TWI805857B - 用於特性化一樣品之系統及方法 - Google Patents

用於特性化一樣品之系統及方法 Download PDF

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Publication number
TWI805857B
TWI805857B TW108136515A TW108136515A TWI805857B TW I805857 B TWI805857 B TW I805857B TW 108136515 A TW108136515 A TW 108136515A TW 108136515 A TW108136515 A TW 108136515A TW I805857 B TWI805857 B TW I805857B
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defect
images
defects
sample
product images
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TW108136515A
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TW202029071A (zh
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拉馬普拉薩德 庫爾卡尼
叢舸
方浩任
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美商科磊股份有限公司
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  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Software Systems (AREA)
  • Data Mining & Analysis (AREA)
  • Artificial Intelligence (AREA)
  • Evolutionary Computation (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Computing Systems (AREA)
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  • Medical Informatics (AREA)
  • Multimedia (AREA)
  • Molecular Biology (AREA)
  • Biomedical Technology (AREA)
  • Quality & Reliability (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Computational Linguistics (AREA)
  • Bioinformatics & Computational Biology (AREA)
  • Evolutionary Biology (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Biophysics (AREA)
  • Databases & Information Systems (AREA)
  • Geometry (AREA)
  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Analysis (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Image Processing (AREA)
TW108136515A 2018-11-02 2019-10-09 用於特性化一樣品之系統及方法 TWI805857B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201862754880P 2018-11-02 2018-11-02
US62/754,880 2018-11-02
US16/572,971 2019-09-17
US16/572,971 US11468553B2 (en) 2018-11-02 2019-09-17 System and method for determining type and size of defects on blank reticles

Publications (2)

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TW202029071A TW202029071A (zh) 2020-08-01
TWI805857B true TWI805857B (zh) 2023-06-21

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US (1) US11468553B2 (https=)
JP (1) JP7355817B2 (https=)
KR (2) KR20210069736A (https=)
CN (1) CN112955732B (https=)
IL (1) IL282249B2 (https=)
TW (1) TWI805857B (https=)
WO (1) WO2020092856A1 (https=)

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