JP7313422B2 - イオン注入のための箔シートアセンブリ - Google Patents
イオン注入のための箔シートアセンブリ Download PDFInfo
- Publication number
- JP7313422B2 JP7313422B2 JP2021502694A JP2021502694A JP7313422B2 JP 7313422 B2 JP7313422 B2 JP 7313422B2 JP 2021502694 A JP2021502694 A JP 2021502694A JP 2021502694 A JP2021502694 A JP 2021502694A JP 7313422 B2 JP7313422 B2 JP 7313422B2
- Authority
- JP
- Japan
- Prior art keywords
- foil
- ion source
- source chamber
- layer
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/022—Details
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/48—Ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/026—Cluster ion sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers
- H01J27/205—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers with electrons, e.g. electron impact ionisation, electron attachment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/02—Details
- H01J2237/0203—Protection arrangements
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Description
Claims (12)
- イオン源であって、
プラズマを生成するためのイオン源チャンバ、及び
複数の積み重ねられた箔層を含む箔ライナであって、隣接する箔層同士の間に間隔を有し、各箔層は1.27mm(0.050インチ)未満の厚さを有し、該箔ライナは、前記イオン源チャンバ内に配置され、かつ前記イオン源チャンバの内面と前記プラズマとの間に配置される、箔ライナ
を備え、
前記複数の積み重ねられた箔層のうちの1つが、隣接する箔層同士の間の前記間隔を増加させるための突起を含む、イオン源。 - 前記箔ライナが、前記イオン源チャンバの側面と底部に近接して配置されるように「U」字形をしている、請求項1に記載のイオン源。
- 前記複数の積み重ねられた箔層がそれぞれ、タングステン箔を含む、請求項1に記載のイオン源。
- 前記箔ライナが第1の箔層及び第2の箔層を含み、前記第1の箔層と前記第2の箔層とが異なる耐熱性金属でできている、請求項1に記載のイオン源。
- 前記複数の積み重ねられた箔層のうちの1つが絶縁材料を含む、請求項1に記載のイオン源。
- 複数の積み重ねられた箔層を含む、イオン源チャンバ内で使用するための箔ライナであって、隣接する箔層同士の間に間隔を有し、各箔層は1.27mm(0.050インチ)未満の厚さを有し、前記複数の積み重ねられた箔層のうちの1つが、隣接する箔層間の前記間隔を増加させるための突起を含む、箔ライナ。
- 前記複数の積み重ねられた箔層のうちの1つがスペーサ層を含む、請求項6に記載の箔ライナ。
- 前記スペーサ層が1つ以上の間隙を含む、請求項7に記載の箔ライナ。
- 前記スペーサ層が複数のストリップを含む、請求項7に記載の箔ライナ。
- 前記複数の積み重ねられた箔層のうちの1つが絶縁材料を含む、請求項6に記載の箔ライナ。
- イオン源であって、
プラズマを生成するためのイオン源チャンバ、
複数の積み重ねられた箔層を含む箔ライナであって、隣接する箔層同士の間に間隔を有し、各箔層は1.27mm(0.050インチ)未満の厚さを有し、該箔ライナは、前記イオン源チャンバ内に配置され、かつ前記イオン源チャンバの内面と前記プラズマとの間に配置され、前記複数の積み重ねられた箔層が、最内層、最外層、及び1つ以上の中間層を含み、前記最内層が耐熱性金属で構成され、前記複数の積み重ねられた箔層のうちの1つが絶縁材料で構成されている、箔ライナ、及び
前記最内層を前記イオン源チャンバに電気的に接続するコネクタ
を備えた、イオン源。 - 前記最内層がタングステンを含み、前記複数の積み重ねられた箔層のうちの1つが異なる耐熱性金属を含む、請求項11に記載のイオン源。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/941,163 | 2018-03-30 | ||
US15/941,163 US10418223B1 (en) | 2018-03-30 | 2018-03-30 | Foil sheet assemblies for ion implantation |
PCT/US2019/018883 WO2019190660A1 (en) | 2018-03-30 | 2019-02-21 | Foil sheet assemblies for ion implantation |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021519507A JP2021519507A (ja) | 2021-08-10 |
JP7313422B2 true JP7313422B2 (ja) | 2023-07-24 |
Family
ID=67909182
