JP7365665B2 - 超音波センサ - Google Patents
超音波センサ Download PDFInfo
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- JP7365665B2 JP7365665B2 JP2019088954A JP2019088954A JP7365665B2 JP 7365665 B2 JP7365665 B2 JP 7365665B2 JP 2019088954 A JP2019088954 A JP 2019088954A JP 2019088954 A JP2019088954 A JP 2019088954A JP 7365665 B2 JP7365665 B2 JP 7365665B2
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- 230000035945 sensitivity Effects 0.000 claims description 83
- 239000000919 ceramic Substances 0.000 claims description 30
- 239000000463 material Substances 0.000 claims description 30
- 230000001902 propagating effect Effects 0.000 claims description 19
- 239000003513 alkali Substances 0.000 claims description 14
- 229920005989 resin Polymers 0.000 claims description 9
- 239000011347 resin Substances 0.000 claims description 9
- 229920001971 elastomer Polymers 0.000 claims description 4
- 230000005484 gravity Effects 0.000 claims description 4
- 239000011796 hollow space material Substances 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 114
- 230000005540 biological transmission Effects 0.000 description 44
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 36
- 230000000052 comparative effect Effects 0.000 description 24
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 21
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 10
- 239000000203 mixture Substances 0.000 description 9
- 238000005192 partition Methods 0.000 description 9
- 239000003822 epoxy resin Substances 0.000 description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 229920000647 polyepoxide Polymers 0.000 description 8
- 239000011358 absorbing material Substances 0.000 description 7
- 229910001220 stainless steel Inorganic materials 0.000 description 7
- 239000010935 stainless steel Substances 0.000 description 7
- 239000010955 niobium Substances 0.000 description 6
- 239000011734 sodium Substances 0.000 description 6
- 238000005476 soldering Methods 0.000 description 6
- 230000004308 accommodation Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 150000002611 lead compounds Chemical class 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000000843 powder Substances 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 229910052797 bismuth Inorganic materials 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229920006332 epoxy adhesive Polymers 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- 229910052783 alkali metal Inorganic materials 0.000 description 2
- 150000001340 alkali metals Chemical class 0.000 description 2
- 239000011324 bead Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- 239000011268 mixed slurry Substances 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- 239000011591 potassium Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000002250 progressing effect Effects 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 229920002050 silicone resin Polymers 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- XECAHXYUAAWDEL-UHFFFAOYSA-N acrylonitrile butadiene styrene Chemical compound C=CC=C.C=CC#N.C=CC1=CC=CC=C1 XECAHXYUAAWDEL-UHFFFAOYSA-N 0.000 description 1
- 239000004676 acrylonitrile butadiene styrene Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- -1 calcium) Chemical class 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000008821 health effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000002984 plastic foam Substances 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- BITYAPCSNKJESK-UHFFFAOYSA-N potassiosodium Chemical compound [Na].[K] BITYAPCSNKJESK-UHFFFAOYSA-N 0.000 description 1
- UKDIAJWKFXFVFG-UHFFFAOYSA-N potassium;oxido(dioxo)niobium Chemical compound [K+].[O-][Nb](=O)=O UKDIAJWKFXFVFG-UHFFFAOYSA-N 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- UYLYBEXRJGPQSH-UHFFFAOYSA-N sodium;oxido(dioxo)niobium Chemical compound [Na+].[O-][Nb](=O)=O UYLYBEXRJGPQSH-UHFFFAOYSA-N 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
- B06B1/0651—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element of circular shape
