JP7302780B2 - 力覚センサ装置 - Google Patents

力覚センサ装置 Download PDF

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Publication number
JP7302780B2
JP7302780B2 JP2019016313A JP2019016313A JP7302780B2 JP 7302780 B2 JP7302780 B2 JP 7302780B2 JP 2019016313 A JP2019016313 A JP 2019016313A JP 2019016313 A JP2019016313 A JP 2019016313A JP 7302780 B2 JP7302780 B2 JP 7302780B2
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Japan
Prior art keywords
strain
force
beams
sensor chip
detection
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JP2019016313A
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English (en)
Japanese (ja)
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JP2020122768A (ja
Inventor
智仁 瀧
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MinebeaMitsumi Inc
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MinebeaMitsumi Inc
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Application filed by MinebeaMitsumi Inc filed Critical MinebeaMitsumi Inc
Priority to JP2019016313A priority Critical patent/JP7302780B2/ja
Priority to CN201980088961.3A priority patent/CN113302466B/zh
Priority to PCT/JP2019/047845 priority patent/WO2020158189A1/ja
Publication of JP2020122768A publication Critical patent/JP2020122768A/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/26—Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
JP2019016313A 2019-01-31 2019-01-31 力覚センサ装置 Active JP7302780B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2019016313A JP7302780B2 (ja) 2019-01-31 2019-01-31 力覚センサ装置
CN201980088961.3A CN113302466B (zh) 2019-01-31 2019-12-06 力传感器装置
PCT/JP2019/047845 WO2020158189A1 (ja) 2019-01-31 2019-12-06 力覚センサ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019016313A JP7302780B2 (ja) 2019-01-31 2019-01-31 力覚センサ装置

Publications (2)

Publication Number Publication Date
JP2020122768A JP2020122768A (ja) 2020-08-13
JP7302780B2 true JP7302780B2 (ja) 2023-07-04

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ID=71841316

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JP2019016313A Active JP7302780B2 (ja) 2019-01-31 2019-01-31 力覚センサ装置

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JP (1) JP7302780B2 (zh)
CN (1) CN113302466B (zh)
WO (1) WO2020158189A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3121621B1 (fr) * 2021-04-09 2023-04-07 Mitsui Chemicals Inc Système de contrôle de la température d’un robot

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4549439A (en) 1984-06-19 1985-10-29 Colt Industries Operating Corp Moistureproof load cell for food processing applications and method for making the same
JP2004125587A (ja) 2002-10-02 2004-04-22 Ntt Infranet Co Ltd 光ファイバブラッグ回折格子を用いた土木用センターホール型ロードセル
JP2015184007A (ja) 2014-03-20 2015-10-22 セイコーエプソン株式会社 力検出装置、ロボット、電子部品搬送装置および電子部品検出装置
JP2016161320A (ja) 2015-02-27 2016-09-05 株式会社デンソー 圧力センサ
JP2018185296A (ja) 2017-04-26 2018-11-22 ミツミ電機株式会社 力覚センサ装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0886700A (ja) * 1994-09-16 1996-04-02 Kubota Corp ロードセルユニット
CN103376181B (zh) * 2012-04-28 2016-12-14 浙江三花股份有限公司 一种热交换设备及其压力传感器
US20160209285A1 (en) * 2015-01-20 2016-07-21 Seiko Epson Corporation Pressure sensor, method of manufacturing pressure sensor, altimeter, electronic apparatus, and moving object
US10634695B2 (en) * 2017-04-26 2020-04-28 Minebea Mitsumi Inc. Force sensor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4549439A (en) 1984-06-19 1985-10-29 Colt Industries Operating Corp Moistureproof load cell for food processing applications and method for making the same
JP2004125587A (ja) 2002-10-02 2004-04-22 Ntt Infranet Co Ltd 光ファイバブラッグ回折格子を用いた土木用センターホール型ロードセル
JP2015184007A (ja) 2014-03-20 2015-10-22 セイコーエプソン株式会社 力検出装置、ロボット、電子部品搬送装置および電子部品検出装置
JP2016161320A (ja) 2015-02-27 2016-09-05 株式会社デンソー 圧力センサ
JP2018185296A (ja) 2017-04-26 2018-11-22 ミツミ電機株式会社 力覚センサ装置

Also Published As

Publication number Publication date
CN113302466A (zh) 2021-08-24
WO2020158189A1 (ja) 2020-08-06
CN113302466B (zh) 2024-01-05
JP2020122768A (ja) 2020-08-13

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