JP7341059B2 - 六方晶構造の二次元膜の製造方法 - Google Patents
六方晶構造の二次元膜の製造方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims description 64
- 239000013078 crystal Substances 0.000 title claims description 57
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 239000000758 substrate Substances 0.000 claims description 256
- 229910052751 metal Inorganic materials 0.000 claims description 112
- 239000002184 metal Substances 0.000 claims description 112
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 93
- 229910021389 graphene Inorganic materials 0.000 claims description 81
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 34
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 29
- 239000010949 copper Substances 0.000 claims description 28
- 239000000463 material Substances 0.000 claims description 25
- 229910052802 copper Inorganic materials 0.000 claims description 24
- 238000012546 transfer Methods 0.000 claims description 23
- 238000000926 separation method Methods 0.000 claims description 19
- 229910052759 nickel Inorganic materials 0.000 claims description 17
- 238000000151 deposition Methods 0.000 claims description 15
- 230000015572 biosynthetic process Effects 0.000 claims description 10
- 230000008021 deposition Effects 0.000 claims description 9
- 230000032798 delamination Effects 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 6
- 150000002739 metals Chemical class 0.000 claims description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 6
- 229910052594 sapphire Inorganic materials 0.000 claims description 5
- 239000010980 sapphire Substances 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 4
- 150000004767 nitrides Chemical class 0.000 claims description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 3
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
- 238000003486 chemical etching Methods 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 239000011651 chromium Substances 0.000 claims description 3
- 229910017052 cobalt Inorganic materials 0.000 claims description 3
- 239000010941 cobalt Substances 0.000 claims description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 3
- 229910002804 graphite Inorganic materials 0.000 claims description 3
- 239000010439 graphite Substances 0.000 claims description 3
- 238000002513 implantation Methods 0.000 claims description 3
- 229910052741 iridium Inorganic materials 0.000 claims description 3
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 3
- 229910052707 ruthenium Inorganic materials 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 229910052725 zinc Inorganic materials 0.000 claims description 3
- 239000011701 zinc Substances 0.000 claims description 3
- 238000011068 loading method Methods 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 35
- 239000012528 membrane Substances 0.000 description 11
- 229910052799 carbon Inorganic materials 0.000 description 9
- 238000010586 diagram Methods 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 238000010521 absorption reaction Methods 0.000 description 7
- 125000004432 carbon atom Chemical group C* 0.000 description 7
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- 238000001816 cooling Methods 0.000 description 6
- 241000894007 species Species 0.000 description 6
- 239000011889 copper foil Substances 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000011888 foil Substances 0.000 description 5
- 230000035882 stress Effects 0.000 description 5
- 239000002131 composite material Substances 0.000 description 4
- 238000000354 decomposition reaction Methods 0.000 description 4
- 238000004070 electrodeposition Methods 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- YOCUPQPZWBBYIX-UHFFFAOYSA-N copper nickel Chemical compound [Ni].[Cu] YOCUPQPZWBBYIX-UHFFFAOYSA-N 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 150000001247 metal acetylides Chemical class 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 241001424392 Lucia limbaria Species 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 229910021480 group 4 element Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000010338 mechanical breakdown Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
