JP7326480B2 - パターン検査装置及びパターン検査方法 - Google Patents

パターン検査装置及びパターン検査方法 Download PDF

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JP7326480B2
JP7326480B2 JP2021569801A JP2021569801A JP7326480B2 JP 7326480 B2 JP7326480 B2 JP 7326480B2 JP 2021569801 A JP2021569801 A JP 2021569801A JP 2021569801 A JP2021569801 A JP 2021569801A JP 7326480 B2 JP7326480 B2 JP 7326480B2
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JPWO2021140866A1 (https=
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広 井上
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Nuflare Technology Inc
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Nuflare Technology Inc
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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/001—Industrial image inspection using an image reference approach
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/0006—Industrial image inspection using a design-rule based approach
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/10—Segmentation; Edge detection
    • G06T7/12—Edge-based segmentation
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/60—Analysis of geometric attributes
    • G06T7/62—Analysis of geometric attributes of area, perimeter, diameter or volume
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10056—Microscopic image
    • G06T2207/10061—Microscopic image from scanning electron microscope
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Quality & Reliability (AREA)
  • Geometry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP2021569801A 2020-01-10 2020-12-17 パターン検査装置及びパターン検査方法 Active JP7326480B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020003015 2020-01-10
JP2020003015 2020-01-10
PCT/JP2020/047233 WO2021140866A1 (ja) 2020-01-10 2020-12-17 パターン検査装置及びパターン検査方法

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JPWO2021140866A1 JPWO2021140866A1 (https=) 2021-07-15
JP7326480B2 true JP7326480B2 (ja) 2023-08-15

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US (1) US12205272B2 (https=)
JP (1) JP7326480B2 (https=)
TW (1) TWI761004B (https=)
WO (1) WO2021140866A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021140866A1 (ja) * 2020-01-10 2021-07-15 株式会社ニューフレアテクノロジー パターン検査装置及びパターン検査方法
JP7608298B2 (ja) 2021-08-23 2025-01-06 株式会社ニューフレアテクノロジー 検査装置及び検査方法
CN116336969B (zh) * 2022-12-14 2025-11-04 广东九纵智能科技有限公司 一种多轴联动视觉检测设备及其标定方法
CN118392834B (zh) * 2024-06-27 2024-09-10 国鲸科技(广东横琴粤澳深度合作区)有限公司 一种用于集成电路透明柔性基板的检测方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007064842A (ja) 2005-08-31 2007-03-15 Advanced Mask Inspection Technology Kk 試料検査装置、試料検査方法及びプログラム
JP2008071928A (ja) 2006-09-14 2008-03-27 Nuflare Technology Inc 描画パターンのリサイズ方法及び荷電粒子ビーム描画方法
JP2010268009A (ja) 2004-02-23 2010-11-25 Nano Geometry Kenkyusho:Kk パターン検査装置および方法
WO2018224349A1 (en) 2017-06-06 2018-12-13 Asml Netherlands B.V. Measurement method and apparatus

