JP7383133B2 - 接合システム - Google Patents
接合システム Download PDFInfo
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- JP7383133B2 JP7383133B2 JP2022515280A JP2022515280A JP7383133B2 JP 7383133 B2 JP7383133 B2 JP 7383133B2 JP 2022515280 A JP2022515280 A JP 2022515280A JP 2022515280 A JP2022515280 A JP 2022515280A JP 7383133 B2 JP7383133 B2 JP 7383133B2
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- 238000005304 joining Methods 0.000 title claims description 31
- 239000000758 substrate Substances 0.000 claims description 316
- 230000032258 transport Effects 0.000 claims description 163
- 238000012545 processing Methods 0.000 claims description 103
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- 238000003860 storage Methods 0.000 claims description 69
- 238000012986 modification Methods 0.000 claims description 57
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- 239000004065 semiconductor Substances 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000008367 deionised water Substances 0.000 description 3
- 229910021641 deionized water Inorganic materials 0.000 description 3
- 230000014509 gene expression Effects 0.000 description 3
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 229910052681 coesite Inorganic materials 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
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- 238000001514 detection method Methods 0.000 description 2
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- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000005411 Van der Waals force Methods 0.000 description 1
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- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
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- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
- H01L21/44—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/38 - H01L21/428
- H01L21/447—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/38 - H01L21/428 involving the application of pressure, e.g. thermo-compression bonding
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Description
まず、実施形態に係る接合システムの構成について図1~図3を参照して説明する。図1および図2は、実施形態に係る接合システムの構成を示す模式平面図である。
搬入出ブロック2は、載置台10と、搬送エリア20とを備える。載置台10は、複数の載置板11a~11dを備える。載置板11a~11dには、複数枚(たとえば、25枚)の基板を水平状態で収容可能なカセットC1~C4がそれぞれ載置される。カセットC1は第1基板W1を収容するカセットであり、カセットC2は第2基板W2を収容するカセットであり、カセットC3は重合基板Tを収容するカセットである。また、カセットC4は、たとえば、不具合が生じた基板を回収するためのカセットである。
処理ブロック3(第1処理ブロック3aおよび第2処理ブロック3b)は、X軸方向に沿って延在する搬送エリア3cと、搬送エリア3cを挟んで配置される2つの処理エリア3d,3eを備える。処理エリア3dは、搬送エリア3cのY軸正方向側に配置され、処理エリア3eは、搬送エリア3cのY軸負方向側に配置される。処理ブロック3は、下層および上層の2層構造を有するが、この点については後述する。
第1処理ブロック3aは、搬入出ブロック2の搬送エリア20に隣接する。第1処理ブロック3aの搬送エリア3cには、第1積層部31と、第2搬送装置32と、第2積層部33とが配置される。第1積層部31、第2搬送装置32および第2積層部33は、X軸正方向に沿って、第1積層部31、第2搬送装置32および第2積層部33の順番に並べられる。
第2処理ブロック3bは、第1処理ブロック3aの第2積層部33に隣接する。第2処理ブロック3bの搬送エリア3cには、第4搬送装置37と、第3仮置部38aと、第4仮置部38bとが配置される。
また、接合システム1は、制御装置70を備える。制御装置70は、接合システム1の動作を制御する。かかる制御装置70は、たとえばコンピュータであり、図示しない制御部および記憶部を備える。制御部は、CPU(Central Processing Unit)、ROM(Read Only Memory)、RAM(Random Access Memory)、入出力ポートなどを有するマイクロコンピュータや各種の回路を含む。かかるマイクロコンピュータのCPUは、ROMに記憶されているプログラムを読み出して実行することにより、後述する制御を実現する。また、記憶部は、たとえば、RAM、フラッシュメモリ(Flash Memory)等の半導体メモリ素子、または、ハードディスク、光ディスク等の記憶装置によって実現される。
