JP7251673B2 - 基板処理装置、基板処理方法及び記憶媒体 - Google Patents

基板処理装置、基板処理方法及び記憶媒体 Download PDF

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JP7251673B2
JP7251673B2 JP2022070977A JP2022070977A JP7251673B2 JP 7251673 B2 JP7251673 B2 JP 7251673B2 JP 2022070977 A JP2022070977 A JP 2022070977A JP 2022070977 A JP2022070977 A JP 2022070977A JP 7251673 B2 JP7251673 B2 JP 7251673B2
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transfer
wafer
module
inspection
substrate
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JP2022109271A (ja
JP2022109271A5 (enExample
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征二 中野
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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JP2022070977A 2017-06-16 2022-04-22 基板処理装置、基板処理方法及び記憶媒体 Active JP7251673B2 (ja)

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JP2022070977A JP7251673B2 (ja) 2017-06-16 2022-04-22 基板処理装置、基板処理方法及び記憶媒体

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JP2017118807A JP6863114B2 (ja) 2017-06-16 2017-06-16 基板処理装置、基板処理方法及び記憶媒体
JP2021050585A JP7070748B2 (ja) 2017-06-16 2021-03-24 基板処理装置、基板処理方法及び記憶媒体
JP2022070977A JP7251673B2 (ja) 2017-06-16 2022-04-22 基板処理装置、基板処理方法及び記憶媒体

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JP2022109271A5 JP2022109271A5 (enExample) 2022-12-05
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002151564A (ja) 2000-10-26 2002-05-24 Leica Microsystems Jena Gmbh 基板供給モジュールおよび基板供給モジュールと作業ステーションからなるシステム
JP2005191340A (ja) 2003-12-26 2005-07-14 Shinko Electric Co Ltd ロードポート装置
JP2006229184A (ja) 2005-01-21 2006-08-31 Tokyo Electron Ltd 塗布、現像装置及びその方法
JP2011504288A (ja) 2007-05-18 2011-02-03 ブルックス オートメーション インコーポレイテッド 高速スワップロボット付コンパクト基板搬送システム
JP2013222949A (ja) 2012-04-19 2013-10-28 Tokyo Electron Ltd 基板処理装置、基板処理方法及び記憶媒体

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2526267B2 (ja) * 1988-03-07 1996-08-21 東京エレクトロン株式会社 処理装置
JP5338757B2 (ja) * 2010-07-09 2013-11-13 東京エレクトロン株式会社 塗布、現像装置、塗布、現像方法及び記憶媒体
JP5626167B2 (ja) * 2011-09-22 2014-11-19 東京エレクトロン株式会社 基板処理装置、基板処理方法及び記憶媒体
JP5702263B2 (ja) * 2011-11-04 2015-04-15 東京エレクトロン株式会社 基板処理システム、基板搬送方法、プログラム及びコンピュータ記憶媒体

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002151564A (ja) 2000-10-26 2002-05-24 Leica Microsystems Jena Gmbh 基板供給モジュールおよび基板供給モジュールと作業ステーションからなるシステム
JP2005191340A (ja) 2003-12-26 2005-07-14 Shinko Electric Co Ltd ロードポート装置
JP2006229184A (ja) 2005-01-21 2006-08-31 Tokyo Electron Ltd 塗布、現像装置及びその方法
JP2011504288A (ja) 2007-05-18 2011-02-03 ブルックス オートメーション インコーポレイテッド 高速スワップロボット付コンパクト基板搬送システム
JP2013222949A (ja) 2012-04-19 2013-10-28 Tokyo Electron Ltd 基板処理装置、基板処理方法及び記憶媒体

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