JP7288508B2 - 圧電フィルム - Google Patents
圧電フィルム Download PDFInfo
- Publication number
- JP7288508B2 JP7288508B2 JP2021527526A JP2021527526A JP7288508B2 JP 7288508 B2 JP7288508 B2 JP 7288508B2 JP 2021527526 A JP2021527526 A JP 2021527526A JP 2021527526 A JP2021527526 A JP 2021527526A JP 7288508 B2 JP7288508 B2 JP 7288508B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- piezoelectric film
- porosity
- region
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000010410 layer Substances 0.000 claims description 128
- 239000011241 protective layer Substances 0.000 claims description 81
- 229920000642 polymer Polymers 0.000 claims description 66
- 239000000463 material Substances 0.000 claims description 51
- 239000002245 particle Substances 0.000 claims description 51
- 239000002131 composite material Substances 0.000 claims description 39
- 239000002861 polymer material Substances 0.000 claims description 34
- 239000011159 matrix material Substances 0.000 claims description 32
- 125000001731 2-cyanoethyl group Chemical group [H]C([H])(*)C([H])([H])C#N 0.000 claims description 7
- 239000000919 ceramic Substances 0.000 claims description 4
- 239000004372 Polyvinyl alcohol Substances 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims description 3
- 229920002451 polyvinyl alcohol Polymers 0.000 claims description 3
- 229910052984 zinc sulfide Inorganic materials 0.000 claims description 3
- 239000010408 film Substances 0.000 description 295
- 239000010409 thin film Substances 0.000 description 63
- 238000011282 treatment Methods 0.000 description 55
- 230000010287 polarization Effects 0.000 description 41
- 238000010438 heat treatment Methods 0.000 description 38
- 238000007906 compression Methods 0.000 description 33
- 230000006835 compression Effects 0.000 description 29
- 238000000034 method Methods 0.000 description 24
- 238000003490 calendering Methods 0.000 description 23
- 238000004519 manufacturing process Methods 0.000 description 21
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 16
- 239000003973 paint Substances 0.000 description 15
- 238000012545 processing Methods 0.000 description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 11
- 230000008602 contraction Effects 0.000 description 11
- 229910052802 copper Inorganic materials 0.000 description 11
- 239000010949 copper Substances 0.000 description 11
- 238000000576 coating method Methods 0.000 description 10
- 238000012360 testing method Methods 0.000 description 10
- 230000008859 change Effects 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 9
- 238000010030 laminating Methods 0.000 description 9
- 229920000139 polyethylene terephthalate Polymers 0.000 description 9
- 239000005020 polyethylene terephthalate Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 238000003825 pressing Methods 0.000 description 8
- 229920005989 resin Polymers 0.000 description 8
- 239000011347 resin Substances 0.000 description 8
- 239000000853 adhesive Substances 0.000 description 7
- 230000001070 adhesive effect Effects 0.000 description 7
- 239000012790 adhesive layer Substances 0.000 description 7
- 230000006866 deterioration Effects 0.000 description 7
- 230000005684 electric field Effects 0.000 description 7
- 238000005259 measurement Methods 0.000 description 7
- 238000001878 scanning electron micrograph Methods 0.000 description 7
- 238000005452 bending Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 6
- 230000007423 decrease Effects 0.000 description 6
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 229920001577 copolymer Polymers 0.000 description 5
- 230000007547 defect Effects 0.000 description 5
- -1 polyethylene Polymers 0.000 description 5
- 230000009467 reduction Effects 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- 238000001771 vacuum deposition Methods 0.000 description 5
- 238000004804 winding Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 239000006185 dispersion Substances 0.000 description 4
