CN120303211A - 臭氧供给装置及臭氧供给方法 - Google Patents

臭氧供给装置及臭氧供给方法 Download PDF

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Publication number
CN120303211A
CN120303211A CN202280102168.6A CN202280102168A CN120303211A CN 120303211 A CN120303211 A CN 120303211A CN 202280102168 A CN202280102168 A CN 202280102168A CN 120303211 A CN120303211 A CN 120303211A
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CN
China
Prior art keywords
ozone
gas
adsorption
desorption
concentration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280102168.6A
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English (en)
Chinese (zh)
Inventor
松浦洋航
生沼学
古贺大道
安永望
有马芳明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
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Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of CN120303211A publication Critical patent/CN120303211A/zh
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/10—Preparation of ozone
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
    • Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
CN202280102168.6A 2022-12-13 2022-12-13 臭氧供给装置及臭氧供给方法 Pending CN120303211A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/045773 WO2024127482A1 (ja) 2022-12-13 2022-12-13 オゾン供給装置およびオゾン供給方法

Publications (1)

Publication Number Publication Date
CN120303211A true CN120303211A (zh) 2025-07-11

Family

ID=86729209

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280102168.6A Pending CN120303211A (zh) 2022-12-13 2022-12-13 臭氧供给装置及臭氧供给方法

Country Status (3)

Country Link
JP (1) JP7292554B1 (https=)
CN (1) CN120303211A (https=)
WO (1) WO2024127482A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025258560A1 (ja) * 2024-06-10 2025-12-18 国立研究開発法人物質・材料研究機構 オゾン発生器、オゾン発生器の製造方法、オゾンを発生する発生方法、および、オゾン保存容器
JP7630749B1 (ja) * 2024-07-09 2025-02-17 三菱電機株式会社 オゾン供給装置およびオゾン供給装置の運転方法
CN119330308B (zh) * 2024-12-20 2025-03-21 山东志伟环保科技有限公司 应用于半导体材料清洗刻蚀的高纯度臭氧浓缩工艺及装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4101314B2 (ja) * 1996-03-01 2008-06-18 三菱電機株式会社 電力変換貯蔵方法および装置
JP3980091B2 (ja) * 1996-03-01 2007-09-19 三菱電機株式会社 オゾン貯蔵装置
JP6607337B1 (ja) * 2019-06-03 2019-11-20 三菱電機株式会社 オゾン供給装置およびオゾン供給方法

Also Published As

Publication number Publication date
JP7292554B1 (ja) 2023-06-16
JPWO2024127482A1 (https=) 2024-06-20
WO2024127482A1 (ja) 2024-06-20

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