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TW393681B (en) * 1998-06-11 2000-06-11 United Microelectronics Corp Method for checking a correction pattern
US6326618B1 (en) * 1999-07-02 2001-12-04 Agere Systems Guardian Corp. Method of analyzing semiconductor surface with patterned feature using line width metrology
US7817844B2 (en) * 1999-08-26 2010-10-19 Nanogeometry Research Inc. Pattern inspection apparatus and method
US7241993B2 (en) 2000-06-27 2007-07-10 Ebara Corporation Inspection system by charged particle beam and method of manufacturing devices using the system
JP4223979B2 (ja) * 2004-03-16 2009-02-12 株式会社日立ハイテクノロジーズ 走査型電子顕微鏡装置及び走査型電子顕微鏡装置における装置としての再現性能評価方法
JP5063071B2 (ja) * 2006-02-14 2012-10-31 株式会社ニューフレアテクノロジー パタン作成方法及び荷電粒子ビーム描画装置
JP4074643B2 (ja) * 2006-03-27 2008-04-09 株式会社アドバンテスト 線幅測定調整方法及び走査型電子顕微鏡
JP4943304B2 (ja) 2006-12-05 2012-05-30 株式会社 Ｎｇｒ パターン検査装置および方法
JP5162314B2 (ja) * 2008-04-25 2013-03-13 東京エレクトロン株式会社 基板の処理方法、プログラム、コンピュータ記憶媒体及び基板処理システム
WO2010073360A1 (ja) * 2008-12-26 2010-07-01 株式会社アドバンテスト パターン測定装置及びパターン測定方法
JP4970569B2 (ja) 2010-06-17 2012-07-11 株式会社東芝 パターン検査装置およびパターン検査方法
US8669523B2 (en) 2011-05-25 2014-03-11 Kla-Tencor Corporation Contour-based defect detection using an inspection apparatus
JP5438741B2 (ja) * 2011-10-26 2014-03-12 株式会社アドバンテスト パターン測定装置及びパターン測定方法
JP5743955B2 (ja) 2012-05-28 2015-07-01 株式会社日立ハイテクノロジーズ パターン検査装置およびパターン検査方法
JP6431786B2 (ja) * 2015-02-25 2018-11-28 株式会社ニューフレアテクノロジー 線幅誤差取得方法、線幅誤差取得装置および検査システム
JP6446297B2 (ja) * 2015-03-09 2018-12-26 株式会社ニューフレアテクノロジー 検査装置
JP6515013B2 (ja) * 2015-11-05 2019-05-15 株式会社ニューフレアテクノロジー 検査装置および検査方法
JP2019120654A (ja) * 2018-01-11 2019-07-22 株式会社ニューフレアテクノロジー 検査方法
JP7072844B2 (ja) * 2018-03-30 2022-05-23 東レエンジニアリング先端半導体Ｍｉテクノロジー株式会社 ウェハパターンのエッジと基準パターンのエッジとの乖離量と基準パターンのスペース幅との関係を示す補正線を生成する方法および装置、並びにコンピュータ読み取り可能な記録媒体
JP7171378B2 (ja) * 2018-11-15 2022-11-15 株式会社ニューフレアテクノロジー マルチ電子ビーム検査装置及びマルチ電子ビーム検査方法
JP7241570B2 (ja) * 2019-03-06 2023-03-17 株式会社ニューフレアテクノロジー マルチ電子ビーム検査装置及びマルチ電子ビーム検査方法
WO2021140866A1 (ja) * 2020-01-10 2021-07-15 株式会社ニューフレアテクノロジー パターン検査装置及びパターン検査方法
JP7442375B2 (ja) * 2020-04-06 2024-03-04 株式会社ニューフレアテクノロジー マルチ電子ビーム検査装置及びマルチ電子ビーム検査方法
JP7409988B2 (ja) * 2020-07-29 2024-01-09 株式会社ニューフレアテクノロジー パターン検査装置及び輪郭線同士のアライメント量取得方法
JP2024082122A (ja) * 2022-12-07 2024-06-19 キヤノン株式会社 情報処理装置、その制御方法、及びプログラム

Patent Citations (4)

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Publication number Priority date Publication date Assignee Title
JP2010268009A (ja) 2004-02-23 2010-11-25 Nano Geometry Kenkyusho:Kk パターン検査装置および方法
JP2007064842A (ja) 2005-08-31 2007-03-15 Advanced Mask Inspection Technology Kk 試料検査装置、試料検査方法及びプログラム
JP2008071928A (ja) 2006-09-14 2008-03-27 Nuflare Technology Inc 描画パターンのリサイズ方法及び荷電粒子ビーム描画方法
WO2018224349A1 (en) 2017-06-06 2018-12-13 Asml Netherlands B.V. Measurement method and apparatus

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JPWO2021140866A1 (https=) 2021-07-15
TWI761004B (zh) 2022-04-11
US20220301138A1 (en) 2022-09-22
TW202141176A (zh) 2021-11-01
WO2021140866A1 (ja) 2021-07-15
US12205272B2 (en) 2025-01-21

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