JP7246093B2 - 波面センサおよびその使用方法 - Google Patents

波面センサおよびその使用方法 Download PDF

Info

Publication number
JP7246093B2
JP7246093B2 JP2019551586A JP2019551586A JP7246093B2 JP 7246093 B2 JP7246093 B2 JP 7246093B2 JP 2019551586 A JP2019551586 A JP 2019551586A JP 2019551586 A JP2019551586 A JP 2019551586A JP 7246093 B2 JP7246093 B2 JP 7246093B2
Authority
JP
Japan
Prior art keywords
encoder
array
detection system
collected
coherence
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019551586A
Other languages
English (en)
Japanese (ja)
Other versions
JP2020515831A5 (enExample
JP2020515831A (ja
Inventor
バーラツズキー,ヨアブ
Original Assignee
ピーエックスイー コンピュテーショナル イメージング リミテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ピーエックスイー コンピュテーショナル イメージング リミテッド filed Critical ピーエックスイー コンピュテーショナル イメージング リミテッド
Publication of JP2020515831A publication Critical patent/JP2020515831A/ja
Publication of JP2020515831A5 publication Critical patent/JP2020515831A5/ja
Application granted granted Critical
Publication of JP7246093B2 publication Critical patent/JP7246093B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J2009/002Wavefront phase distribution
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G01J2009/0211Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods for measuring coherence

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP2019551586A 2017-04-06 2018-02-07 波面センサおよびその使用方法 Active JP7246093B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IL251636A IL251636B (en) 2017-04-06 2017-04-06 Coherence camera system and method thereof
IL251636 2017-04-06
PCT/IL2018/050135 WO2018185740A1 (en) 2017-04-06 2018-02-07 Wavefront sensor and method of using it

Publications (3)

Publication Number Publication Date
JP2020515831A JP2020515831A (ja) 2020-05-28
JP2020515831A5 JP2020515831A5 (enExample) 2021-03-18
JP7246093B2 true JP7246093B2 (ja) 2023-03-27

Family

ID=61274025

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019551586A Active JP7246093B2 (ja) 2017-04-06 2018-02-07 波面センサおよびその使用方法

Country Status (8)

Country Link
US (1) US11293806B2 (enExample)
EP (1) EP3607286B1 (enExample)
JP (1) JP7246093B2 (enExample)
KR (1) KR102537284B1 (enExample)
CN (1) CN110494723B (enExample)
CA (1) CA3059139A1 (enExample)
IL (1) IL251636B (enExample)
WO (1) WO2018185740A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220187138A1 (en) * 2020-12-14 2022-06-16 Gerchberg Ophthalmic Dispensing, PLLC Totagraphy: Coherent Diffractive/Digital Information Reconstruction by Iterative Phase Recovery Using Special Masks

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018083573A1 (en) * 2016-11-01 2018-05-11 King Abdullah University Of Science And Technology Wavefront sensor and method of reconstructing distorted wavefronts
JP7096520B2 (ja) * 2019-02-22 2022-07-06 日本電信電話株式会社 画像処理装置、画像処理方法及びプログラム
CN113050101B (zh) * 2019-12-26 2024-11-05 宁波飞芯电子科技有限公司 相干信号接收装置、方法以及相干探测系统
US12422251B2 (en) 2020-01-14 2025-09-23 Pxe Computational Imaging Ltd. System and method for optical imaging and measurement of objects
WO2021229575A1 (en) 2020-05-12 2021-11-18 Pxe Computation Imaging Ltd. System and method for digital optical aberration correction and spectral imaging
EP4160294A4 (en) * 2020-07-14 2024-06-26 National Institute of Information and Communications Technology Optical aberration correction program and optical wavefront estimation program
DE102020209580B3 (de) * 2020-07-30 2021-09-23 Carl Zeiss Smt Gmbh Verfahren zum Bestimmen einer mittels eines diffraktiven optischen Elements erzeugten Wellenfront, Verfahren zur Herstellung eines diffraktiven optischen Elements sowie Messvorrichtung zur interferometrischen Formvermessung einer Oberfläche eines Testobjekts
US12140774B2 (en) * 2020-12-02 2024-11-12 University Of Maryland, College Park Light field-based beam correction systems and methods
JP7780319B2 (ja) * 2021-12-17 2025-12-04 浜松ホトニクス株式会社 波面計測装置及び波面計測方法
CN116367003B (zh) * 2021-12-22 2023-10-20 荣耀终端有限公司 多光谱传感器以及电子设备
CN120112769A (zh) 2022-11-15 2025-06-06 赛纳瑞科技有限公司 成像系统和方法
WO2024246894A1 (en) 2023-05-31 2024-12-05 Pxe Computational Imaging Ltd Flat holographic camera
WO2025146678A1 (en) * 2024-01-04 2025-07-10 Pxe Computational Imaging Ltd Holographic camera and encoder mask thereof
CN117969677B (zh) * 2024-03-28 2024-07-26 之江实验室 基于编码相位成像的声场探测方法、系统、设备、介质

