JP7317013B2 - 極低温に冷却された回転可能静電チャック - Google Patents
極低温に冷却された回転可能静電チャック Download PDFInfo
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Description
Claims (13)
- 基板を支持するための支持体表面および反対側の第2の表面を有する誘電体ディスクであって、少なくとも1つのチャック電極が前記支持体表面と前記第2の表面との間の前記誘電体ディスク内に配置され、複数の冷却剤チャネルが前記誘電体ディスク内に配置されている、誘電体ディスクと、
前記誘電体ディスクの前記第2の表面に結合された、冷却剤入り口および冷却剤出口を有する極低温マニホールドであって、前記冷却剤入り口および前記冷却剤出口の両方が、前記複数の冷却剤チャネルに流体結合されている、極低温マニホールドと
シャフトアセンブリの第1の端部において前記極低温マニホールドに結合されたシャフトアセンブリであって、前記シャフトアセンブリを貫いて延在する中央開口部を含む、シャフトアセンブリと、
前記シャフトアセンブリの前記第1の端部の反対側の第2の端部において前記シャフトアセンブリに結合された極低温供給チャンバと、
供給管の第1の端部において前記極低温供給チャンバに結合されて極低温媒体を受け取り、前記供給管の第2の端部において前記冷却剤入り口に結合されて前記極低温媒体を前記複数の冷却剤チャネルに供給する供給管であって、前記中央開口部を通って延在し、前記シャフトアセンブリと同心である、供給管と、
戻り管の第1の端部において前記冷却剤出口に、および前記戻り管の第2の端部において前記極低温供給チャンバに結合されて、前記極低温媒体が前記複数の冷却剤チャネルを通って流れた後に前記極低温媒体を前記極低温供給チャンバに戻す、戻り管であって、前記中央開口部を通って延在し、前記供給管と同心であり、前記供給管が前記戻り管内に配置されている、戻り管と、
前記シャフトアセンブリの前記第2の端部に結合されて、電源からの電力を前記少なくとも1つのチャック電極に結合することを容易にするスリップリングと、
前記シャフトアセンブリに結合されて、前記シャフトアセンブリおよび前記誘電体ディスクを回転させる駆動アセンブリと、
を備え、
前記シャフトアセンブリが、
中央チャネルを有し、シャフトの第1の端部において前記スリップリングに結合された、シャフトと、
前記シャフトの前記第1の端部の反対側の第2の端部に結合され、回転中に前記誘電体ディスクを実質的に水平に維持するように構成された撓み継手と、
を備える、静電チャック。 - 前記撓み継手の周りに配置された軸受アセンブリ、
をさらに備える、請求項1に記載の静電チャック。 - 前記誘電体ディスクに流体結合された裏側ガス送達システムであって、
前記シャフトの周りに前記シャフトと同心に配置された、裏側ガス継手を有する回転フィードスルーであり、静止しているハウジングおよび前記ハウジング内に配置された回転可能な円筒形部分を含み、2つの環状軸受アセンブリが前記静止しているハウジングと前記回転可能な円筒形部分との間に配置されている、回転フィードスルーと、
前記シャフトの前記第2の端部に結合された裏側ガス導管と、
前記シャフトの反対側の前記裏側ガス導管に結合された裏側ガスマニホールドであり、前記極低温マニホールドと前記撓み継手との間に配置され、前記裏側ガス導管を前記誘電体ディスクの裏側ガス入り口と流体結合するマニホールドチャネルを含む、裏側ガスマニホールドと、
を備える、裏面ガス供給システム
をさらに備え、
裏側ガスチャネルが、前記裏側ガス継手を前記裏側ガス導管に流体結合するように前記シャフトを貫いて形成されている、
請求項1に記載の静電チャック。 - 前記シャフトが前記シャフトの外面に形成された環状凹部を含み、前記環状凹部が前記裏側ガス継手に隣接して配置され、前記裏側ガスチャネルが前記環状凹部を前記裏側ガス導管に流体結合する、請求項3に記載の静電チャック。
- 前記静止しているハウジングと前記裏側ガス継手の上方の前記回転可能な円筒形部分との間に配置された第1の環状シール要素と、
前記静止しているハウジングと前記裏側ガス継手の下方の前記回転可能な円筒形部分との間に配置された第2の環状シール要素と、
をさらに備え、
前記第1および第2の環状シール要素が、前記裏側ガス継手を介して供給される裏側ガスの漏出を防止するように構成されている、
請求項3に記載の静電チャック。 - 前記極低温供給チャンバが、
内部容積を画定するチャンバ本体と、
前記供給管に流体結合されたフィードスルー入り口、および前記戻り管に流体結合されたフィードスルー出口を有するフィードスルーブロックと、
を備える、
請求項1~5のいずれか1項に記載の静電チャック。 - 前記チャンバ本体に形成された真空ポートを介して前記内部容積に流体結合されて、前記内部容積を真空圧に維持する真空ポンプ、
をさらに備える、請求項6に記載の静電チャック。 - 前記戻り管の下側部分に結合され、前記戻り管と同心に配置されたシール管であって、前記戻り管が前記シール管の一部を通って延在する、シール管であり、前記戻り管の前記下側部分に結合された天井部分および開放底端部を含み、前記天井部分が前記戻り管の前記下側部分に結合されている、シール管
をさらに備える、請求項6に記載の静電チャック。 - 前記戻り管の最下面に結合され、前記シール管内に配置されたベローズであって、前記フィードスルー出口に流体結合されている、ベローズ
をさらに備える、請求項8に記載の静電チャック。 - 前記ベローズがステンレス鋼で形成され、前記戻り管の前記最下面に溶接されている、請求項9に記載の静電チャック。
- 前記供給管の外面に配置された断熱層、
をさらに備える、請求項1~5のいずれかに1項に記載の静電チャック。 - 内部容積を有するチャンバ本体と、
前記内部容積の下側部分内に配置された静電チャックであって、請求項1~11のいずれか1項に記載される静電チャックと、
を備える、処理チャンバ。 - 前記極低温供給チャンバを介して前記静電チャックに極低温媒体を供給するために前記極低温供給チャンバに結合された冷却装置
をさらに備える、請求項12に記載の処理チャンバ。
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