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- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/18—Epitaxial-layer growth characterised by the substrate
- C30B25/186—Epitaxial-layer growth characterised by the substrate being specially pre-treated by, e.g. chemical or physical means
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
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- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
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- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
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- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
- C30B33/06—Joining of crystals
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Description
- 支持基板上での前記二次元膜の成長に適合した単結晶金属膜の転写を含んでなる、成長基板の形成、および
- 前記基板の金属膜上での二次元膜のエピタキシャル成長
を含んでなる方法を提案する。
- 単結晶金属ドナー基板の提供、
- ドナー基板および支持基板の組み立て、
- 支持基板に金属膜を転写させるためのドナー基板の薄化
を含んでなる。
実施例1
この実施例では、単結晶金属膜1は銅であり、支持基板2は、0.4μmのSiO2膜と、支持基板2と金属膜1との間の直接Cu/Cu金属結合を提供するための0.1μm銅膜とで順次被覆されたシリコン基板である。
この実施例では、単結晶金属膜1はニッケルであり、支持基板2はモリブデン基板であり、各々が、支持基板2と金属膜1との間の直接Cu/Cu金属結合を提供するための0.2μm銅膜で被覆されている。
この実施例では、単結晶金属膜1はニッケルであり、支持基板2は、0.3μmのSi3N4膜と0.5μmのSiO2膜とで順次被覆された多結晶AlNセラミックである。
この実施例では、単結晶金属膜1は銅であり、支持基板2は、0.3μmのSiO2膜で被覆されたサファイアである。
この実施例では、単結晶金属膜1は銅であり、支持基板2は、その中での埋め込みによる脆化域形成後のドナー基板上での直接Cu/Cu金属結合により組み立てられた20μm厚の多結晶銅膜である。
この実施例では、単結晶金属膜1は銅であり、支持基板2は、その中での埋め込みによる脆化域形成後のドナー基板上に、厚さ15μmまで電着により直接成膜されたニッケル膜である。
この実施例では、単結晶金属膜は銅であり、支持基板2は、その中での埋め込みによる脆化域形成後のドナー基板上に、厚さ15μmまで電着により直接成膜されたニッケル銅合金膜である。
この実施例では、単結晶金属膜1はニッケル銅合金であり、支持基板2は、その中での埋め込みによる脆化域形成後のドナー基板上に、厚さ15μmまで電着により直接成膜されたニッケル膜である。
この実施例では、単結晶金属膜1は、平面支持体上に近接して位置する複数の単結晶ニッケルブロック10の形態であり、支持基板2は、複数のブロックの水素埋め込みにより脆化された側に直接成膜されたニッケル膜であり、前記ニッケル膜の成膜は、厚さ10μmまで電着により行われる。
- 機械的応力の適用、
- 化学的侵食、
- 分解、
- 融合、
- レーザーリフトオフ
が挙げられる。
Claims (23)
- 六方晶構造を有する第IV族材料の二次元膜(3)を製造する方法であって、
-支持基板(2)上での前記二次元膜の成長に適合した単結晶金属膜(1)を含んでなる、成長基板(100)の形成、および
-前記成長基板(100)の単結晶金属膜(1)上での二次元膜(3)のエピタキシャル成長を含んでなり、
金属膜(1)が、1μm以下、好ましくは0.1μm以下の厚さを有し、かつ成長基板(100)の形成が、
-単結晶金属膜(1)を含んでなるドナー基板(11)の提供、
-支持基板(2)を用いたドナー基板(11)の組み立てであって、支持基板(2)が単結晶金属膜(1)の表面上に配されている組み立て、
-ドナー基板の少なくとも一部を除去して前記支持基板上の前記単結晶金属膜を曝露し、それにより支持基板(2)に単結晶金属膜(1)を転写させるためのドナー基板(11)の薄化を含んでなる、方法。 - 金属膜(1)が、以下の金属:ニッケル、銅、白金、コバルト、クロム、鉄、亜鉛、アルミニウム、イリジウム、ルテニウム、銀のうちの少なくとも1つを含んでなる、請求項1に記載の方法。
- 支持基板(2)が、石英、グラファイト、シリコン、サファイア、セラミック、窒化物、炭化物、アルミナまたは金属の基板である、請求項1または2に記載の方法。
- 支持基板(2)が、二次元膜の材料に関して、金属膜と前記二次元膜との間よりも小さい熱膨張係数の差を有する、請求項1~3のいずれか一項に記載の方法。
- ドナー基板(11)が、インゴットを引っ張り、かつインゴットにおいて前記ドナー基板(11)を切断することにより得られる、請求項1~4のいずれか一項に記載の方法。
- 転写される単結晶金属膜(1、10)の境界を定めるために、ドナー基板(11)中に脆化域(12)を形成する工程をさらに含んでなり、ドナー基板(11)の薄化が、脆化域(12)に沿ったドナー基板(11)の分離を含んでなる、請求項1~5のいずれか一項に記載の方法。
- 脆化域(12)が、ドナー基板(11)における原子種の埋め込みにより形成される、請求項6に記載の方法。
- ドナー基板(11)および支持基板(2)の組み立てが、結合により行われる、請求項1~7のいずれか一項に記載の方法。
- 支持基板(2)を用いたドナー基板(11)の組み立てが、ドナー基板(11)上での支持基板(2)の成膜により行われる、請求項1~7のいずれか一項に記載の方法。
- 単結晶金属膜(1)が、各々支持基板(2)に転写される複数のブロック(10)の形態である、請求項1~9のいずれか一項に記載の方法。
- 各ブロック(10)がドナー基板(11)と同じ表面積を有し、該表面積が、支持基板(2)の表面積よりも小さい、請求項8と組み合わせた請求項10に記載の方法。
- 成長基板(100)が、分解されて成長基板(100)が2つの部分に分離されるように設計されている界面(I)を含んでなる、請求項1~11のいずれか一項に記載の方法。
- 前記界面(I)が、レーザーリフトオフにより分解されるように設計されている、請求項12に記載の方法。
- 前記界面(I)が、化学的エッチングにより分解されるように設計されている、請求項12に記載の方法。
- 前記界面(I)が、機械的負荷により分解されるように設計されている、請求項12に記載の方法。
- 二次元膜(3)の成長後、成長基板(100)から該二次元膜(3)を分離する工程を含んでなる、請求項1~15のいずれか一項に記載の方法。
- 前記分離が、単結晶金属膜(1)と支持基板(2)との間の界面の層間剥離を含んでなる、請求項16に記載の方法。
- 前記分離が、脆化域を形成するための支持基板(2)における原子種の埋め込みと、次いで、該脆化域に沿った成長基板(100)の分離とを含んでなる、請求項16に記載の方法。
- 前記分離後、新たな成長基板(100)を形成するための、支持基板(2)への新たな単結晶金属膜(1)の転写と、次いで、該新たな成長基板(100)上での六方晶構造を有する第IV族材料の新たな二次元膜(3)の成長とを含んでなる、請求項16~18のいずれか一項に記載の方法。
- 前記分離が、二次元膜(3)と成長基板(100)の単結晶金属膜(1)との間の界面の層間剥離を含んでなる、請求項16に記載の方法。
- 前記分離後、成長基板(100)を再利用して、該基板上での六方晶構造を有する第IV族材料の新たな二次元膜を成長させることを含んでなる、請求項20に記載の方法。
- 二次元膜(3)の成長後、新たな基板に前記二次元膜(3)を転写するための金属膜(1)のエッチングをさらに含んでなる、請求項21に記載の方法。
- 二次元膜(3)がグラフェン膜である、請求項1~22のいずれか一項に記載の方法。
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PCT/FR2018/050217 WO2018142061A1 (fr) | 2017-02-02 | 2018-01-31 | Procede de fabrication d'un film bidimensionnel de structure cristalline hexagonale |
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