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006300876A (ja) 2005-04-25 2006-11-02 Nikon Corp 干渉測定方法
JP2009265101A (ja) 2008-04-22 2009-11-12 Onera (Office National D'etudes & De Recherches Aerospatiales) 光ビームの波面を解析するための方法、位相格子および装置
WO2015198331A1 (en) 2014-06-25 2015-12-30 Ramot At Tel-Aviv University Ltd. System and method for light-field imaging

Family Cites Families (76)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4141652A (en) * 1977-11-25 1979-02-27 Adaptive Optics Associates, Inc. Sensor system for detecting wavefront distortion in a return beam of light
US4682888A (en) * 1984-12-26 1987-07-28 Hughes Aircraft Company Spectral analyzer and direction indicator
US4737621A (en) * 1985-12-06 1988-04-12 Adaptive Optics Assoc., Inc. Integrated adaptive optical wavefront sensing and compensating system
US4950878A (en) * 1989-04-12 1990-08-21 Kaman Aerospace Corporation Wavefront control system using optical coarse/fine gradient sensor
US5486927A (en) 1991-08-19 1996-01-23 Konica Corporation Digital image forming apparatus using subdivided pixels
JPH05268059A (ja) 1992-03-19 1993-10-15 Hitachi Ltd 半導体集積回路装置
US5604417A (en) * 1991-12-19 1997-02-18 Hitachi, Ltd. Semiconductor integrated circuit device
US5410397A (en) * 1993-02-16 1995-04-25 The United States Of America As Represented By The United States Department Of Energy Method and apparatus for holographic wavefront diagnostics
US5412200A (en) * 1993-03-01 1995-05-02 Rhoads; Geoffrey B. Wide field distortion-compensating imaging system and methods
FR2712978B1 (fr) 1993-11-24 1996-02-02 Onera (Off Nat Aerospatiale) Interféromètre optique achromatique, du type à décalage trilatéral.
DE19800844A1 (de) 1998-01-13 1999-07-15 Johannes Prof Dr Schwider Shack-Hartmann-Sensor mit orts-varianter Linsenanordnung
FR2795175B1 (fr) 1999-06-17 2001-07-27 Onera (Off Nat Aerospatiale) Interferometre optique achromatique, du type a sensibilite continument reglable
US6565209B2 (en) * 2000-04-25 2003-05-20 Alcon Universal Ltd. Range-extending system and spatial filter for enhancing Hartmann-Shack images and associated methods
US6382793B1 (en) * 2000-05-20 2002-05-07 Carl Zeiss, Inc. Method and apparatus for measuring a wavefront
US20040042094A1 (en) * 2000-12-28 2004-03-04 Tomoyuki Matsuyama Projection optical system and production method therefor, exposure system and production method therefor, and production method for microdevice
DE10297208T5 (de) 2001-09-12 2005-01-05 Micronic Laser Systems Ab Verbessertes Verfahren und verbesserte Vorrichtung unter Verwendung eines SLM
US6639201B2 (en) * 2001-11-07 2003-10-28 Applied Materials, Inc. Spot grid array imaging system
US20040227932A1 (en) * 2003-02-13 2004-11-18 Geunyoung Yoon Large dynamic range shack-hartmann wavefront sensor
US7414712B2 (en) * 2003-02-13 2008-08-19 University Of Rochester Large dynamic range Shack-Hartmann wavefront sensor
JP2008523383A (ja) * 2004-12-10 2008-07-03 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ マルチスポット調査装置
US7777790B2 (en) * 2005-01-27 2010-08-17 Technion Research & Development Foundation Ltd. Acquisition of image sequences with enhanced resolution
WO2007044725A2 (en) * 2005-10-07 2007-04-19 The Board Of Trustees Of The Leland Stanford Junior University Microscopy arrangements and approaches