- 230000002349 favourable effect Effects 0.000 description 4
- 230000009477 glass transition Effects 0.000 description 4
- 239000003960 organic solvent Substances 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005401 electroluminescence Methods 0.000 description 3
- 239000011491 glass wool Substances 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- RSWGJHLUYNHPMX-UHFFFAOYSA-N Abietic-Saeure Natural products C12CCC(C(C)C)=CC2=CCC2C1(C)CCCC2(C)C(O)=O RSWGJHLUYNHPMX-UHFFFAOYSA-N 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 2
- 229920002284 Cellulose triacetate Polymers 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000002033 PVDF binder Substances 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 2
- 239000004697 Polyetherimide Substances 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
- KHPCPRHQVVSZAH-HUOMCSJISA-N Rosin Natural products O(C/C=C/c1ccccc1)[C@H]1[C@H](O)[C@@H](O)[C@@H](O)[C@@H](CO)O1 KHPCPRHQVVSZAH-HUOMCSJISA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 2
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 229920002647 polyamide Polymers 0.000 description 2
- 229920001601 polyetherimide Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 229920000131 polyvinylidene Polymers 0.000 description 2
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 150000003505 terpenes Chemical class 0.000 description 2
- 235000007586 terpenes Nutrition 0.000 description 2
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- 210000002268 wool Anatomy 0.000 description 2
- KXJGSNRAQWDDJT-UHFFFAOYSA-N 1-acetyl-5-bromo-2h-indol-3-one Chemical compound BrC1=CC=C2N(C(=O)C)CC(=O)C2=C1 KXJGSNRAQWDDJT-UHFFFAOYSA-N 0.000 description 1
- VKNASXZDGZNEDA-UHFFFAOYSA-N 2-cyanoethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCC#N VKNASXZDGZNEDA-UHFFFAOYSA-N 0.000 description 1
- AEPWOCLBLLCOGZ-UHFFFAOYSA-N 2-cyanoethyl prop-2-enoate Chemical compound C=CC(=O)OCCC#N AEPWOCLBLLCOGZ-UHFFFAOYSA-N 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- UZELHCAPQBLLSH-HFYYSOHNSA-N C(#N)CCC(O)[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO Chemical compound C(#N)CCC(O)[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO UZELHCAPQBLLSH-HFYYSOHNSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 241000238631 Hexapoda Species 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical group Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- 239000004354 Hydroxyethyl cellulose Substances 0.000 description 1
- 229920000663 Hydroxyethyl cellulose Polymers 0.000 description 1
- VQTUBCCKSQIDNK-UHFFFAOYSA-N Isobutene Chemical group CC(C)=C VQTUBCCKSQIDNK-UHFFFAOYSA-N 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229920000459 Nitrile rubber Polymers 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 229920001328 Polyvinylidene chloride Polymers 0.000 description 1
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229920001807 Urea-formaldehyde Polymers 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- 229920000180 alkyd Polymers 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 229920001400 block copolymer Polymers 0.000 description 1
- 238000005537 brownian motion Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000008199 coating composition Substances 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 125000004093 cyano group Chemical group *C#N 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 235000019447 hydroxyethyl cellulose Nutrition 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 125000005395 methacrylic acid group Chemical group 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000000123 paper Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920001084 poly(chloroprene) Polymers 0.000 description 1
- 229920001083 polybutene Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920005672 polyolefin resin Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920006327 polystyrene foam Polymers 0.000 description 1
- 239000011118 polyvinyl acetate Substances 0.000 description 1