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8542—Alkali metal based oxides, e.g. lithium, sodium or potassium niobates
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Ceramic Engineering (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Description
{Lix(K1-yNay)1-x}(Nb1-zSbz)O3・・・(1)
{Lix(K1-yNay)1-x}a(Nb1-z-wTazSbw)O3・・・(2)
但し、上記組成式(2)において、0.90≦a≦1.2、0.02≦x≦0.2、0.2≦y≦0.8、0≦z≦0.5、0≦w≦0.2の組成範囲にあるものが圧電素子13として用いられる。また、上記組成式(2)において、BiやFeなどの金属元素を添加物として含ませることにより、圧電素子13を製造してもよい。
12…超音波センサとしての第2の超音波センサ
13…圧電素子
14…音響整合層
20…ケース
t…音響整合層の厚さ
W1…超音波
Claims (2)
- 超音波を送受信する円板状の圧電素子と、音響整合層とを備え、前記圧電素子をケースに収容した状態で、前記ケースに固定される超音波センサであって、
前記圧電素子は、ニオブ酸アルカリ系セラミックスからなり、機械的品質係数Qmが50以下、径方向の周波数定数Npが2800Hz・m以上、圧電定数d33が250pC/N以上であり、
前記音響整合層は、樹脂またはゴムに中空材または気泡を含ませた比重0.5以下の材料からなるとともに、前記圧電素子の外径寸法よりも大きい外径寸法を有しており、
前記圧電素子の径方向の共振周波数をfとし、前記音響整合層内を伝搬する縦波の音速をcとし、前記音響整合層内を伝搬する前記超音波の波長をλとし、前記音響整合層の厚さをtとしたとき、λ=c/fの関係を満たすとともに、tがλ/4の-16.0%以上-3.2%以下の範囲、または+8.0%以上+16.3%以下の範囲であり、
最大送受感度から6dB低減した送受感度での周波数の範囲を周波数帯域とし、前記周波数帯域における下限の周波数を下限周波数とし、前記周波数帯域における上限の周波数を上限周波数とし、前記下限周波数と前記上限周波数との中間値を中心周波数fmとし、前記下限周波数と前記上限周波数との差を周波数帯域幅Δfとし、前記周波数帯域幅Δfと前記中心周波数fmとの比を比帯域Δf/fmとしたとき、前記比帯域Δf/fmが15%以上である
ことを特徴とする超音波センサ。 - 前記圧電素子は、密度が4.4g/cm3±10%であることを特徴とする請求項1に記載の超音波センサ。
Priority Applications (2)
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---|---|---|---|
JP2019088954A JP7365665B2 (ja) | 2019-05-09 | 2019-05-09 | 超音波センサ |
EP20167543.6A EP3736051B1 (en) | 2019-05-09 | 2020-04-01 | Ultrasonic sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019088954A JP7365665B2 (ja) | 2019-05-09 | 2019-05-09 | 超音波センサ |
Publications (2)
Publication Number | Publication Date |
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JP2020184714A JP2020184714A (ja) | 2020-11-12 |
JP7365665B2 true JP7365665B2 (ja) | 2023-10-20 |
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JP2019088954A Active JP7365665B2 (ja) | 2019-05-09 | 2019-05-09 | 超音波センサ |
Country Status (2)
Country | Link |
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EP (1) | EP3736051B1 (ja) |
JP (1) | JP7365665B2 (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013055564A (ja) | 2011-09-06 | 2013-03-21 | Konica Minolta Holdings Inc | 圧電デバイスおよび超音波探触子 |
WO2014002286A1 (ja) | 2012-06-26 | 2014-01-03 | 本多電子株式会社 | 電気機械変換素子及びその製造方法 |
WO2014156015A1 (ja) | 2013-03-29 | 2014-10-02 | 日本特殊陶業株式会社 | 無鉛圧電磁器組成物、それを用いた圧電素子、装置、及び、無鉛圧電磁器組成物の製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5346411A (en) | 1976-10-12 | 1978-04-26 | Bikutoru Nikoraebuichi Karinsu | Vacuum arc heating device |
JPH09100156A (ja) | 1995-10-04 | 1997-04-15 | Nikon Corp | 誘電体磁器組成物 |
JP4857464B2 (ja) | 2000-12-21 | 2012-01-18 | 株式会社村田製作所 | 超音波センサ |
JP4134629B2 (ja) * | 2002-08-07 | 2008-08-20 | 松下電器産業株式会社 | 超音波送受波器およびそれを用いた超音波流量計 |
EP2726438B1 (de) | 2011-07-01 | 2018-05-30 | CeramTec GmbH | Verfahren zur herstellung eines piezokeramischen bleifreien werkstoffs |
JP2015019317A (ja) | 2013-07-12 | 2015-01-29 | 株式会社村田製作所 | 超音波センサおよび超音波流量計 |
JP6460387B2 (ja) | 2015-01-26 | 2019-01-30 | Tdk株式会社 | 圧電薄膜素子、圧電アクチュエータ、圧電センサ、並びにハードディスクドライブ、及びインクジェットプリンタ装置 |
-
2019
- 2019-05-09 JP JP2019088954A patent/JP7365665B2/ja active Active
-
2020
- 2020-04-01 EP EP20167543.6A patent/EP3736051B1/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013055564A (ja) | 2011-09-06 | 2013-03-21 | Konica Minolta Holdings Inc | 圧電デバイスおよび超音波探触子 |
WO2014002286A1 (ja) | 2012-06-26 | 2014-01-03 | 本多電子株式会社 | 電気機械変換素子及びその製造方法 |
WO2014156015A1 (ja) | 2013-03-29 | 2014-10-02 | 日本特殊陶業株式会社 | 無鉛圧電磁器組成物、それを用いた圧電素子、装置、及び、無鉛圧電磁器組成物の製造方法 |
Non-Patent Citations (1)
Title |
---|
FU, Jian et al.,"Phase transition characteristics and piezoelectric properties of compositionally optimized alkaline niobate based ceramics",Journal of alloys and Compounds,2009年11月03日,Volume 486, Issues 1-2,pp.790-794 |
Also Published As
Publication number | Publication date |
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EP3736051A1 (en) | 2020-11-11 |
JP2020184714A (ja) | 2020-11-12 |
EP3736051B1 (en) | 2022-09-28 |
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