US8777413B2 (en) * 2006-01-20 2014-07-15 Clarity Medical Systems, Inc. Ophthalmic wavefront sensor operating in parallel sampling and lock-in detection mode
FR2896583B1 (fr) 2006-01-20 2008-10-17 Onera (Off Nat Aerospatiale) Interferometre optique achromatique et compact, du type a decalage trilateral
US7445335B2 (en) * 2006-01-20 2008-11-04 Clarity Medical Systems, Inc. Sequential wavefront sensor
WO2007092581A2 (en) * 2006-02-07 2007-08-16 The Board Of Trustees Of The Leland Stanford Junior University Correction of optical aberrations
US8822894B2 (en) * 2011-01-07 2014-09-02 California Institute Of Technology Light-field pixel for detecting a wavefront based on a first intensity normalized by a second intensity
US7792423B2 (en) * 2007-02-06 2010-09-07 Mitsubishi Electric Research Laboratories, Inc. 4D light field cameras
US8118429B2 (en) * 2007-10-29 2012-02-21 Amo Wavefront Sciences, Llc. Systems and methods of phase diversity wavefront sensing
US7780364B2 (en) * 2008-05-01 2010-08-24 Mitsubishi Electric Research Laboratories, Inc. Apparatus and method for reducing glare in images
EP2311092B1 (en) 2008-07-25 2021-01-27 Cornell University Light field image sensor, method and applications
NL2004942A (en) 2009-07-30 2011-01-31 Asml Netherlands Bv Lithographic apparatus and monitoring method.
EP2354840A1 (en) 2010-02-05 2011-08-10 Siemens Aktiengesellschaft An apparatus and a method for performing a difference measurement of an object image
JP5586986B2 (ja) 2010-02-23 2014-09-10 キヤノン株式会社 X線撮像装置
KR102009126B1 (ko) * 2010-03-19 2019-08-08 인비사지 테크놀로지스, 인크. 감지성 반도체 다이오드를 채용한 이미지 센서
US20110298912A1 (en) * 2010-06-02 2011-12-08 Honeywell International Inc. Wavefront sensing for biometric imaging
FR2962536B1 (fr) * 2010-07-06 2019-12-27 Commissariat A L'energie Atomique Et Aux Energies Alternatives Analyseur de front d'ondes a microlentilles a cristal liquide
US8405763B2 (en) * 2010-12-23 2013-03-26 Mitsubishi Electric Research Laboratories, Inc. Video camera for reconstructing varying spatio-temporal resolution videos
GB201112537D0 (en) 2011-07-21 2011-08-31 Ucl Business Plc X-ray imaging
US9182289B2 (en) * 2011-10-14 2015-11-10 Canon Kabushiki Kaisha Apparatus and method for estimating wavefront parameters
US9091862B2 (en) * 2012-07-24 2015-07-28 Trustees Of Boston University Partitioned aperture wavefront imaging method and system
JP6202499B2 (ja) 2012-09-27 2017-09-27 国立大学法人北海道大学 光位相測定方法、光位相測定装置および光通信装置
CN104769481B (zh) * 2012-10-12 2018-12-18 统雷有限公司 紧凑、低色散以及低像差自适应光学扫描系统
RU2012154657A (ru) 2012-12-17 2014-06-27 ЭлЭсАй Корпорейшн Способы и устройство для объединения изображений с глубиной, генерированных с использованием разных способов формирования изображений с глубиной
DE112013006324T5 (de) * 2012-12-31 2015-10-15 Iee International Electronics & Engineering S.A. Optisches System zur Erzeugung eines strukturierten Lichtfelds von einer Reihe von Lichtquellen durch ein brechendes oder reflektierendes Lichtstrukturierungselement
DE102013205406A1 (de) 2013-03-27 2014-10-16 Siemens Aktiengesellschaft Röntgenaufnahmesystem zur Röntgenbildgebung bei hohen Bildfrequenzen eines Untersuchungsobjekts mittels direkter Messung des Interferenzmusters
CN203163728U (zh) * 2013-04-07 2013-08-28 南京理工大学 多光谱光场相机
WO2014171256A1 (ja) 2013-04-16 2014-10-23 国立大学法人京都工芸繊維大学 計測装置
US9679360B2 (en) * 2013-05-10 2017-06-13 Trustees Of Princeton University High-resolution light-field imaging
JP6040103B2 (ja) * 2013-06-06 2016-12-07 浜松ホトニクス株式会社 補償光学システムの対応関係特定方法、補償光学システム、および補償光学システム用プログラム
JP6259825B2 (ja) * 2013-06-06 2018-01-10 浜松ホトニクス株式会社 補償光学システムの調整方法、補償光学システム、及び補償光学システム用プログラムを記憶する記録媒体
DE112014002681T5 (de) 2013-06-06 2016-03-17 Hamamatsu Photonics K.K. Verfahren zur Erfassung eines Winkelversatzes für adaptives Optiksystem, Verfahren zur Erfassung einer Abbildungsvergrößerung für adaptives Optiksystem und adaptives Optiksystem
DE112014002694B4 (de) 2013-06-06 2024-05-29 Hamamatsu Photonics K.K. Verfahren zur Bestimmung einer Übereinstimmungsbeziehung für ein adaptives Optiksystem, Verfahren zur Kompensation einer Wellenfrontverzerrung, adaptives Optiksystem und Speichermedium zur Speicherung eines Programms für ein adaptives Optiksystem
JP6494205B2 (ja) * 2013-07-31 2019-04-03 キヤノン株式会社 波面計測方法、形状計測方法、光学素子の製造方法、光学機器の製造方法、プログラム、波面計測装置
JP2015055544A (ja) * 2013-09-11 2015-03-23 キヤノン株式会社 波面計測装置、波面計測方法、光学素子の製造方法、および、光学システムの組み立て調整装置
US10203399B2 (en) * 2013-11-12 2019-02-12 Big Sky Financial Corporation Methods and apparatus for array based LiDAR systems with reduced interference
US9423306B2 (en) * 2014-01-03 2016-08-23 Ram Photonics, LLC Method and apparatus for wavefront sensing
US9360554B2 (en) 2014-04-11 2016-06-07 Facet Technology Corp. Methods and apparatus for object detection and identification in a multiple detector lidar array
WO2015191594A1 (en) 2014-06-10 2015-12-17 Hui Tian Layout and operation of pixels for image sensors
JP6508896B2 (ja) * 2014-08-08 2019-05-08 キヤノン株式会社 光波面センサにおける光スポット重心位置取得方法、光波面計測方法およびプログラム
US9689740B2 (en) * 2014-10-15 2017-06-27 The Boeing Company Diagnostic for spectrally combined laser
US9945718B2 (en) 2015-01-07 2018-04-17 Semiconductor Components Industries, Llc Image sensors with multi-functional pixel clusters
US9455285B2 (en) 2015-02-04 2016-09-27 Semiconductors Components Industries, Llc Image sensors with phase detection pixels
US9787889B2 (en) 2015-02-12 2017-10-10 Semiconductor Components Industries, Llc Dynamic auto focus zones for auto focus pixel systems
US9749556B2 (en) 2015-03-24 2017-08-29 Semiconductor Components Industries, Llc Imaging systems having image sensor pixel arrays with phase detection capabilities
US10145942B2 (en) * 2015-03-27 2018-12-04 Intel Corporation Techniques for spatio-temporal compressed time of flight imaging
US20160377414A1 (en) * 2015-06-23 2016-12-29 Hand Held Products, Inc. Optical pattern projector
CN105115417B (zh) * 2015-07-09 2018-03-20 中国科学院上海光学精密机械研究所 波前传感器及波前测量方法
JP6622515B2 (ja) * 2015-08-26 2019-12-18 キヤノン株式会社 レンズアレイ、波面センサ、波面計測装置、形状計測装置、収差計測装置、光学素子の製造方法及び光学機器の製造方法
US9420164B1 (en) 2015-09-24 2016-08-16 Qualcomm Incorporated Phase detection autofocus noise reduction
TWI791236B (zh) * 2015-12-30 2023-02-01 美商艾倫神火公司 光學窄播
CA3026789A1 (en) 2016-06-07 2017-12-14 Airy3D Inc. Light field imaging device and method for depth acquisition and three-dimensional imaging
US10451890B2 (en) * 2017-01-16 2019-10-22 Cymer, Llc Reducing speckle in an excimer light source
CN111670576B (zh) 2017-12-05 2022-10-25 艾瑞3D有限公司 用于深度获取的光场图像处理方法
WO2019223746A1 (en) 2018-05-23 2019-11-28 Mediatek Inc. Method and apparatus of video coding using bi-directional cu weight
KR102394823B1 (ko) * 2018-08-01 2022-05-06 큐셀 피.씨. 하이브리드 분광 이미저

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006300876A (ja) 2005-04-25 2006-11-02 Nikon Corp 干渉測定方法
JP2009265101A (ja) 2008-04-22 2009-11-12 Onera (Office National D'etudes & De Recherches Aerospatiales) 光ビームの波面を解析するための方法、位相格子および装置
WO2015198331A1 (en) 2014-06-25 2015-12-30 Ramot At Tel-Aviv University Ltd. System and method for light-field imaging

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220187138A1 (en) * 2020-12-14 2022-06-16 Gerchberg Ophthalmic Dispensing, PLLC Totagraphy: Coherent Diffractive/Digital Information Reconstruction by Iterative Phase Recovery Using Special Masks
US12031868B2 (en) * 2020-12-14 2024-07-09 Wavefront Analysis Systems Llc Totagraphy: coherent diffractive/digital information reconstruction by iterative phase recovery using special masks

Also Published As

Publication number Publication date
IL251636A0 (en) 2017-06-29
EP3607286A1 (en) 2020-02-12
US20200278257A1 (en) 2020-09-03
KR20190137104A (ko) 2019-12-10
WO2018185740A1 (en) 2018-10-11
IL251636B (en) 2018-02-28
CA3059139A1 (en) 2018-10-11
CN110494723B (zh) 2022-06-03
US11293806B2 (en) 2022-04-05
CN110494723A (zh) 2019-11-22
KR102537284B1 (ko) 2023-05-26
JP2020515831A (ja) 2020-05-28
EP3607286B1 (en) 2025-11-12

Similar Documents

Publication Publication Date Title
JP7246093B2 (ja) 波面センサおよびその使用方法
US12052518B2 (en) Multi-modal computational imaging via metasurfaces
US9927300B2 (en) Snapshot spectral imaging based on digital cameras
US10184830B2 (en) Apparatus and method for snapshot spectral imaging
US8949078B2 (en) Filter modules for aperture-coded, multiplexed imaging systems
US9459148B2 (en) Snapshot spectral imaging based on digital cameras
US9030580B2 (en) Color filter modules for plenoptic XYZ imaging systems
JP2021506168A (ja) 奥行取得のためのライトフィールド画像処理方法
EP3956702B1 (en) Systems and methods for parallel polarization analysis
JP2008310828A (ja) 電気光学画像システムのエンドツーエンド設計
JP7533915B2 (ja) 高効率多重化
CN104121990A (zh) 基于随机光栅的压缩感知宽波段高光谱成像系统
US7826066B2 (en) Compact achromatic optical interferometer of the three-wave lateral shearing type
CN118129908B (zh) 基于偏振光栅分光的偏振成像光谱仪及偏振图谱重建方法
CN116972969A (zh) 一种基于二维色散光谱重构的光谱探测方法及装置
Hu et al. Mid-wave infrared multispectral imaging by DOE
McMackin et al. Design of a multi-spectral imager built using the compressive sensing single-pixel camera architecture
Vandervlugt et al. Reconfigurable liquid crystal dispersing element for a computed tomography imaging spectrometer
CN113984206A (zh) 一种基于多台阶衍射滤光器的快照式光谱成像系统
Feng et al. Computational Hyperspectral Camera Design based on Co-modulation of Diffractive Optical Element and Superposition Fabry-Perot Filter Array
WO2022185720A1 (ja) 撮像装置、および撮像装置の作動方法、並びにプログラム
CN120447199A (zh) 一种多波长偏振成像超表面及设计方法与成像系统
CN120008735A (zh) 一种基于fpga的高光谱成像方法与系统
CN120970815A (zh) 一种偏振光谱调制型多谱段立体成像方法
CN118999805A (zh) 用于光学表征的智能自适应波前测量系统和方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20210202

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20210202

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20210929

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20211012

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220106

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20220524

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20220822

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20221018

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20230214

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20230307

R150 Certificate of patent or registration of utility model

Ref document number: 7246093

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150