JP7308330B2 - 基板処理装置及び方法 - Google Patents
基板処理装置及び方法 Download PDFInfo
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- JP7308330B2 JP7308330B2 JP2022071231A JP2022071231A JP7308330B2 JP 7308330 B2 JP7308330 B2 JP 7308330B2 JP 2022071231 A JP2022071231 A JP 2022071231A JP 2022071231 A JP2022071231 A JP 2022071231A JP 7308330 B2 JP7308330 B2 JP 7308330B2
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- 239000000758 substrate Substances 0.000 title claims description 135
- 238000012545 processing Methods 0.000 title claims description 53
- 238000000034 method Methods 0.000 title description 19
- 238000006243 chemical reaction Methods 0.000 claims description 99
- 239000012530 fluid Substances 0.000 claims description 11
- 238000004891 communication Methods 0.000 claims description 7
- 210000002381 plasma Anatomy 0.000 description 43
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 31
- 238000000231 atomic layer deposition Methods 0.000 description 26
- 239000007789 gas Substances 0.000 description 20
- 238000000151 deposition Methods 0.000 description 11
- 230000008021 deposition Effects 0.000 description 11
- 238000012423 maintenance Methods 0.000 description 11
- 230000005540 biological transmission Effects 0.000 description 8
- 239000002243 precursor Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 238000006557 surface reaction Methods 0.000 description 6
- 238000010926 purge Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 238000005234 chemical deposition Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- 239000012713 reactive precursor Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000009429 electrical wiring Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002052 molecular layer Substances 0.000 description 1
- 238000001208 nuclear magnetic resonance pulse sequence Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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Description
反応室と;
前記反応室を少なくとも部分的に囲み、前記反応室との間に中間ボリュームを形成する外室と;
前記反応室内に位置し、中空の内部空間を有する基板支持部と;
を備え、前記中空の内部空間と前記中間ボリュームとは、前記中空の内部空間から前記中間ボリュームへと延びるチャネルを通じて流体が行き来できるようになっている。
反応室と;
前記反応室を少なくとも部分的に囲み、前記反応室との間に中間ボリュームを形成する外室と;
前記反応室内の基板支持部と;前記基板支持部は、前記反応室の壁に固定され、前記反応室の底部に接続される排気ラインの伸縮により前記反応室と共に縦方向に移動可能である。
前記基板支持部と前記反応室の下部とを含む反応室アセンブリを、前記外室の底部構造から取り外すことと;
前記基板支持部から吊り下げられた配線及び該配線のプラグを、前記底部構造に設けられる開口部を通じて前記外室の外側から前記中間ボリュームへ動かすことと;
メンテナンスのために、前記反応室アセンブリを前記配線及び該配線のプラグと共に持ち上げて取り外すことと;
を含む。
Claims (7)
- 反応室と;
前記反応室を少なくとも部分的に囲み、前記反応室との間に中間ボリュームを形成する外室と;
前記反応室内に位置し、中空の内部空間を有する基板支持部と;
を備え、前記中空の内部空間と前記中間ボリュームとは、前記中空の内部空間から前記中間ボリュームへと延びるチャネルを通じて流体が行き来できるようになっている、基板処理装置であって、
前記チャネルは配線を収容し、前記配線は前記チャネル内で前記基板支持部から前記中間ボリュームへと延びる、基板処理装置。 - 前記配線は、前記外室の底部の少なくとも1つのフィードスルーを通じて前記外室を出る、請求項1に記載の基板処理装置。
- 反応室と;
前記反応室を少なくとも部分的に囲み、前記反応室との間に中間ボリュームを形成する外室と;
前記反応室内に位置し、中空の内部空間を有する基板支持部と;
を備え、前記中空の内部空間と前記中間ボリュームとは、前記中空の内部空間から前記中間ボリュームへと延びるチャネルを通じて流体が行き来できるようになっている、基板処理装置であって、
前記反応室の少なくとも下部及び前記基板支持部を含むアセンブリに取り付けられている接続フランジに対して少なくとも1つのフィードスルー部が着脱可能に取り付けられている、基板処理装置。 - 前記接続フランジは、前記外室の底部フランジに着脱可能に取り付けられている、請求項3に記載の基板処理装置。
- 反応室と;
前記反応室を少なくとも部分的に囲み、前記反応室との間に中間ボリュームを形成する外室と;
前記反応室内に位置し、中空の内部空間を有する基板支持部と;
前記反応室を昇降させるように構成されるアクチュエータと、
反応室排気ライン内に、縦方向の移動を可能とする、長手方向に延びる管状部分と、
を備え、前記中空の内部空間と前記中間ボリュームとは、前記中空の内部空間から前記中間ボリュームへと延びるチャネルを通じて流体が行き来できるようになっている、基板処理装置であって、
前記長手方向に延びる管状部分に巻かれる配線を備える、基板処理装置。 - 反応室と;
前記反応室を少なくとも部分的に囲み、前記反応室との間に中間ボリュームを形成する外室と;
前記反応室内に位置し、中空の内部空間を有する基板支持部と;
を備え、前記中空の内部空間と前記中間ボリュームとは、前記中空の内部空間から前記中間ボリュームへと延びるチャネルを通じて流体が行き来できるようになっている、基板処理装置であって、
前記チャネルの長さを伸ばすことにより前記基板支持部の縦方向の位置を調整するように構成される、基板処理装置。 - 基板支持部により構成される基板テーブルの高さを、前記チャネルの一部を形成する長手方向伸長部の長手方向の寸法を変えることによって上下させるように構成されるアクチュエータを備える、請求項6に記載の基板処理装置。
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