JP7262280B2 - ダイヤフラムバルブ - Google Patents
ダイヤフラムバルブ Download PDFInfo
- Publication number
- JP7262280B2 JP7262280B2 JP2019071929A JP2019071929A JP7262280B2 JP 7262280 B2 JP7262280 B2 JP 7262280B2 JP 2019071929 A JP2019071929 A JP 2019071929A JP 2019071929 A JP2019071929 A JP 2019071929A JP 7262280 B2 JP7262280 B2 JP 7262280B2
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- valve
- conductive
- drive unit
- fluororesin material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000463 material Substances 0.000 claims description 57
- 230000005611 electricity Effects 0.000 claims description 19
- 230000002093 peripheral effect Effects 0.000 claims description 19
- 230000003068 static effect Effects 0.000 claims description 19
- 239000004020 conductor Substances 0.000 claims description 13
- 239000006229 carbon black Substances 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 7
- 239000002041 carbon nanotube Substances 0.000 claims description 7
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 7
- 238000007599 discharging Methods 0.000 claims description 4
- 229920002313 fluoropolymer Polymers 0.000 claims 2
- 239000012530 fluid Substances 0.000 description 53
- 239000002245 particle Substances 0.000 description 28
- 238000004519 manufacturing process Methods 0.000 description 12
- 239000012528 membrane Substances 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 8
- 238000011109 contamination Methods 0.000 description 6
- 239000010408 film Substances 0.000 description 5
- 239000002033 PVDF binder Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 235000013305 food Nutrition 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000001629 suppression Effects 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 238000000748 compression moulding Methods 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- -1 for example Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
- F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K41/00—Spindle sealings
- F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
- F16K41/103—Spindle sealings with diaphragm, e.g. shaped as bellows or tube the diaphragm and the closure member being integrated in one member
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/02—Elements
- C08K3/04—Carbon
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/02—Elements
- C08K3/04—Carbon
- C08K3/041—Carbon nanotubes
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L101/00—Compositions of unspecified macromolecular compounds
- C08L101/02—Compositions of unspecified macromolecular compounds characterised by the presence of specified groups, e.g. terminal or pendant functional groups
- C08L101/04—Compositions of unspecified macromolecular compounds characterised by the presence of specified groups, e.g. terminal or pendant functional groups containing halogen atoms
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K25/00—Details relating to contact between valve members and seats
- F16K25/005—Particular materials for seats or closure elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
- F16K27/0236—Diaphragm cut-off apparatus
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
- F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
- H05F3/00—Carrying-off electrostatic charges
- H05F3/02—Carrying-off electrostatic charges by means of earthing connections
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Fluid Mechanics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Nanotechnology (AREA)
- Fluid-Driven Valves (AREA)
- Details Of Valves (AREA)
Description
11´ トグルバルブ
13 弁本体
15 ダイヤフラム
15a 弁体部
15b 膜部
15c 当接部分
15d 非当接部分
17 駆動部
19 弁室
25 流入路
29 流出路
31 駆動部筐体
35 ステム
Claims (8)
- 弁室と該弁室に連通する第1の流路及び第2の流路とが形成された弁本体と、前記弁室に形成された環状の弁座と、前記弁座に接離するダイヤフラムと、該ダイヤフラムを駆動する駆動部とを備え、前記弁座に対する前記ダイヤフラムの接離により前記第1の流路と前記第2の流路との間の開閉を行うダイヤフラムバルブであって、
前記駆動部の駆動部筐体が前記弁本体との間に前記ダイヤフラムの外周縁部を挟持するように前記弁本体に連結されており、前記駆動部筐体が導電性フッ素樹脂材料から形成されていると共に、前記ダイヤフラムにおいて前記弁座と当接する部分が非導電性フッ素樹脂材料から形成され、前記ダイヤフラムの残余の部分が導電性フッ素樹脂材料から形成されており、前記導電性フッ素樹脂材料は、フッ素樹脂材料に導電性材料を配合してなることを特徴とするダイヤフラムバルブ。 - 前記駆動部が、前記ダイヤフラムに連結されるステムと、前記ステムを駆動するための駆動機構とをさらに含み、前記ステムが導電性フッ素樹脂材料から形成される、請求項1に記載のダイヤフラムバルブ。
