JP7283428B2 - 発光装置 - Google Patents
発光装置 Download PDFInfo
- Publication number
- JP7283428B2 JP7283428B2 JP2020055744A JP2020055744A JP7283428B2 JP 7283428 B2 JP7283428 B2 JP 7283428B2 JP 2020055744 A JP2020055744 A JP 2020055744A JP 2020055744 A JP2020055744 A JP 2020055744A JP 7283428 B2 JP7283428 B2 JP 7283428B2
- Authority
- JP
- Japan
- Prior art keywords
- light emitting
- semiconductor layer
- emitting element
- film
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 claims description 369
- 239000000758 substrate Substances 0.000 claims description 26
- 239000003086 colorant Substances 0.000 claims description 7
- 238000009792 diffusion process Methods 0.000 description 22
- 238000005530 etching Methods 0.000 description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 11
- 230000004888 barrier function Effects 0.000 description 11
- 239000001301 oxygen Substances 0.000 description 11
- 229910052760 oxygen Inorganic materials 0.000 description 11
- 238000001312 dry etching Methods 0.000 description 10
- 230000004048 modification Effects 0.000 description 10
- 238000012986 modification Methods 0.000 description 10
- 239000007789 gas Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000001020 plasma etching Methods 0.000 description 4
- 238000009832 plasma treatment Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000000137 annealing Methods 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 229910021478 group 5 element Inorganic materials 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
- H10H29/10—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00
- H10H29/14—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00 comprising multiple light-emitting semiconductor components
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/83—Electrodes
- H10H20/831—Electrodes characterised by their shape
- H10H20/8312—Electrodes characterised by their shape extending at least partially through the bodies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/83—Electrodes
- H10H20/832—Electrodes characterised by their material
- H10H20/833—Transparent materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
- H10H20/852—Encapsulations
- H10H20/853—Encapsulations characterised by their shape
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
- H10H20/857—Interconnections, e.g. lead-frames, bond wires or solder balls
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
- H10H29/10—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00
- H10H29/14—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00 comprising multiple light-emitting semiconductor components
- H10H29/142—Two-dimensional arrangements, e.g. asymmetric LED layout
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/83—Electrodes
- H10H20/831—Electrodes characterised by their shape
Landscapes
- Led Devices (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020055744A JP7283428B2 (ja) | 2020-03-26 | 2020-03-26 | 発光装置 |
| US17/172,169 US11764329B2 (en) | 2020-03-26 | 2021-02-10 | Light emitting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020055744A JP7283428B2 (ja) | 2020-03-26 | 2020-03-26 | 発光装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2021158179A JP2021158179A (ja) | 2021-10-07 |
| JP2021158179A5 JP2021158179A5 (enExample) | 2022-06-27 |
| JP7283428B2 true JP7283428B2 (ja) | 2023-05-30 |
Family
ID=77856473
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020055744A Active JP7283428B2 (ja) | 2020-03-26 | 2020-03-26 | 発光装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US11764329B2 (enExample) |
| JP (1) | JP7283428B2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7052742B2 (ja) * | 2019-01-23 | 2022-04-12 | 豊田合成株式会社 | 発光素子 |
| KR20220149865A (ko) * | 2021-04-30 | 2022-11-09 | 삼성디스플레이 주식회사 | 표시 장치 및 표시 장치의 제조 방법 |
| JP7639774B2 (ja) * | 2022-06-02 | 2025-03-05 | 豊田合成株式会社 | 発光素子および発光素子の製造方法 |
| JP7677239B2 (ja) * | 2022-06-02 | 2025-05-15 | 豊田合成株式会社 | 発光素子および発光素子の製造方法 |
| JP2023178173A (ja) * | 2022-06-02 | 2023-12-14 | 豊田合成株式会社 | Iii族窒化物半導体の製造方法 |
| JP7740173B2 (ja) * | 2022-09-01 | 2025-09-17 | 豊田合成株式会社 | Ledディスプレイ素子およびその製造方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000516273A (ja) | 1996-08-06 | 2000-12-05 | ザ トラスティーズ オブ プリンストン ユニバーシティ | エレクトロルミネッセンス素子用の混合蒸着膜 |
| JP2010177460A (ja) | 2009-01-29 | 2010-08-12 | Stanley Electric Co Ltd | 半導体発光素子及びその製造方法 |
| JP2014175338A (ja) | 2013-03-06 | 2014-09-22 | Stanley Electric Co Ltd | 半導体発光素子及びその製造方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5772235A (en) * | 1980-10-20 | 1982-05-06 | Matsushita Electric Ind Co Ltd | Transparent electrode and production thereof |
| JP3713725B2 (ja) * | 1994-09-28 | 2005-11-09 | 富士ゼロックス株式会社 | 半導体レーザ装置、その製造方法およびその駆動方法 |
| JPH09205250A (ja) * | 1996-01-26 | 1997-08-05 | Fuji Xerox Co Ltd | 横方向電流注入型面発光半導体レーザ装置およびその製造方法 |
| JP3719467B2 (ja) * | 1997-05-16 | 2005-11-24 | 日本オプネクスト株式会社 | 光半導体装置 |
| KR20080054402A (ko) | 2005-09-19 | 2008-06-17 | 코닌클리즈케 필립스 일렉트로닉스 엔.브이. | 가변 컬러 발광 장치와, 그를 포함하는 조명 시스템, 조명시스템 네트워크 및 어셈블리, 및 그를 위한 제어기 및제어 방법 |
| KR20110132160A (ko) * | 2010-06-01 | 2011-12-07 | 삼성엘이디 주식회사 | 반도체 발광 소자 및 그 제조방법 |
| US20130270514A1 (en) * | 2012-04-16 | 2013-10-17 | Adam William Saxler | Low resistance bidirectional junctions in wide bandgap semiconductor materials |
| US12300770B2 (en) * | 2021-03-03 | 2025-05-13 | Toyoda Gosei Co., Ltd. | Flip-chip mounted monolithic micro LED display element including a plurality of light-emitting parts arranged in a matrix |
-
2020
- 2020-03-26 JP JP2020055744A patent/JP7283428B2/ja active Active
-
2021
- 2021-02-10 US US17/172,169 patent/US11764329B2/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000516273A (ja) | 1996-08-06 | 2000-12-05 | ザ トラスティーズ オブ プリンストン ユニバーシティ | エレクトロルミネッセンス素子用の混合蒸着膜 |
| JP2010177460A (ja) | 2009-01-29 | 2010-08-12 | Stanley Electric Co Ltd | 半導体発光素子及びその製造方法 |
| JP2014175338A (ja) | 2013-03-06 | 2014-09-22 | Stanley Electric Co Ltd | 半導体発光素子及びその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2021158179A (ja) | 2021-10-07 |
| US11764329B2 (en) | 2023-09-19 |
| US20210305457A1 (en) | 2021-09-30 |
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