JP7209955B2 - n型4H-SiC単結晶基板およびn型4H-SiC単結晶基板の製造方法 - Google Patents
n型4H-SiC単結晶基板およびn型4H-SiC単結晶基板の製造方法 Download PDFInfo
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- 239000013078 crystal Substances 0.000 title claims description 167
- 239000000758 substrate Substances 0.000 title claims description 75
- 238000004519 manufacturing process Methods 0.000 title claims description 23
- 239000002994 raw material Substances 0.000 claims description 53
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical group [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 52
- 229910052796 boron Inorganic materials 0.000 claims description 52
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 38
- 239000000843 powder Substances 0.000 claims description 25
- 238000000859 sublimation Methods 0.000 claims description 24
- 230000008022 sublimation Effects 0.000 claims description 24
- 229910052757 nitrogen Inorganic materials 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 16
- 239000007789 gas Substances 0.000 claims description 13
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 description 83
- 239000000370 acceptor Substances 0.000 description 23
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 23
- 230000000052 comparative effect Effects 0.000 description 12
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 238000004854 X-ray topography Methods 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000005011 time of flight secondary ion mass spectroscopy Methods 0.000 description 3
- 238000002042 time-of-flight secondary ion mass spectrometry Methods 0.000 description 3
- 239000013598 vector Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910003468 tantalcarbide Inorganic materials 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 235000015220 hamburgers Nutrition 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- GPTONYMQFTZPKC-UHFFFAOYSA-N sulfamethoxydiazine Chemical compound N1=CC(OC)=CN=C1NS(=O)(=O)C1=CC=C(N)C=C1 GPTONYMQFTZPKC-UHFFFAOYSA-N 0.000 description 1
- LALRXNPLTWZJIJ-UHFFFAOYSA-N triethylborane Chemical compound CCB(CC)CC LALRXNPLTWZJIJ-UHFFFAOYSA-N 0.000 description 1
- WXRGABKACDFXMG-UHFFFAOYSA-N trimethylborane Chemical compound CB(C)C WXRGABKACDFXMG-UHFFFAOYSA-N 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/02—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion materials in the solid state
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- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/90—Carbides
- C01B32/914—Carbides of single elements
- C01B32/956—Silicon carbide
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
- C30B23/06—Heating of the deposition chamber, the substrate or the materials to be evaporated
- C30B23/066—Heating of the material to be evaporated
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
- H01L29/1608—Silicon carbide
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- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2002/00—Crystal-structural characteristics
- C01P2002/50—Solid solutions
- C01P2002/52—Solid solutions containing elements as dopants
- C01P2002/54—Solid solutions containing elements as dopants one element only
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- C01P2006/40—Electric properties
Description
[1]ドナー元素の濃度とアクセプター元素の濃度の双方が3.0×1018/cm3以上であり、貫通転位密度が4000個/cm2未満である、n型4H-SiC単結晶基板。
[2]前記アクセプター元素の濃度が、3.0×1018/cm3以上2.0×1019/cm3未満である、[1]に記載のn型4H-SiC単結晶基板。
[3]前記アクセプター元素がホウ素(B)である、上記[1]又は[2]に記載のn型4H-SiC単結晶基板。
[4]前記ドナー元素が窒素(N)である、上記[1]~[3]のいずれかに記載のn型4H-SiC単結晶基板。
[5]シリコン源(Si)、炭素源(C)、及びアクセプターとなる元素を含む原料を坩堝内に充填する工程と、
前記原料を、前記坩堝内で0.1質量%以上予備昇華する工程と、
前記原料と対向させて種結晶を設置する工程と、
ドナーとなる元素を含んだガスを前記坩堝内に供給すると共に、前記予備昇華後の前記原料を前記坩堝内で昇華させて、前記種結晶の表面に単結晶層を成長させる工程と、
を有する、n型4H-SiC単結晶基板の製造方法。
[6]前記アクセプターがホウ素(B)である、上記[5]に記載のn型4H-SiC単結晶基板の製造方法。
[7]前記ドナーが窒素(N)である、上記[5]又は[6]に記載のn型4H-SiC単結晶基板の製造方法。
図1に示すように、n型4H-SiC単結晶基板製造装置1は、高周波コイル11と、原料A1を保持可能な容器本体12及び種結晶B1を取付け可能な蓋部13で構成される坩堝14と、坩堝14に外装された断熱部15と、断熱部15との間に空間16を設けて当該断熱部15に外装された管状体17とを備える。
結晶の転位としては、上述のように基底面転位(BPD)や、ダブルショックレー型積層欠陥(DSSF)があるが、BPDやDSSFは、基底面の面内方向に延在する転位である点で、TSD、TEDあるいはTMDとは異なる。
B4C粉末の仕込み量が0.03質量%である原料を準備し、坩堝内で10時間、原料を1.5質量%予備昇華した。その後、坩堝内の蓋部に種結晶を設置し、窒素ガスの分圧比100%のガスを坩堝内に供給すると共に、原料を坩堝内で昇華させて、種結晶上に結晶を成長させ、窒素(N)とホウ素(B)が共ドープされたn型4H-SiC単結晶基板を得た。
B4C粉末の仕込み量が0であるかあるいはB4C粉末の仕込み量を変え、種々の濃度の窒素(N)とホウ素(B)が共ドープされたn型4H-SiC単結晶基板を得た。また、実施例1と同様の方法で、n型4H-SiC単結晶基板中の窒素濃度およびホウ素濃度、TD密度、ならびに種結晶と成長結晶との界面付近での貫通転位密度の増加の有無を測定した。窒素濃度およびホウ素濃度は、種結晶と成長結晶との界面付近ではなく、その界面から3mm~15mm結晶成長した部分で測定した。結果を表1に示す。
11 熱源
12 容器本体
13 蓋部
14 坩堝
15 断熱部
16 空間
17 管状体
A1 原料
B1 種結晶
Claims (5)
- ドナー元素の濃度とアクセプター元素の濃度の双方が3.0×1018/cm3以上であり、貫通転位密度が4000個/cm2未満であり、
前記アクセプター元素がホウ素(B)である、n型4H-SiC単結晶基板。 - 前記アクセプター元素の濃度が、3.0×1018/cm3以上2.0×1019/cm3未満である、請求項1に記載のn型4H-SiC単結晶基板。
- 前記ドナー元素が窒素(N)である、請求項1又は2に記載のn型4H-SiC単結晶基板。
- シリコン源(Si)、炭素源(C)、及びアクセプターとなる元素を含む原料を坩堝内に充填する工程と、
前記原料を、前記坩堝内で0.1質量%以上予備昇華する工程と、
前記原料と対向させて種結晶を設置する工程と、
ドナーとなる元素を含んだガスを前記坩堝内に供給すると共に、前記予備昇華後の前記原料を前記坩堝内で昇華させて、前記種結晶の表面に単結晶層を成長させる工程と、
を有し、
前記アクセプターとなる元素を含む原料はB 4 C粉末である、n型4H-SiC単結晶基板の製造方法。 - 前記ドナーが窒素(N)である、請求項4に記載のn型4H-SiC単結晶基板の製造方法。
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US16/553,302 US11655561B2 (en) | 2018-08-30 | 2019-08-28 | n-Type 4H—SiC single crystal substrate and method of producing n-type 4H—SiC single crystal substrate |
CN201910802908.7A CN110872731B (zh) | 2018-08-30 | 2019-08-28 | n型4H-SiC单晶基板和n型4H-SiC单晶基板的制造方法 |
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