005-06-16 | Murata Mfg Co Ltd | セラミック電子部品およびその製造方法 |
JP2019054117A (ja) | 2017-09-15 | 2019-04-04 | 日本特殊陶業株式会社 | 配線基板、及びプレーナトランス |
WO2021049270A1 (ja) | 2019-09-10 | 2021-03-18 | 京セラ株式会社 | 平面コイルおよびこれを備える変圧器、無線送電器、電磁石 |
JP2021163944A (ja) | 2020-04-03 | 2021-10-11 | 京セラ株式会社 | 平面コイルおよびこれを備える変圧器、無線送電器、電磁石 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08288463A (ja) * | 1995-04-18 | 1996-11-01 | Hitachi Ltd | ストリップ線路、インダクタ素子、およびモノリシックマイクロ波集積回路、ならびにこれらの製造方法 |
-
2021
- 2021-01-28 JP JP2021574127A patent/JP7404400B2/ja active Active
- 2021-01-28 US US17/795,365 patent/US20230055987A1/en active Pending
- 2021-01-28 WO PCT/JP2021/003116 patent/WO2021153697A1/ja active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004108980A1 (ja) | 2003-06-02 | 2004-12-16 | Shincron Co., Ltd. | 薄膜形成装置及び薄膜形成方法 |
JP2005159301A (ja) | 2003-10-31 | 2005-06-16 | Murata Mfg Co Ltd | セラミック電子部品およびその製造方法 |
JP2019054117A (ja) | 2017-09-15 | 2019-04-04 | 日本特殊陶業株式会社 | 配線基板、及びプレーナトランス |
WO2021049270A1 (ja) | 2019-09-10 | 2021-03-18 | 京セラ株式会社 | 平面コイルおよびこれを備える変圧器、無線送電器、電磁石 |
JP2021163944A (ja) | 2020-04-03 | 2021-10-11 | 京セラ株式会社 | 平面コイルおよびこれを備える変圧器、無線送電器、電磁石 |
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US20230055987A1 (en) | 2023-02-23 |
WO2021153697A1 (ja) | 2021-08-05 |
JPWO2021153697A1 (ja) | 2021-08-05 |
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