JP7321688B2 - 振動波アクチュエータ及びそれを用いた撮像装置、ステージ装置 - Google Patents

振動波アクチュエータ及びそれを用いた撮像装置、ステージ装置 Download PDF

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Publication number
JP7321688B2
JP7321688B2 JP2018174102A JP2018174102A JP7321688B2 JP 7321688 B2 JP7321688 B2 JP 7321688B2 JP 2018174102 A JP2018174102 A JP 2018174102A JP 2018174102 A JP2018174102 A JP 2018174102A JP 7321688 B2 JP7321688 B2 JP 7321688B2
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Japan
Prior art keywords
contact
vibration wave
wave actuator
vibrating body
actuator according
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JP2018174102A
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English (en)
Japanese (ja)
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JP2019068725A (ja
JP2019068725A5 (enExample
Inventor
悠希 新里
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Canon Inc
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Canon Inc
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H02N2/062—Small signal circuits; Means for controlling position or derived quantities, e.g. for removing hysteresis
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/07—Hall effect devices
    • G01R33/072—Constructional adaptation of the sensor to specific applications
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/26—Stages; Adjusting means therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G02B7/10—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification by relative axial movement of several lenses, e.g. of varifocal objective lens
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/0015—Driving devices, e.g. vibrators using only bending modes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B2205/00—Adjustment of optical system relative to image or object surface other than for focusing
    • G03B2205/0053—Driving means for the movement of one or more optical element
    • G03B2205/0061—Driving means for the movement of one or more optical element using piezoelectric actuators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Lens Barrels (AREA)
  • Microscoopes, Condenser (AREA)
  • Adjustment Of Camera Lenses (AREA)
  • Hall/Mr Elements (AREA)
JP2018174102A 2017-09-29 2018-09-18 振動波アクチュエータ及びそれを用いた撮像装置、ステージ装置 Active JP7321688B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017192058 2017-09-29
JP2017192058 2017-09-29

Publications (3)

Publication Number Publication Date
JP2019068725A JP2019068725A (ja) 2019-04-25
JP2019068725A5 JP2019068725A5 (enExample) 2021-10-21
JP7321688B2 true JP7321688B2 (ja) 2023-08-07

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JP2018174102A Active JP7321688B2 (ja) 2017-09-29 2018-09-18 振動波アクチュエータ及びそれを用いた撮像装置、ステージ装置

Country Status (4)

Country Link
US (1) US10978966B2 (enExample)
EP (1) EP3462595B1 (enExample)
JP (1) JP7321688B2 (enExample)
CN (1) CN109586609B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10969269B1 (en) * 2018-10-24 2021-04-06 National Technology & Engineering Solutions Of Sandia, Llc Remote vibration sensing through opaque media using permanent magnets
JP7313909B2 (ja) * 2019-05-30 2023-07-25 キヤノン株式会社 振動波モータおよび電子機器。
JP7362366B2 (ja) * 2019-08-30 2023-10-17 キヤノン株式会社 振動型アクチュエータ、光学機器および電子機器
CN117203583A (zh) * 2021-04-09 2023-12-08 宁波舜宇光电信息有限公司 潜望式摄像模组和可变焦摄像模组
CN114123852B (zh) * 2022-01-25 2022-05-13 上海隐冠半导体技术有限公司 一种微动台及运动装置
JP2024090648A (ja) * 2022-12-23 2024-07-04 キヤノン株式会社 振動型アクチュエータ、レンズ鏡筒、撮像装置およびステージ装置
JP2025114981A (ja) * 2024-01-25 2025-08-06 キヤノン株式会社 振動型アクチュエータ、光学機器、及び、電子機器
CN118826535B (zh) * 2024-08-23 2025-01-03 立讯智造科技(常熟)有限公司 压电致动器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001069772A (ja) 1999-08-25 2001-03-16 Minolta Co Ltd 弾性表面波モータ
JP2007312519A (ja) 2006-05-18 2007-11-29 Canon Inc 振動型駆動装置
JP2017127154A (ja) 2016-01-15 2017-07-20 キヤノン株式会社 振動型アクチュエータ及び電子機器

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5006725B2 (ja) 2007-07-20 2012-08-22 オリンパス株式会社 微動機構及びその微動機構を備えた顕微鏡装置
KR20110094464A (ko) * 2010-02-16 2011-08-24 삼성전자주식회사 압전 액추에이터 조립체 및 이를 구비하는 광학 시스템
JP5627258B2 (ja) * 2010-03-23 2014-11-19 キヤノン株式会社 振動型アクチュエータおよびその製造方法
JP5780818B2 (ja) * 2011-04-21 2015-09-16 オリンパス株式会社 駆動装置およびそれを用いた画像装置
JP6136349B2 (ja) * 2013-02-22 2017-05-31 セイコーエプソン株式会社 電子デバイス、電子機器及び移動体
JP6481242B2 (ja) * 2014-10-29 2019-03-13 新シコー科技株式会社 レンズ駆動装置、カメラ装置及び電子機器
US10819251B2 (en) * 2017-03-02 2020-10-27 Dti Motion Corp. Linear piezoelectric actuator on rail system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001069772A (ja) 1999-08-25 2001-03-16 Minolta Co Ltd 弾性表面波モータ
JP2007312519A (ja) 2006-05-18 2007-11-29 Canon Inc 振動型駆動装置
JP2017127154A (ja) 2016-01-15 2017-07-20 キヤノン株式会社 振動型アクチュエータ及び電子機器

Also Published As

Publication number Publication date
JP2019068725A (ja) 2019-04-25
CN109586609A (zh) 2019-04-05
US20190103822A1 (en) 2019-04-04
CN109586609B (zh) 2020-06-09
US10978966B2 (en) 2021-04-13
EP3462595A1 (en) 2019-04-03
EP3462595B1 (en) 2020-12-02

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