JP7292554B1 - オゾン供給装置およびオゾン供給方法 - Google Patents

オゾン供給装置およびオゾン供給方法 Download PDF

Info

Publication number
JP7292554B1
JP7292554B1 JP2023514390A JP2023514390A JP7292554B1 JP 7292554 B1 JP7292554 B1 JP 7292554B1 JP 2023514390 A JP2023514390 A JP 2023514390A JP 2023514390 A JP2023514390 A JP 2023514390A JP 7292554 B1 JP7292554 B1 JP 7292554B1
Authority
JP
Japan
Prior art keywords
ozone
gas
adsorption
nox
desorption
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023514390A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2024127482A1 (https=
JPWO2024127482A5 (https=
Inventor
洋航 松浦
学 生沼
大道 古賀
望 安永
芳明 有馬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Application granted granted Critical
Publication of JP7292554B1 publication Critical patent/JP7292554B1/ja
Publication of JPWO2024127482A1 publication Critical patent/JPWO2024127482A1/ja
Publication of JPWO2024127482A5 publication Critical patent/JPWO2024127482A5/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/10—Preparation of ozone
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
    • Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
JP2023514390A 2022-12-13 2022-12-13 オゾン供給装置およびオゾン供給方法 Active JP7292554B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/045773 WO2024127482A1 (ja) 2022-12-13 2022-12-13 オゾン供給装置およびオゾン供給方法

Publications (3)

Publication Number Publication Date
JP7292554B1 true JP7292554B1 (ja) 2023-06-16
JPWO2024127482A1 JPWO2024127482A1 (https=) 2024-06-20
JPWO2024127482A5 JPWO2024127482A5 (https=) 2024-11-13

Family

ID=86729209

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023514390A Active JP7292554B1 (ja) 2022-12-13 2022-12-13 オゾン供給装置およびオゾン供給方法

Country Status (3)

Country Link
JP (1) JP7292554B1 (https=)
CN (1) CN120303211A (https=)
WO (1) WO2024127482A1 (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119330308A (zh) * 2024-12-20 2025-01-21 山东志伟环保科技有限公司 应用于半导体材料清洗刻蚀的高纯度臭氧浓缩工艺及装置
JP7630749B1 (ja) * 2024-07-09 2025-02-17 三菱電機株式会社 オゾン供給装置およびオゾン供給装置の運転方法
WO2025258560A1 (ja) * 2024-06-10 2025-12-18 国立研究開発法人物質・材料研究機構 オゾン発生器、オゾン発生器の製造方法、オゾンを発生する発生方法、および、オゾン保存容器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09235103A (ja) * 1996-03-01 1997-09-09 Mitsubishi Electric Corp 電力貯蔵方法および装置
JPH09235104A (ja) * 1996-03-01 1997-09-09 Mitsubishi Electric Corp オゾン貯蔵方法およびオゾン貯蔵装置
WO2020245885A1 (ja) * 2019-06-03 2020-12-10 三菱電機株式会社 オゾン供給装置およびオゾン供給方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09235103A (ja) * 1996-03-01 1997-09-09 Mitsubishi Electric Corp 電力貯蔵方法および装置
JPH09235104A (ja) * 1996-03-01 1997-09-09 Mitsubishi Electric Corp オゾン貯蔵方法およびオゾン貯蔵装置
WO2020245885A1 (ja) * 2019-06-03 2020-12-10 三菱電機株式会社 オゾン供給装置およびオゾン供給方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025258560A1 (ja) * 2024-06-10 2025-12-18 国立研究開発法人物質・材料研究機構 オゾン発生器、オゾン発生器の製造方法、オゾンを発生する発生方法、および、オゾン保存容器
JP7630749B1 (ja) * 2024-07-09 2025-02-17 三菱電機株式会社 オゾン供給装置およびオゾン供給装置の運転方法
CN119330308A (zh) * 2024-12-20 2025-01-21 山东志伟环保科技有限公司 应用于半导体材料清洗刻蚀的高纯度臭氧浓缩工艺及装置

Also Published As

Publication number Publication date
CN120303211A (zh) 2025-07-11
JPWO2024127482A1 (https=) 2024-06-20
WO2024127482A1 (ja) 2024-06-20

Similar Documents

Publication Publication Date Title
JP7292554B1 (ja) オゾン供給装置およびオゾン供給方法
US9403118B2 (en) Nitrogen-enriched gas manufacturing method, gas separation method and nitrogen-enriched gas manufacturing apparatus
EP1459798B1 (en) Gas separation method and device
US20130061750A1 (en) Method and apparatus for concentrating ozone gas
JPWO2024127482A5 (https=)
KR101525505B1 (ko) 오존가스 농축 방법 및 그 장치
JP7024916B1 (ja) オゾン供給装置及びオゾン供給方法
TWI720164B (zh) 臭氧氣體的濃縮方法、以及臭氧氣體的濃縮裝置
KR102180199B1 (ko) 오존 가스의 농축 방법, 및 오존 가스의 농축 장치
CN116419794A (zh) 气体分离方法和气体分离装置
CN113874317B (zh) 臭氧供给装置及臭氧供给方法
JP5427412B2 (ja) オゾンガス濃縮方法及びその装置
JPH09142807A (ja) オゾン濃縮貯蔵装置とその制御方法
JP7263882B2 (ja) 二酸化炭素回収装置、炭化水素製造装置、および、二酸化炭素回収方法
JP2010076971A (ja) 循環式オゾン発生方法およびその装置
CN113614031A (zh) 臭氧供给装置以及臭氧供给方法
JP2000290004A (ja) オゾン供給装置及び方法
WO2013114707A1 (ja) 製品ガス供給方法、及び製品ガス供給システム
JP2013094753A (ja) 気体吸着装置のパージ方法及び気体吸着装置
US5277040A (en) Circulation type gas purification apparatus and method of operating the same
JP2001172004A (ja) オゾン供給装置及び方法
JP3806590B2 (ja) 高濃度オゾンガスの定圧供給方法
JPH1190159A (ja) 高濃度オゾンの供給方法及び装置
WO2025057476A1 (ja) ガス分離方法及びガス分離装置
JP2010083728A (ja) 空気によるオゾン脱着方法およびオゾン貯蔵脱着装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230301

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20230301

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20230301

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20230509

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20230606

R151 Written notification of patent or utility model registration

Ref document number: 7292554

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151