KR20210069736A - 블랭크 레티클 상의 결함의 유형 및 크기를 결정하기 위한 시스템 및 방법 - Google Patents

블랭크 레티클 상의 결함의 유형 및 크기를 결정하기 위한 시스템 및 방법 Download PDF

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KR20210069736A
KR20210069736A KR1020217016889A KR20217016889A KR20210069736A KR 20210069736 A KR20210069736 A KR 20210069736A KR 1020217016889 A KR1020217016889 A KR 1020217016889A KR 20217016889 A KR20217016889 A KR 20217016889A KR 20210069736 A KR20210069736 A KR 20210069736A
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specimen
defect
defects
images
characterizing
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Korean (ko)
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라마프라사드 쿨카르니
게 콩
호렌 팡
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케이엘에이 코포레이션
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KR1020217016889A 2018-11-02 2019-11-01 블랭크 레티클 상의 결함의 유형 및 크기를 결정하기 위한 시스템 및 방법 Ceased KR20210069736A (ko)

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KR1020237034866A KR20230147764A (ko) 2018-11-02 2019-11-01 블랭크 레티클 상의 결함의 유형 및 크기를 결정하기 위한 시스템 및 방법

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US201862754880P 2018-11-02 2018-11-02
US62/754,880 2018-11-02
US16/572,971 2019-09-17
US16/572,971 US11468553B2 (en) 2018-11-02 2019-09-17 System and method for determining type and size of defects on blank reticles
PCT/US2019/059291 WO2020092856A1 (en) 2018-11-02 2019-11-01 System and method for determining type and size of defects on blank reticles

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KR1020237034866A Pending KR20230147764A (ko) 2018-11-02 2019-11-01 블랭크 레티클 상의 결함의 유형 및 크기를 결정하기 위한 시스템 및 방법

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US (1) US11468553B2 (https=)
JP (1) JP7355817B2 (https=)
KR (2) KR20210069736A (https=)
CN (1) CN112955732B (https=)
IL (1) IL282249B2 (https=)
TW (1) TWI805857B (https=)
WO (1) WO2020092856A1 (https=)

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