- 前記ダイヤフラムに隣接する前記駆動部の構成部品が全て導電性フッ素樹脂材料から形成されている、請求項2に記載のダイヤフラムバルブ。
- 前記駆動機構が前記駆動部筐体内に往復動可能に収容されるピストンを含み、前記ステムが前記ピストンに連結されており、前記ピストンの往復動によって駆動される、請求項3に記載のダイヤフラムバルブ。
- 前記ピストンが導電性フッ素樹脂材料から形成される、請求項4に記載のダイヤフラムバルブ。
- 前記ダイヤフラムが、前記弁座に当接する弁体部と、該弁体部から延びる環状の膜部とを含み、前記膜部の外周縁部が前記弁本体と前記駆動部筐体との間に挟持されている、請求項1から請求項5の何れか一項に記載のダイヤフラムバルブ。
- 前記ダイヤフラム又は前記駆動部筐体に、静電気を外部に逃がすアース要素が接続されている、請求項1から請求項6に記載のダイヤフラムバルブ。
- 前記導電性材料は、カーボンブラック又はカーボンナノチューブである、請求項1に記載のダイヤフラムバルブ。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020217034102A KR20210150428A (ko) | 2018-04-10 | 2020-04-03 | 다이어프램 밸브 |
PCT/JP2020/015350 WO2020204169A1 (ja) | 2018-04-10 | 2020-04-03 | ダイヤフラムバルブ |
US17/601,226 US11655913B2 (en) | 2018-04-10 | 2020-04-03 | Grounded diaphragm with conductive layer |
CN202080027085.6A CN113661349B (zh) | 2018-04-10 | 2020-04-03 | 隔膜阀 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018075232 | 2018-04-10 | ||
JP2018075232 | 2018-04-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019184063A JP2019184063A (ja) | 2019-10-24 |
JP7262280B2 true JP7262280B2 (ja) | 2023-04-21 |
Family
ID=68340513
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019071929A Active JP7262280B2 (ja) | 2018-04-10 | 2019-04-04 | ダイヤフラムバルブ |
Country Status (5)
Country | Link |
---|---|
US (1) | US11655913B2 (ja) |
JP (1) | JP7262280B2 (ja) |
KR (1) | KR20210150428A (ja) |
CN (1) | CN113661349B (ja) |
WO (1) | WO2020204169A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2024517189A (ja) * | 2021-04-30 | 2024-04-19 | インテグリス・インコーポレーテッド | 静電気放電緩和バルブ |
JP2023034749A (ja) * | 2021-08-31 | 2023-03-13 | アドバンス電気工業株式会社 | 流量制御弁及び流量制御弁の製造方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010121689A (ja) | 2008-11-19 | 2010-06-03 | Tokyo Electron Ltd | ダイヤフラム弁 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4357748A (en) * | 1978-08-23 | 1982-11-09 | Robertshaw Controls Company | Fluid flow sensing switch device method of making the same |
JPH0256979U (ja) * | 1988-10-19 | 1990-04-24 | ||
US6508266B2 (en) * | 2000-03-31 | 2003-01-21 | Toyo Stainless Steel Industries Co., Ltd. | Diaphragm valve |
JP2008115899A (ja) * | 2006-11-01 | 2008-05-22 | Tokyo Electron Ltd | ダイヤフラム弁および基板処理装置 |
JP4981564B2 (ja) * | 2007-07-18 | 2012-07-25 | シーケーディ株式会社 | ダイアフラム式流体機器 |
JP4990118B2 (ja) | 2007-12-18 | 2012-08-01 | シーケーディ株式会社 | 流体機器 |
JP5366649B2 (ja) * | 2009-05-15 | 2013-12-11 | トーステ株式会社 | 樹脂ダイヤフラム式流体制御弁 |
JP5180165B2 (ja) * | 2009-08-19 | 2013-04-10 | 株式会社コガネイ | ダイヤフラム弁 |
JP5891536B2 (ja) * | 2013-11-11 | 2016-03-23 | Smc株式会社 | 弁装置 |
JP5987100B1 (ja) * | 2015-10-16 | 2016-09-06 | サーパス工業株式会社 | 流体機器 |
JP6681723B2 (ja) * | 2016-01-25 | 2020-04-15 | 旭有機材株式会社 | バルブ装置 |
JP6874232B2 (ja) * | 2016-07-15 | 2021-05-19 | 旭有機材株式会社 | ダイヤフラムバルブ |
JP6691850B2 (ja) * | 2016-08-05 | 2020-05-13 | Ckd株式会社 | 流体制御装置 |
JP6106794B1 (ja) * | 2016-08-05 | 2017-04-05 | サーパス工業株式会社 | 流体機器 |
JP6857036B2 (ja) * | 2017-01-16 | 2021-04-14 | サーパス工業株式会社 | 流体機器 |
JP6985201B2 (ja) | 2017-03-31 | 2021-12-22 | 旭有機材株式会社 | バルブ装置 |
-
2019
- 2019-04-04 JP JP2019071929A patent/JP7262280B2/ja active Active
-
2020
- 2020-04-03 KR KR1020217034102A patent/KR20210150428A/ko not_active Application Discontinuation
- 2020-04-03 CN CN202080027085.6A patent/CN113661349B/zh active Active
- 2020-04-03 WO PCT/JP2020/015350 patent/WO2020204169A1/ja active Application Filing
- 2020-04-03 US US17/601,226 patent/US11655913B2/en active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010121689A (ja) | 2008-11-19 | 2010-06-03 | Tokyo Electron Ltd | ダイヤフラム弁 |
Also Published As
Publication number | Publication date |
---|---|
US11655913B2 (en) | 2023-05-23 |
CN113661349B (zh) | 2024-05-14 |
CN113661349A (zh) | 2021-11-16 |
JP2019184063A (ja) | 2019-10-24 |
US20220163137A1 (en) | 2022-05-26 |
WO2020204169A1 (ja) | 2020-10-08 |
KR20210150428A (ko) | 2021-12-10 |
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