- 229920002689 polyvinyl acetate Polymers 0.000 description 1
- 239000005033 polyvinylidene chloride Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000035807 sensation Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 229920003051 synthetic elastomer Polymers 0.000 description 1
- 239000005061 synthetic rubber Substances 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
- 210000001260 vocal cord Anatomy 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
- H10N30/874—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices embedded within piezoelectric or electrostrictive material, e.g. via connections
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
- H04R17/005—Piezoelectric transducers; Electrostrictive transducers using a piezoelectric polymer
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R7/00—Diaphragms for electromechanical transducers; Cones
- H04R7/16—Mounting or tensioning of diaphragms or cones
- H04R7/18—Mounting or tensioning of diaphragms or cones at the periphery
- H04R7/20—Securing diaphragm or cone resiliently to support by flexible material, springs, cords, or strands
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/852—Composite materials, e.g. having 1-3 or 2-2 type connectivity
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/857—Macromolecular compositions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
- H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Multimedia (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Composite Materials (AREA)
- Materials Engineering (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019121161 | 2019-06-28 | ||
| JP2019121161 | 2019-06-28 | ||
| PCT/JP2020/021306 WO2020261877A1 (ja) | 2019-06-28 | 2020-05-29 | 圧電フィルム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2020261877A1 JPWO2020261877A1 (ko) | 2020-12-30 |
| JP7288508B2 true JP7288508B2 (ja) | 2023-06-07 |
Family
ID=74060856
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021527526A Active JP7288508B2 (ja) | 2019-06-28 | 2020-05-29 | 圧電フィルム |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US11930714B2 (ko) |
| EP (1) | EP3993439A4 (ko) |
| JP (1) | JP7288508B2 (ko) |
| KR (1) | KR102649798B1 (ko) |
| CN (1) | CN114026882A (ko) |
| TW (1) | TW202101791A (ko) |
| WO (1) | WO2020261877A1 (ko) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023286544A1 (ja) * | 2021-07-12 | 2023-01-19 | 富士フイルム株式会社 | 圧電フィルム |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011122416A1 (ja) | 2010-03-31 | 2011-10-06 | 日本碍子株式会社 | 圧電素子使用装置 |
| JP2011216661A (ja) | 2010-03-31 | 2011-10-27 | Nitto Denko Corp | 圧電・焦電素子用多孔質樹脂シート及びその製造方法 |
| JP2014162685A (ja) | 2013-02-26 | 2014-09-08 | Fujifilm Corp | 酸化物粒子、圧電素子および酸化物粒子の製造方法 |
| US20140333184A1 (en) | 2013-05-10 | 2014-11-13 | Wisconsin Alumni Research Foundation | Nanoporous piezoelectric polymer films for mechanical energy harvesting |
| JP2014212307A (ja) | 2013-04-01 | 2014-11-13 | 富士フイルム株式会社 | 電気音響変換フィルム |
| WO2016017632A1 (ja) | 2014-07-31 | 2016-02-04 | 富士フイルム株式会社 | 電気音響変換フィルムおよび電気音響変換器 |
| JP2017152468A (ja) | 2016-02-23 | 2017-08-31 | 東京応化工業株式会社 | 圧電素子、センサ、アクチュエータ、及び圧電素子の製造方法 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4732717A (en) * | 1985-10-11 | 1988-03-22 | Sumitomo Bakelite Company Limited | Process for producing piezo-electric or pyro-electric composite sheet |
| US5796207A (en) * | 1997-04-28 | 1998-08-18 | Rutgers, The State University Of New Jersey | Oriented piezo electric ceramics and ceramic/polymer composites |
| US6296667B1 (en) * | 1997-10-01 | 2001-10-02 | Phillips-Origen Ceramic Technology, Llc | Bone substitutes |
| US6977095B1 (en) * | 1997-10-01 | 2005-12-20 | Wright Medical Technology Inc. | Process for producing rigid reticulated articles |
| US6136029A (en) * | 1997-10-01 | 2000-10-24 | Phillips-Origen Ceramic Technology, Llc | Bone substitute materials |
| US5951908A (en) * | 1998-01-07 | 1999-09-14 | Alliedsignal Inc. | Piezoelectrics and related devices from ceramics dispersed in polymers |
