JP7355817B2 - ブランクレチクル上の欠陥のタイプおよびサイズを判定するためのシステムおよび方法 - Google Patents

ブランクレチクル上の欠陥のタイプおよびサイズを判定するためのシステムおよび方法 Download PDF

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JP7355817B2
JP7355817B2 JP2021523881A JP2021523881A JP7355817B2 JP 7355817 B2 JP7355817 B2 JP 7355817B2 JP 2021523881 A JP2021523881 A JP 2021523881A JP 2021523881 A JP2021523881 A JP 2021523881A JP 7355817 B2 JP7355817 B2 JP 7355817B2
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defect
defects
image
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JP2022506485A (ja
JP2022506485A5 (https=
JPWO2020092856A5 (https=
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ラマプラサド クルカーニ
ゲー コング
ホウレン ファン
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KLA Corp
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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
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JP2021523881A 2018-11-02 2019-11-01 ブランクレチクル上の欠陥のタイプおよびサイズを判定するためのシステムおよび方法 Active JP7355817B2 (ja)

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Application Number Priority Date Filing Date Title
US201862754880P 2018-11-02 2018-11-02
US62/754,880 2018-11-02
US16/572,971 2019-09-17
US16/572,971 US11468553B2 (en) 2018-11-02 2019-09-17 System and method for determining type and size of defects on blank reticles
PCT/US2019/059291 WO2020092856A1 (en) 2018-11-02 2019-11-01 System and method for determining type and size of defects on blank reticles

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JP2022506485A JP2022506485A (ja) 2022-01-17
JP2022506485A5 JP2022506485A5 (https=) 2022-10-27
JPWO2020092856A5 JPWO2020092856A5 (https=) 2022-10-27
JP7355817B2 true JP7355817B2 (ja) 2023-10-03

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KR (2) KR20210069736A (https=)
CN (1) CN112955732B (https=)
IL (1) IL282249B2 (https=)
TW (1) TWI805857B (https=)
WO (1) WO2020092856A1 (https=)

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