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021502694A Active JP7313422B2 (ja) | 2018-03-30 | 2019-02-21 | イオン注入のための箔シートアセンブリ |
Country Status (6)
Country | Link |
---|---|
US (1) | US10418223B1 (ja) |
JP (1) | JP7313422B2 (ja) |
KR (1) | KR102513986B1 (ja) |
CN (1) | CN111902904B (ja) |
TW (1) | TWI713415B (ja) |
WO (1) | WO2019190660A1 (ja) |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005210140A (ja) | 2005-03-11 | 2005-08-04 | Hitachi High-Technologies Corp | プラズマ処理装置 |
JP2012518267A (ja) | 2009-01-06 | 2012-08-09 | メン テイ キアン | 基板処理システムを維持する技術 |
JP2013211232A (ja) | 2012-03-30 | 2013-10-10 | Sumitomo Heavy Ind Ltd | マイクロ波イオン源 |
JP2014044886A (ja) | 2012-08-28 | 2014-03-13 | Sen Corp | イオン生成方法およびイオン源 |
JP2014139889A (ja) | 2013-01-21 | 2014-07-31 | Sumitomo Heavy Ind Ltd | マイクロ波イオン源及びプラズマ室 |
JP2015204185A (ja) | 2014-04-14 | 2015-11-16 | 住友重機械工業株式会社 | マイクロ波イオン源およびそれに用いるシールド部材 |
US20170221669A1 (en) | 2016-01-29 | 2017-08-03 | Varian Semiconductor Equipment Associates, Inc. | Ceramic Ion Source Chamber |
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-
2018
- 2018-03-30 US US15/941,163 patent/US10418223B1/en active Active
-
2019
- 2019-02-21 CN CN201980021860.4A patent/CN111902904B/zh active Active
- 2019-02-21 JP JP2021502694A patent/JP7313422B2/ja active Active
- 2019-02-21 KR KR1020207031112A patent/KR102513986B1/ko active IP Right Grant
- 2019-02-21 WO PCT/US2019/018883 patent/WO2019190660A1/en active Application Filing
- 2019-03-11 TW TW108108012A patent/TWI713415B/zh active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005210140A (ja) | 2005-03-11 | 2005-08-04 | Hitachi High-Technologies Corp | プラズマ処理装置 |
JP2012518267A (ja) | 2009-01-06 | 2012-08-09 | メン テイ キアン | 基板処理システムを維持する技術 |
JP2013211232A (ja) | 2012-03-30 | 2013-10-10 | Sumitomo Heavy Ind Ltd | マイクロ波イオン源 |
JP2014044886A (ja) | 2012-08-28 | 2014-03-13 | Sen Corp | イオン生成方法およびイオン源 |
JP2014139889A (ja) | 2013-01-21 | 2014-07-31 | Sumitomo Heavy Ind Ltd | マイクロ波イオン源及びプラズマ室 |
JP2015204185A (ja) | 2014-04-14 | 2015-11-16 | 住友重機械工業株式会社 | マイクロ波イオン源およびそれに用いるシールド部材 |
US20170221669A1 (en) | 2016-01-29 | 2017-08-03 | Varian Semiconductor Equipment Associates, Inc. | Ceramic Ion Source Chamber |
Also Published As
Publication number | Publication date |
---|---|
CN111902904A (zh) | 2020-11-06 |
US20190304738A1 (en) | 2019-10-03 |
CN111902904B (zh) | 2023-08-22 |
KR102513986B1 (ko) | 2023-03-24 |
TWI713415B (zh) | 2020-12-11 |
WO2019190660A1 (en) | 2019-10-03 |
US10418223B1 (en) | 2019-09-17 |
TW201943316A (zh) | 2019-11-01 |
JP2021519507A (ja) | 2021-08-10 |
KR20200130739A (ko) | 2020-11-19 |
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