次に、実施形態に係るロードロック室31dの具体的な構成例について図6~図9を参照して説明する。図6は、実施形態に係るロードロック室31dの平面図である。図7は、実施形態に係るロードロック室31dを第1搬送装置22のアクセス方向から見た側面図である。図8は、実施形態に係るロードロック室31dを第2搬送装置32のアクセス方向から見た側面図である。図9は、実施形態に係るロードロック室31dを第3搬送装置34のアクセス方向から見た側面図である。
次に、実施形態に係る接合システム1の具体的な動作について図10を参照して説明する。図10は、実施形態に係る接合システム1における第1基板W1、第2基板W2および重合基板Tの搬送手順を示すフローチャートである。図10に示す搬送処理および搬送先にて行われる各種の処理は、制御装置70による制御に基づいて実行される。
接合システム1は、第1基板W1および第2基板W2の検査を行う検査装置をさらに備えていてもよい。検査装置は、たとえば第1基板W1および第2基板W2の接合面におけるパーティクルの有無等を検査する。
上述した実施形態では、処理ブロック3が第1処理ブロック3aと第2処理ブロック3bとに分割される場合の例について説明したが、処理ブロック3は、必ずしも分割されることを要しない。処理ブロック3が分割されない場合の例について図14を参照して説明する。図14は、第2変形例に係る接合システムの構成を示す模式平面図である。
2 :搬入出ブロック
3 :処理ブロック
3a :第1処理ブロック
3b :第2処理ブロック
10 :載置台
11a :載置板
11b :載置板
11c :載置板
11d :載置板
22 :第1搬送装置
31 :第1積層部
31a :読取部
31b :第1仮置部
31c :第1受渡部
31d :ロードロック室
32 :第2搬送装置
33 :第2積層部
33a :第2仮置部
33b :第2受渡部
33c :第3受渡部
33d :第2アライメント部
33e :第1アライメント部
34 :第3搬送装置
35 :表面改質装置
36 :表面改質装置
37 :第4搬送装置
38a :第3仮置部
38b :第4仮置部
39 :接合装置
39a :第1温調板
39b :第2温調板
40 :接合装置
101~105:ゲートバルブ
311 :第1収容部
312 :第2収容部
Claims (14)
- 第1基板および第2基板を分子間力により接合することによって重合基板を形成する接合システムであって、
カセットが載置される載置台を有する搬入出ブロックと、
前記第1基板および前記第2基板の接合される表面を減圧雰囲気にて改質する表面改質装置と、改質された前記第1基板および前記第2基板の表面を親水化する表面親水化装置とが配置される処理ブロックと、
常圧雰囲気において前記第1基板および前記第2基板を搬送する第1搬送装置および第2搬送装置と、
前記減圧雰囲気において前記第1基板および前記第2基板を搬送する第3搬送装置と、
前記第1基板および前記第2基板を収容可能な収容部を有し、前記収容部を前記常圧雰囲気と前記減圧雰囲気との間で切り替え可能なロードロック室と、
前記ロードロック室の異なる3つの側面にそれぞれ設けられ、前記ロードロック室を開閉可能な複数のゲートと
を備え、
前記第1搬送装置は、前記搬入出ブロックに配置され、前記カセットから前記ロードロック室への前記第1基板および前記第2基板の搬送を行い、
前記第3搬送装置は、前記処理ブロックに配置され、前記ロードロック室から前記表面改質装置への前記第1基板および前記第2基板の搬送を行い、
前記第2搬送装置は、前記処理ブロックに配置され、前記ロードロック室から前記表面親水化装置への前記第1基板および前記第2基板の搬送を行い、
前記第1搬送装置、前記第2搬送装置および前記第3搬送装置は、前記複数のゲートのうちそれぞれ異なるゲートを介して前記ロードロック室に対する前記第1基板および前記第2基板の搬入出を行う、接合システム。 - 前記ロードロック室は、前記第1搬送装置と前記第2搬送装置との間に配置される、請求項1に記載の接合システム。
- 前記収容部は、
前記第1搬送装置によってアクセスされる第1収容部と、
前記第1収容部の上部または下部に配置され、前記第1収容部と独立して前記常圧雰囲気と前記減圧雰囲気との間で切り替え可能であり、前記第2搬送装置によってアクセスされる第2収容部と
を備える、請求項1または2に記載の接合システム。 - 平面視において、2つの前記第3搬送装置、2つの前記表面改質装置、2つの前記ロードロック室が、前記搬入出ブロックおよび前記処理ブロックの並び方向に沿った直線であって、前記第2搬送装置を通る前記直線に対して対称に配置される、請求項1に記載の接合システム。
- 2つの前記ロードロック室は、前記搬入出ブロック、2つの前記第3搬送装置および前記第2搬送装置によって囲まれる領域に配置される、請求項4に記載の接合システム。
- 前記ロードロック室は、平面視において、前記異なる3つの側面を含む4つの側面からなる形状が台形状である、請求項5に記載の接合システム。
- 前記処理ブロックは、前記搬入出ブロックと前記第2搬送装置との間に、複数のモジュールが積層された積層部
を備え、
前記ロードロック室は、前記積層部に配置される、請求項1に記載の接合システム。 - 前記複数のモジュールは、前記重合基板の前記第2搬送装置から前記第1搬送装置への受け渡しが行われる第1受渡部、前記第1基板および前記第2基板の仮置部、前記第1基板および前記第2基板に付された識別情報を読み取る読取部の少なくとも1つを含む、請求項7に記載の接合システム。
- 前記表面親水化装置は、前記表面改質装置の上部または下部に配置される、請求項1に記載の接合システム。
- 前記第1基板および前記第2基板の検査を行う検査装置
を備え、
前記検査装置は、前記処理ブロックにおいて、前記表面改質装置および前記表面親水化装置とともに積層される、請求項9に記載の接合システム。 - 親水化された前記第1基板と前記第2基板とを分子間力により接合する接合装置
を備え、
前記接合装置は、前記処理ブロックに配置される、請求項1に記載の接合システム。 - 前記処理ブロックは、
前記搬入出ブロックに隣接し、前記第2搬送装置、前記第3搬送装置、前記表面改質装置および前記表面親水化装置が配置される第1処理ブロックと、
前記第1処理ブロックに隣接する第2処理ブロックと
を備え、
前記接合装置は、前記第2処理ブロックに配置される、請求項11に記載の接合システム。 - 前記第1処理ブロックは、
前記第2搬送装置と前記第2処理ブロックとの間に第2受渡部
を備え、
前記第2処理ブロックは、
前記第2搬送装置によって前記第2受渡部に載置された前記第1基板および前記第2基板を前記接合装置へ搬送する第4搬送装置
を備える、請求項12に記載の接合システム。 - 前記第1基板、前記第2基板および前記重合基板のうち少なくとも1つの検査を行う検査装置
を備え、
前記検査装置は、前記第2処理ブロックにおいて、前記接合装置の上部または下部に配置される、請求項13に記載の接合システム。
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