| FR2911961B1 (fr) * | 2007-01-26 | 2012-04-06 | Electricite De France | Capteur acoustique de mesure de la pression et/ou de la masse molaire d'un gaz dans une enceinte cylindrique et procede de mesure correspondant |
| US20230266291A1 (en) * | 2011-06-17 | 2023-08-24 | James J. Myrick | Sensors and sensing methods |
| TW201418047A (zh) | 2012-11-14 | 2014-05-16 | Univ Nat Taiwan | 壓電薄膜及其製造方法 |
| NZ711183A (en) * | 2013-03-15 | 2019-12-20 | Nano Composite Products Inc | Composite material used as a strain gauge |
| US10079336B2 (en) * | 2014-01-13 | 2018-09-18 | Meggitt A/S | Flexible piezoelectric material, production and use thereof |
| WO2016143469A1 (ja) * | 2015-03-12 | 2016-09-15 | 富士フイルム株式会社 | 高分子複合圧電体、電気音響変換フィルムおよび電気音響変換器 |
| US20220305719A1 (en) * | 2021-03-23 | 2022-09-29 | Xerox Corporation | Piezoelectric composite filaments and use thereof in additive manufacturing |
-
2020
- 2020-05-29 EP EP20833055.5A patent/EP3993439A4/en active Pending
- 2020-05-29 WO PCT/JP2020/021306 patent/WO2020261877A1/ja active Application Filing
- 2020-05-29 JP JP2021527526A patent/JP7288508B2/ja active Active
- 2020-05-29 KR KR1020217039323A patent/KR102649798B1/ko active IP Right Grant
- 2020-05-29 CN CN202080045002.6A patent/CN114026882A/zh active Pending
- 2020-06-02 TW TW109118483A patent/TW202101791A/zh unknown
-
2021
- 2021-12-15 US US17/551,206 patent/US11930714B2/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011122416A1 (ja) | 2010-03-31 | 2011-10-06 | 日本碍子株式会社 | 圧電素子使用装置 |
| JP2011216661A (ja) | 2010-03-31 | 2011-10-27 | Nitto Denko Corp | 圧電・焦電素子用多孔質樹脂シート及びその製造方法 |
| JP2014162685A (ja) | 2013-02-26 | 2014-09-08 | Fujifilm Corp | 酸化物粒子、圧電素子および酸化物粒子の製造方法 |
| JP2014212307A (ja) | 2013-04-01 | 2014-11-13 | 富士フイルム株式会社 | 電気音響変換フィルム |
| US20140333184A1 (en) | 2013-05-10 | 2014-11-13 | Wisconsin Alumni Research Foundation | Nanoporous piezoelectric polymer films for mechanical energy harvesting |
| WO2016017632A1 (ja) | 2014-07-31 | 2016-02-04 | 富士フイルム株式会社 | 電気音響変換フィルムおよび電気音響変換器 |
| JP2017152468A (ja) | 2016-02-23 | 2017-08-31 | 東京応化工業株式会社 | 圧電素子、センサ、アクチュエータ、及び圧電素子の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2020261877A1 (ko) | 2020-12-30 |
| CN114026882A (zh) | 2022-02-08 |
| US20220109096A1 (en) | 2022-04-07 |
| WO2020261877A1 (ja) | 2020-12-30 |
| KR102649798B1 (ko) | 2024-03-20 |
| EP3993439A1 (en) | 2022-05-04 |
| US11930714B2 (en) | 2024-03-12 |
| KR20220004724A (ko) | 2022-01-11 |
| EP3993439A4 (en) | 2022-11-30 |
| TW202101791A (zh) | 2021-01-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP7355819B2 (ja) | 圧電フィルム | |
| US20220384706A1 (en) | Piezoelectric film | |
| KR102617510B1 (ko) | 고분자 복합 압전체 및 압전 필름 | |
| JP7177268B2 (ja) | 高分子複合圧電体および圧電フィルム | |
| JP7288508B2 (ja) | 圧電フィルム | |
| WO2022190715A1 (ja) | 圧電フィルム | |
| WO2024062863A1 (ja) | 圧電フィルム | |
| TWI836088B (zh) | 壓電薄膜 | |
| WO2023026726A1 (ja) | 圧電フィルムおよび圧電素子 | |
| WO2023021920A1 (ja) | 圧電フィルムおよび積層圧電素子 | |
| US20240163615A1 (en) | Piezoelectric film and laminated piezoelectric element | |
| WO2022209854A1 (ja) | 圧電フィルム | |
| WO2023188929A1 (ja) | 圧電フィルム、圧電素子、および、電気音響変換器 | |
| WO2023149075A1 (ja) | 圧電フィルム | |
| WO2023188966A1 (ja) | 圧電フィルム、圧電素子、および、電気音響変換器 | |
| JP7394873B2 (ja) | 圧電フィルム | |
| US20230363284A1 (en) | Piezoelectric film | |
| WO2022190807A1 (ja) | 圧電フィルムおよび積層圧電素子 | |
| WO2022210092A1 (ja) | 圧電フィルム | |
| WO2023047958A1 (ja) | 積層圧電素子および電気音響変換器 | |
| US20230422626A1 (en) | Piezoelectric film | |
| WO2022215524A1 (ja) | 圧電フィルム |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20211129 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20221025 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20221219 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230201 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230523 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230526 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 7288508 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |