JP7222542B2 - 流体封止装置及び圧力検出器校正装置 - Google Patents

流体封止装置及び圧力検出器校正装置 Download PDF

Info

Publication number
JP7222542B2
JP7222542B2 JP2019101224A JP2019101224A JP7222542B2 JP 7222542 B2 JP7222542 B2 JP 7222542B2 JP 2019101224 A JP2019101224 A JP 2019101224A JP 2019101224 A JP2019101224 A JP 2019101224A JP 7222542 B2 JP7222542 B2 JP 7222542B2
Authority
JP
Japan
Prior art keywords
pressure
fluid
sealing
valve
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019101224A
Other languages
English (en)
Japanese (ja)
Other versions
JP2019211477A5 (https=
JP2019211477A (ja
Inventor
昌彦 滝本
正明 永瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Publication of JP2019211477A publication Critical patent/JP2019211477A/ja
Publication of JP2019211477A5 publication Critical patent/JP2019211477A5/ja
Application granted granted Critical
Publication of JP7222542B2 publication Critical patent/JP7222542B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/88—Electrical aspects, e.g. circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/30—Control or safety arrangements for purposes related to the operation of the system, e.g. for safety or monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/62—Control or safety arrangements characterised by the type of control or by internal processing, e.g. using fuzzy logic, adaptive control or estimation of values
    • F24F11/63—Electronic processing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/70—Control systems characterised by their outputs; Constructional details thereof
    • F24F11/72—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/70—Control systems characterised by their outputs; Constructional details thereof
    • F24F11/80—Control systems characterised by their outputs; Constructional details thereof for controlling the temperature of the supplied air
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
    • F16K17/02—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side
    • F16K17/164—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side and remaining closed after return of the normal pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F2110/00—Control inputs relating to air properties
    • F24F2110/40—Pressure, e.g. wind pressure

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Signal Processing (AREA)
  • General Physics & Mathematics (AREA)
  • Fuzzy Systems (AREA)
  • Mathematical Physics (AREA)
  • Measuring Fluid Pressure (AREA)
JP2019101224A 2018-05-31 2019-05-30 流体封止装置及び圧力検出器校正装置 Active JP7222542B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018104671 2018-05-31
JP2018104671 2018-05-31

Publications (3)

Publication Number Publication Date
JP2019211477A JP2019211477A (ja) 2019-12-12
JP2019211477A5 JP2019211477A5 (https=) 2022-03-09
JP7222542B2 true JP7222542B2 (ja) 2023-02-15

Family

ID=68694575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019101224A Active JP7222542B2 (ja) 2018-05-31 2019-05-30 流体封止装置及び圧力検出器校正装置

Country Status (2)

Country Link
US (1) US11215374B2 (https=)
JP (1) JP7222542B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7099603B1 (ja) * 2021-09-07 2022-07-12 栗田工業株式会社 半導体製造用液体供給装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002039903A (ja) 2000-07-27 2002-02-06 Yokogawa Electric Corp 圧力発生器の制御方法及び圧力発生器並びに圧力発生器の圧力校正方法及び圧力校正手段を備えた圧力発生器
WO2011067877A1 (ja) 2009-12-01 2011-06-09 株式会社フジキン 圧力式流量制御装置
US20140230915A1 (en) 2013-02-15 2014-08-21 Daniel T. Mudd Gas delivery system for outputting fast square waves of process gas during semiconductor processing
JP2018025499A (ja) 2016-08-12 2018-02-15 株式会社フジキン 濃度測定装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1038741A (ja) * 1996-07-26 1998-02-13 Hitachi Plant Kensetsu Service Kk 圧力計の精度検査方法及びその装置
JP3580645B2 (ja) * 1996-08-12 2004-10-27 忠弘 大見 圧力式流量制御装置
JP3522535B2 (ja) * 1998-05-29 2004-04-26 忠弘 大見 圧力式流量制御装置を備えたガス供給設備

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002039903A (ja) 2000-07-27 2002-02-06 Yokogawa Electric Corp 圧力発生器の制御方法及び圧力発生器並びに圧力発生器の圧力校正方法及び圧力校正手段を備えた圧力発生器
WO2011067877A1 (ja) 2009-12-01 2011-06-09 株式会社フジキン 圧力式流量制御装置
US20140230915A1 (en) 2013-02-15 2014-08-21 Daniel T. Mudd Gas delivery system for outputting fast square waves of process gas during semiconductor processing
JP2018025499A (ja) 2016-08-12 2018-02-15 株式会社フジキン 濃度測定装置

Also Published As

Publication number Publication date
US11215374B2 (en) 2022-01-04
US20190368757A1 (en) 2019-12-05
JP2019211477A (ja) 2019-12-12

Similar Documents

Publication Publication Date Title
TWI444800B (zh) Calibration method and flow measurement method of flow controller for gas supply device
US5865205A (en) Dynamic gas flow controller
TWI541626B (zh) Gas flow test system and gas flow test unit
TWI642912B (zh) 用於暫態氣流之度量衡方法
EP2817616B1 (en) Mass flow controllers and methods for auto-zeroing flow sensor without shutting off a mass flow controller
TWI414763B (zh) Gas flow calibration device
US9791867B2 (en) Flow control device equipped with flow monitor
US10317269B2 (en) Flow rate verification unit
CN100462887C (zh) 半导体制造装置和半导体制造方法
JP2020502516A (ja) 質量流量を広範囲で検証するための方法および装置
JP7149444B1 (ja) 圧力減衰速度に基づく質量流量点検の方法、システム、及び装置
JPH05186296A (ja) ウエハ加工システム内のプロセスガスの流量検定、そのための装置および方法
US10845232B2 (en) Mass flow controller, apparatus for manufacturing semiconductor device, and method for maintenance thereof
JP7222542B2 (ja) 流体封止装置及び圧力検出器校正装置
US10890475B2 (en) Diagnostic system, diagnostic method, diagnostic program, and flow rate controller
US8056579B2 (en) Mass flow controller
TW201841088A (zh) 診斷系統、診斷方法、存儲介質和流量控制裝置
US11448535B2 (en) Flow rate calculation system, flow rate calculation system program, flow rate calculation method, and flow rate calculation device
TWI735893B (zh) 氣體流量檢定單元
JP2500788B2 (ja) マスフロ―コントロ―ラ装置及びその校正方法
CN100444310C (zh) 一种质量流量控制器在线校验的方法
JP7413073B2 (ja) 流量測定方法および流量測定装置
CN100468016C (zh) 气体流量控制装置校验的方法
KR20260051273A (ko) 질량 유량 제어기의 자동 자체 교정을 위한 방법 및 장치
JP2023163311A (ja) 流量測定装置、流量測定方法および流量制御装置の校正方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220301

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20220301

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20221227

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20230106

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20230127

R150 Certificate of patent or registration of utility model

Ref document number: 7222542

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250